Size: 32, Motor Mounting Position: In-line Type, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 100mm, Motor Option: w/Lock, Rod End Thread: Male, Mounting: -, Actuator Cable: -, Actuator Cable Length: -, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 100mm, Motor Option: w/Lock, Rod End Thread: Male, Mounting: -, Actuator Cable: -, Actuator Cable Length: -, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for JXC: -

Size: 40, Motor Mounting Position: Top, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 100mm, Motor Option: w/Lock, Rod End Thread: Male, Mounting: -, Actuator Cable: -, Actuator Cable Length: -, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for JXC:

Size: 40, Motor Mounting Position: Left, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 100mm, Motor Option: w/Lock, Rod End Thread: Male, Mounting: -, Actuator Cable: -, Actuator Cable Length: -, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for JXC

Accuracy: Basic, Motor Mounting Position: In-Line, Motor Type: S4 [AC Servo Motor, (Incremental Encoder), 400W], Lead: 5mm, Stroke: 100mm, Dust/Drip Proof: IP5x (Dust Proof Specification), Motor Option: w/Lock, Rod End Thread: Rod End Male Thread, 1 Rod End Nut is Included, Mounting: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Connector: -

Accuracy: Basic, Motor Mounting Position: Top Mounting, Motor Type: T8 [AC Servo Motor, (Absolute Encoder), 400W], Lead: 5mm, Stroke: 100mm, Dust/Drip Proof: IP5x (Dust Proof Specification), Motor Option: w/Lock, Rod End Thread: Rod End Male Thread, 1 Rod End Nut is Included, Mounting: -, Cable Type: -, Cable Length: -, Driver Type: -, I/O Connector: -

Size: 16, Motor Mounting Position: In-line Type, Motor: A [Servo Motor (24 VDC)], Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 100mm, Motor Option: w/Lock, Rod End Thread: Male, Mounting: -, Actuator Cable: -, Actuator Cable Length: -, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for

Size: 25, Motor Mounting Position: In-line Type, Motor: A [Servo Motor (24 VDC)], Lead Screw: Size 16: 5mm, Size 25: 6mm, Size 32/40: 8mm, Stroke: 100mm, Motor Option: w/Lock, Rod End Thread: Male, Mounting: -, Actuator Cable: -, Actuator Cable Length: -, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for

Size: 32, Motor Mounting Position: Right, Motor: Step Motor (Servo 24 VDC), Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 100mm, Motor Option: w/Lock, Rod End Thread: Male, Mounting: -, Actuator Cable: -, Actuator Cable Length: -, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for JXC

Size: 25, Motor Mounting Position: Top, Motor: A [Servo Motor (24 VDC)], Lead Screw: Size 16: 2.5mm, Size 25: 3mm, Size 32/40: 4mm, Stroke: 100mm, Motor Option: w/Lock, Rod End Thread: Male, Mounting: -, Actuator Cable: -, Actuator Cable Length: -, Controller Type - LEC, JXC: -, I/O Cable Length for LEC: -, Controller Mounting: -, Communication Plug Connector or I/O Cable Length for JXC:

Size: 32, Motor Mounting: Top Mounting Type, Motor Type: T7 [AC Servo Motor, (Absolute Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 100mm, Motor Option: w/Lock, Rod End: Rod End Male Thread, 1 Rod End Nut Included, Mounting: -, Actuator Cable Type: -, Cable Length: -, Controller Type: -, I/O Connector: -

Size: 32, Motor Mounting: In-line Type, Motor Type: T7 [AC Servo Motor, (Absolute Encoder), Output 200W], Lead: C [LEY25, 3mm; LEY32, 4(5)mm], Stroke: 100mm, Motor Option: w/Lock, Rod End: Rod End Male Thread, 1 Rod End Nut Included, Mounting: -, Actuator Cable Type: -, Cable Length: -, Controller Type: -, I/O Connector: -

PSxx-OMT0005CN

02 R1/4(M5) 28 (4~20mA) M12 3m ZS-37-A 1 M12 3m ZS-37-B 1 Rc1/4 ZS-31-X175 1 -8No.PS-OMT0005CN-A M12 C3604+AI203(96)FKM (Nm) R1/4 812 -9No.PS-OMT0005CN-A PSE570ZS-37-AZS-37-B ZS-37-A ZS-37-B 1 DC(+) 2 N.C. 3 DC(-) 4 -10No.PS-OMT0005CN-A DC(+) PSE57-02 15V 1 k N.C.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

Blanking plug (with O-ring) 1 VVCC12-10A-1 For 2 port valve Hexagon socket head plug (R1/4) 1 Blanking plug (with O-ring) 1 VVCC13-10A-1 For 3 port valve Hexagon socket head plug (R1/4) 2 9 VCC Series Specifications VCC12 VCC13 VCC12D Model Passage number 2 port 3 port Note 3) 2 port (Diaphragm type) Construction (Fluid contact material) Poppet seal (PEEK resin + Stainless steel) + Special

K35-OMW0030

FU port FB port FA port R1 port R3 port P port R2 port 26 5-2. Electrical Wiring Diagram Perform wiring according to the connector pin numbers and the wiring diagram. (1) Connector pin numbers (Male side) Pin No.

IDX-OM-W094

GWP (GWP) GWP Regulation (EU) No 517/2014 Regulation EU No 517/2014 (IPCC AR4 ) IPCC AR4 R410A 2,088 2,090 2,088 2,090 R410A 1 IDFA60/70/80/90 Series 7-2 IDX-OM-W094 7.3 Port size Compressed air inlet Compressed air outlet Port size A B E D G F C P J M N H K O L mm A B C D E F G H J K L M N O P IDFA60 R1 307 745 605 161 405 681 94 71 46 12.5 330 704 355 126 IDFA70 R1-1/2 342 890

Digital Pressure Switch

The tightening torque of piping must be 1 Nm for M5 (This is equivalent to approximate 1/6 extra tightening after manual tightening.) and 7 to 9 Nm for R1/8 and NPT1/8. Exceeding this value can damage the piping. For piping of the Pressure switch, hold the piping with a spanner on the metal part of the piping (Piping attachment).

CG5-S

A A1 L1 NX MM NDH10 R1 U1 A A1 L L1 NX MM NDH10 NZ R1 U1 +0.4 +0.2 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.058 0 +0.058 0 0.2 0.4 8 20 20 I-G02SUS Y-G02SUS 8 8 8 34 8.5 16 25 M8 x 1.25 10.3 11.5 34 8.5 16 21 25 M8 x 1.25 16 10.3 11.5 IY-G02SUS +0.4 +0.2 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G03SUS Y-G03SUS 25, 32 25,32 10 10 10 10 41 10.5 20 30 M10 x 1.25 12.8 14 41 10.5

Table of Contents

Assuming the attachment material is aluminium alloy (relative density=2.7), r1= 16.4 (mm).

5 Port Air Operated Valve Series VFA3000 1

1 5 Port Air Operated Valve Series VFA3000 How to Order SA Thread type (Including pilot port) VA Nil F N T Rc G NPT NPTF SA Port size (P, A, B port) VA 01 02 1 8 1 4 Option R1, R2 port are 1/8.