CNS

0.4 MPa P < 0.5 MPa CLS 3000 3000 CLQ 2000 2000 MLGP 160 140 RLQ 1000 1000 Load weight: m (kg) Load weight: m (kg) 700 800 900 700 800 900 125 MLU 600 600 160 500 500 ML1C 400 400 140 320 125 300 300 D200 200 -X 280 20100 100 100 500 400 300 200 100 500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 3000 3000 2000 2000 160 140

Digital Flow Switch (Integrated display type) ( compatible)

(Page 83) P1H(n1H) (Upper limit of window comparator) Setting of OUT1 output set value (Upper limit of window comparator) 1015 0x03F7 0 R/W S16 600 Y Setting range Refer to "Settable range list".

Digital Flow Switch (Integrated display type) ( compatible)

(Page 85) P1H(n1H) (Upper limit of window comparator) Setting of OUT1 output set value (Upper limit of window comparator) 1015 0x03F7 0 R/W S16 600 Y Setting range Refer to "Settable range list".

IDX-OM-W028

Spaces needed for maintenance Front : 600 mm Rear : 600 mm Top : 600 mm Right : 600 mm Left : 600 mm Locations the ventilation grille of the product can be blocked. Place where rejection style air of air compressor or other driers (hot wind) is inhaled. Condition which has sudden pressure/flow rate changes.

IZx-OMR0035

Air flow SW:1 10 10 Air flow SW:10 5 5 Air flow SW:10 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance mm Installation distance mm 28 Doc.

VQ7-6/7-8

Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm 50 63 80 100 125 140 160 180 200 250 300 Average speed (mm/s) Series 1000 1100 Perpendicular, upward actuation 900 Horizontal actuation 800 700 600 500 400 300 200 100 VK VQ7-8-FG-S-A03 VQ7-8-FG-S-RA03 VZ VF 0 1000 1100 VFR 900 800 700 600 500 400 300 200

ALF400 to 900, ALT-5/-9

We recommend oil is supplied from cam handle (plug for oil supply) of an auto feed tank. 14-13-7 Series ALF400 to 900, ALT-5, -9 Construction: Auto Feed Lube ALF400 ALF800/900 ALF500/600 Component Parts JIS Symbol No.

Cylinder with Lock Series CNS

600 500 MLU 400 200 300 MLGP ML1C 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 700 800 3000 160 600 2000 160 140 500 140 125 125 400 1000 Load mass: m (kg) Load mass: m (kg) 700 800 900 300 600 500 400 200 300 D200 -X Individual -X 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Refer to graph (16) based on horizontal mounting, the maximum speed of 600 mm/s, and 125 mm stroke.

Vacuum System Peripherals:

B Electrical entry 1 Symbol 2 3 4 5 6 7 8 9 10 Order of manifold (Station) G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) 05 07 10 13 H M Common Individual J K A B P5 Q5 None E14 E15 E16 E17 E18 E19 M15 M21 Nil L C CL CN Nil L Nozzle diameter L L type plug connector LN LO With lead wire Without lead wire Without connector For AC, only L or LO is available.

Series VQ Metal Seal/Rubber Seal Body Ported

controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 4.5 (0.25) VQ1000 (Metal seal) 6 6.3 (0.35) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore size (mm) Series CJ2 Pressure 0.5MPa Load

ZR

Lead wire length Nil 6 10 15 20 25 30 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) ZR120S1-K15MZ-EC . 1 pc.

Process Pump

First, mark the intersection point for a discharge rate of 600 mL/min and a discharge pressure of 0.15 MPa. 2. Find the pilot air pressure for the marked point.

25

Since 45% of the clear water discharge is equivalent to 270 mL/min in the required specifications, 270 mL/min 0.45 = approximately 600 mL/min, indicating that a discharge rate of 600 mL/min is required for clear water. 3. Finally, find the pilot air pressure and pilot air consumption based on the flow rate characteristic graphs.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Output impedance: 1 k L4: Analog output: 4 to 20 mA Load impedance: 50 to 600 Max. load current: 80 mA, Internal voltage drop: 1.5 V or less L3: Analog output: 1 to 5 V or 0 to 10 V can be selected.

VZ1000

800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VP4 VZ1120--M5 (Piping: 6 x 1 m) VZS VFS VS4 AS2001F-06/AN120-M5 AS2301F-M5-06/AN120-M5 Speed controller/Silencer It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

350, 400, 450, 500, 600, 700, 800, 900, 1000 63 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Cylinder with Lock Series CLS

140 Load mass: m (kg) Load mass: m (kg) 180 1000 RLQ 700 800 900 600 125 160 500 MLU 600 140 400 500 125 400 MLGP 300 300 ML1C 200 200 [Example] 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5 MPa P 0.5 MPa P 250 4000 3000 3000 200 2000 180 250 2000 160 140 200 1000 125 180 700 800 900 Load mass: m (kg) Load mass: m (kg

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Applicable flow range [L/min] 1 2 0.2 0.5 5 10 20 25 50 100 150 200 300 500 600 1000 2000 2 200 5 500 10 1000 Compact, Space saving 500 L/1000 L type the volume of the current product (200 L type) Approx.1 3 200 L type 34 34 PFMB New PFMB New 73 44 73 18 30 45.2 Series PF2A (Current product) 70 116 Series PF2A (Current product) 70 116 Comparison with PFMB7201 and PF2A721-03 Comparison with

0.4

Bore size Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It