LEF-OM002xx

H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 LECPA Horizontal Transfer 50 12 B B 20 B 10 A A 40 W(kg) A W(kg) H H W(kg) 15 8 30 6 10 20 4 10 5 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 V(mm/s) V (mm/s)

VDW Series

(the value under the prescribed conditions) 0.8 0.7 0.6 Subsonic Critical pressure 0.5 0.4 0.45 0.45 Sonic 0.4 0.4 0.35 0.35 0.3 0.3 0.3 0.25 0.2 0.25 0.2 0.2 0.15 0.15 0.1 0.05 0.1 0.1 0.05 S = 0.54 VDW101 10 60 50 40 30 20 10 20 VDW 1.6 S = 1.2 125 100 75 50 S = 3.2 VDW202.3 350 300 250 200 150 100 50 S = 5.8 VDW203.2 600 500 400 300 200 100 S = 2.8 VDW302 300 250 200 150 100 50 VDW303

CP95

9 @0 @1 @2 @3 @4 Material Description Spring washer Set screw Rod end nut Wear ring Cushion seal Rod seal Piston seal Cushion valve seal Cylinder tube gasket Piston gasket Magnet No. q w e r t y u i o !0 !1 !2 !

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Assembly 1) Terminal block e connected with housing r should be reinstated.

RSH/RS1H

400 RS H A 63 Lateral load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000

CP95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

RSH/RS1H

300 -X 200 200 100 100 200 0 10 20 30 40 10 20 30 40 Data Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 10-9-19 19 Series RSA Dimensions mFX+0.2 FZ 4-N through 8-O counter bore Workpiece transfer direction L CZ S X CT CT Y V U FT CD Conveyor lower limit position T R H Stroke 2-Rc P G D A Q Rear pressure port Front pressure port B WB W (width across corners I) E (mm) Bore size

MXS Series Air Slide Table

0.025 MXS2540 MXS2550 0.04 0.03 MXS2550 MXS2540 0.020 0.03 MXS2530 0.02 0.015 MXS2530 MXS2520 MXS2510 MXS2520 MXS2510 0.02 0.010 0.01 0.01 0.005 0 100 200 300 400 0 100 200 300 400 50 100 150 200 250 300 0 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 50 Air Slide Table MXS Series Option Specifications Dimensions of Stroke Adjuster at Extension End (mm) Adjustable

MHZ

6 Lever Type C snap ring Heat treated Electroless nickel plated Stainless steel Brass r !7 Guide Exhaust plug Stainless steel Heat treated Polyvinyl formal t !8 Finger Exhaust filter Stainless steel Stainless steel spring wire y !

MHZ

6 Lever Type C snap ring Electroless nickel plated Stainless steel Heat treated Brass r !7 Guide Exhaust plug Stainless steel Heat treated Polyvinyl formal t !8 Finger Exhaust filter Stainless steel Stainless steel spring wire y !

VT307

Air flow direction: Port P Port A , Port R Block Component Parts Operation principle Spool valve w is pushed upward by the return spring e, port P is closed, and then port A and port R are opened. Air flow direction: Port P Block, A R VT DIN terminal and terminal (with light/surge voltage suppressor) are connected inside as in the figure below.

IDX-OM-U021

1.6MPa 1-2-4 P 1-2-5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1-2-6 V ON 1.5 OFF 0.5 1-2-7 3 2 1 1-2 IDF100150F 1 2 IDX-OM-U021 1 1-3 A 3 300 A 1-3 IDF100150F 1 3 IDX-OM-U021 1 B V IDF100F V IDF125F V IDF150F B 1-3 IDF100150F 1 4 IDX-OM-U021 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm

Series VCL

V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet:

Series VCS

F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

MQQ

6 r t !3 w e q RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

MQQ

6 r t !3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

0.01

ID Construction IDG SFD101-02 SFD102-02 IDK w q r t e q r e w AMG AFF AM AMD AMH Component Parts Component Parts No. Description Note Material Aluminum alloy No.

MLU

5 to 300 5 to 300 5 to 300 Rc, NPT, 1/8 Rc, NPT, 1/8 M8 x 1.25 depth 13 M8 x 1.25 depth 11 Rc, NPT, 1/8 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 KA H2 K MM MM1 NA NB NC ND NE NG NH NH1 NI NJ NS NY P S ZZ ZZ1 NF Model 10 12 14 18 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M6 x 1 depth 12 49 57.5 60 72 5.5 5.5 6 7 14 14 15 18 MLUB25 MLUB32 MLUB40 MLUB50 14 15.5 16 21.5 7.5 depth 4.5 9 depth

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

P R DC 24V, 12V 24V, 12V Coil rated voltage AC 50/60 Hz (inrush) 110V 110V A DC 3.1W, 0.3W Note3) (Holding) 1.5W Power consumption AC 1.45VA P R Plug-in, L/M type connector (With indicator light and surge voltage suppressor) Electrical entry Latching type specification Note 1) Consult P/A for available combinations. Grommet type entry is N/A with any of these options.