Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Note 3) For calculation on the longitudinal dimension of the intermediate strokes, refer to page 7-6-3.

Pilot Operated

3 o !1 !2 i e t !0 A !3 !2 !1 o i t !0 !3 !2 !1 o i e t !0 A A e u w y q B C P2 P1 OUT IN P1 w y u B q w y u B q P2 OUT C C IN VXD2272/2382/2392 (32A to 50A) VXD2270/2380/2390 (32A to 50A) !4 !5 !3 !1 i t e !2 !0 A r u B y q !3 !2 !1 i t e o !0 A r u B y q w o w C C Operation When the coil !

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

3 q u !0 !2 r y e !5 o !

Basic type / Direct mount type Series CY3B/CY3R

3 #3 !7 !2 @3 e #1 t y $1 u w q @6 @2 @1 $3 E' Section E-E' CYV32 t !9 $0 @1 @2 y u @6 #9 @5 @4 @3 Note Component Parts No. No.

VFR

1, Metal joint q, w, Gasket A e, Guard !3 !1 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 Non plug-in type (For 10) (3) Plug-in type With terminal block (3) For 01T 01T1 AXT625-3A-20 End plate (D side) assembly End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

3 #2 !4 !7 o #0 !6 i @7 @1 @9 @6 @4 #9 !0 !9 u #6 20 t #8 Single acting (TL, TM) Double acting spring type (BL, BM) q y $0 $1 #4 r !1 e #5 @2 #7 #7 !2 #7 #3 @5 @5 #1 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 Single acting spring extended (TL, TM) Double acting spring type (BL, BM) y r $0 !1 !

VFS

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly !1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !

Auto Switch Guide

4 4 3 3 For the applicable auto switch model, refer to the table below.

15

3 mm or more.

100

How to Order Lead Wire Assembly with Connector ZS L 38 3 q Number of cores t Manual override 3 3 cores, 1 output 4 4 cores, 2 outputs Nil Non-locking push type D Push-turn locking slotted type q y CE-compliant c How to Order Suction Cover Assembly Nil (For AC) Q CE-compliant (For DC) ZL112A FC1 A Suction cover assembly (With filter element) q How to Order Connector and Socket for Supply

1.1

Thermo-cooler T1: Outlet temperature Q: Heat generation amount Customers equipment (3) Derive the amount of heat generated from the output.

Modular Type Regulators Series AR

Ambient and fluid temperature (C) 5 to 60 (with no freezing) Applicable Model Applicable Model Model AR25 AR40 AR40-06 AR50 1/4, 3/8 AR30 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 AR60 Model AR20 AR40 AR40-06 AR50 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 AR60 Port size 1 Port size 1 30 AR X430 03 BG 30 AR X425 03 BG For high/low temperature Option/Semi-standard: Select one each

AW

Modular Type Filter Regulators Series AW Filter Regulator Series AW Model Port size Options AW10 M5 x 0.8 AW20 1/8, 1/4 AW30 1/4, 3/8 AW40 1/4, 3/8, 1/2 AW40-06 3/4 AW60 3/4, 1 Pages 366 through to 377 Filter Regulator with Backflow Function Series AWK AW20K 1/8, 1/4 AW30K 1/4, 3/8 AW40K 1/4, 3/8, 1/2 Bracket AW40K-06 3/4 Float type auto drain AW60K 3/4, 1 Square embedded type pressure gauge

Fieldbus System

How to Order Valves (With mounting screw) SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series y Pilot valve option !

Step Motor Controller

B-1 A-1 B-2 A-2 B-3 A-3 Circuit Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

1, 2, 3 and 4.

HRS100/150

Deionized water: Electric conductivity 1 mS/cm or higher (Electric resistivity 1 MWcm or lower) Note 3) q Facility water temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid temperature: 20C, r Circulating fluid flow rate: Rated flow, t Power supply: 200 VAC Note 4) q Facility water temperature: 32C, w Circulating fluid: Tap water, e Circulating fluid flow rate: Rated flow

energy saving effect

phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -20 3-phase 200 VAC (50 Hz), 3-phase 200 to 230 VAC (60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) -40 3-phase 380 to 415 VAC (50/60 Hz) Set temp. range 5 to 35C Set temp. range 5 to 35C Set temp. range 5 to 35C Temp. stability 0.1C Temp. stability

Stopper Cylinder

5 y q !4 r !6 e !0 !3 !2 !1 w o @0 !7 i !9 !8 u t @8 #3 @9 $3 $5 $4 #0 $1 $2 $6 Auto switch @6 @4 #1 @3 @5 #6 #5 #7 #8 Round bar rod end type (D) Chamfered rod end type (K) @7 #4 #2 #9 $0 Component Parts Component Parts No. Description Material Note No.

Fieldbus System

How to OrderValves (With two mounting screws) SY 3 5 1 0 0 1 q w r e t y u i o !0 !1 Base mounted q Series !