1.63

MGPWM Common Dimensions (mm) A E Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L 50 st or less Over 50 stroke 50 st or less Over 50 stroke 20 25 32 40 50 63 44.5 47 52 56 60.5 67.5 34 35 37 41 42 49 10 10 14 14 18 18 10 12 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24

MHZ

Weight (g) Model End boss type (Symbol) M K E W MHZ2-10 65 66 65 64 MHZ2-16 147 148 148 147 MHZ2-20 277 277 277 277 MHZ2-25 494 496 495 495 12-2-41 41 Parallel Style Air Gripper With Dust Cover Series MHZJ2 Size: 6, 10, 16, 20, 25 How to Order MHZJ2 16 F9BW D Number of auto switches Number of fingers Nil S 2 pcs. 1 pc. 2 2 fingers Bore size Auto switch Action 6 10 16 20 25 6 mm 10 mm 16 mm

3

M MM (mm) Rod flange 10 mm Clamp stroke M 10 mm Clamp stroke MM Rod state Model 20 mm 47.5 82.5 55 90 64 103 63.5 102.5 30 mm 57.5 102.5 65 110 74 123 73.5 122.5 50 mm 77.5 142.5 85 150 94 163 93.5 162.5 20 mm 34 69 41.5 76.5 46.5 85.5 46 85 30 mm 44 89 51.5 96.5 56.5 105.5 56 105 50 mm 64 129 71.5 136.5 76.5 145.5 76 145 Retracted Extended Retracted Extended Retracted Extended Retracted

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

NA P S H1 H NN AL G MM N ZZ Bore (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8 1/8 1/4 Up to 300 7.5 8 15.5 13 26 5 8 22.3 34 M8 X 1.25 M20 X 1.5 41 8 15 116 18 13 28 5 15 24 62 20 Up to 300 7.5 10 33.5 M10 X 1.25 19.5 17 32 6 8 25.3 37 M26 X 1.5 45 8 15 120 22 13 5.5 15 30 62 26 Up to 300 7.5 12 37.5 M10 X 1.25 19.5 17 32 6 8 27.6 M26 X 1.5 39.3 34.5 45 8 15 122 22 13 5.5 15 64

Series CE1

X 1.5 64 35 19 * Refer to p.4.4-8 regarding the rod end nut which is included. * Dimensions for auto switch model D-F79W. 4.4-12 Stroke Reading Cylinder Series CE1 Foot CE1L Bore size Stroke LT LE MK/MK2 LH 3.2 RSQ/RSG LB LA 4-O (Special cap bolt) 4-LD LX LZ LS + Stroke RSH A + Stroke LY CE1 Front flange CE1F Bore size Stroke CE2 4-FD ML2B ML1C FT FV M REA FX FL REC 4-O (Special cap bolt

Magnetically Coupled Rodless Cylinder

51 62 HS 8.5 7.5 6.5 7 8 K 14 11 15 13 15 B 8 9.5 9.5 11 11 HT 17 24 23.5 29 36 C 4.2 5.2 5.2 6.5 6.5 HB 17 21 23.5 29 36 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 Model CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 L 53 62 70 76 90 W 25 40 40 50 60 X 18 22 28 35 40 Y 54.5 64

LJ1H

Refer to page 100 for part numbers. 63 64 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Non-standard Motor Series LJ1H30 High Rigidity Direct Acting Guide Motor Output Slide Screw 200W 30mm/40mm lead Horizontal Mount How to Order F W X10 SE 1 G Stroke 3 LJ1H30 Cable

Table of Contents

Min. operating pressure 5 to 60C (No freezing) 10 turns 10 turns 8 turns Ambient and fluid temperature Number of needle rotation Hexagonal lock nut With seal, Hexagonal lock nut, Nickel plated Option 181 106 64 29 10 6 3 Weight (g) 20 0.3 1700 26 920 14 460 7 230 3.5 105 1.6 Flow rate /min (ANR) Controlled flow (Free flow) Effective area (mm2) Note 1) Flow rate values are measured at 0.5

MHZ

Weight (g) Model End boss type (Symbol) M K E W MHZ2-10 65 66 65 64 MHZ2-16 147 148 148 147 MHZ2-20 277 277 277 277 MHZ2-25 494 496 495 495 12-2-41 41 Parallel Style Air Gripper With Dust Cover Series MHZJ2 Size: 6, 10, 16, 20, 25 How to Order MHZJ2 16 F9BW D Number of auto switches Number of fingers Nil S 2 pcs. 1 pc. 2 2 fingers Bore size Auto switch Action 6 10 16 20 25 6 mm 10 mm 16 mm

AN

Model Model Model Port size R(PT) Effective area (mm2) Weight (g) Dimensions (mm) Weight Effective area Port size Model Dimensions (mm) R(PT) (mm2) (g) AN200-02 35 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233 74 60 820 263 86 70 A B D A B D 1 4 1 4 AN202-02 35 16 64 22 19 33 84 28 24 47 95 34 24 AN300-03 60 3 8 AN302-03 60 3 8 AN402-04 90 1 2 AN400

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

35 9 64 54 19 32 50 50 118 96 120 60 7 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 133 96 140 66 9 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 64 50.8 163 196 68 60.5 1 2, 3 4 4-16-7

VZ100/300/500

CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A port (Pitch) (Mounting hole) (P , R port) 4-M3 x 0.5 depth 4.5 (Bracket mounting screw) Stations n L1 L2 18 304 296 19 320 312 20 336 328 17 288 280 14 241 232 15 256 248 16 272 264 13 224 216 10 176 168 11 192 184 12 208 200 9 160 152 6 112 104 7 128 120 8 144 136 5 96 88 2 48 40 3 64

Table of Contents

No. of input/output point: 128 points (Output 64 points, Input 64 points) Controls up to 4 branches with 32 I/O per branch A single cable from the gateway provides both signal and power for each branch, eliminating the need for separate power connections for each manifold. Series SV employs a multi-connector instead of the conventional lead wires for internal.

VQZ1000/2000/3000

Rubber seal 20 or less 26 or less 40 or less 3 position VQZ1420 0.13 0.26 0.54 0.13 0.28 0.55 Metal seal Exhaust center 25 or less 33 or less 47 or less VQZ1421 0.19 0.40 0.71 0.23 0.38 0.87 Rubber seal 25 or less 33 or less 47 or less VQZ1521 0.18 0.39 0.68 0.26 0.41 0.91 Pressure center Rubber seal 14 or less 18 or less 34 or less VQZ2120 0.32 0.20 1.4 0.30 0.21 1.2 Metal seal Single 64

VM

11 1.2 31 54 14 32 59 17 6 8 VHK-B1A 44.5 14.5 27 22 16.5 26 9.7 7.2 1 4 22 46 73.8 30.5 43.3 76.3 31.5 44.8 21.5 4 20.8 21.8 14 3.2 49 68 19 63 70 22 10 12 VHK-B2A 49 17 1 30 25 21.5 31 17.5 16.1 18 41 62.4 24.3 38.1 66.2 26.2 40 16.5 3.5 16.8 18.7 11 1.2 41 56 17 40 60 6 8 VHK-B1A 44.5 11.5 27 22 16.5 26 9.7 7.2 3 8 22 46 74.8 30.5 44.3 77.3 31.5 45.8 21.5 4 20.8 21.8 14 3.2 51 68 19 64

Free Mount Cylinder for Vacuum Series ZCUK

34 44 69 43 53 23 29 54 28 29 54 35 ZPT-B8 ZC(D)UKC25 ZC(D)UKQ25 29. 5 42. 5 38. 5 47. 5 51. 5 ZH 76. 5 54. 5 67. 5 63. 5 72. 5 DQ HQ HP 43 35 67 27 42 74 53 53 36 68 34 47 79 43 28 38 70 43 22 23 32 64 28 32 64 35 ZPT-B10 ZC(D)UKC32 ZC(D)UKQ32 ZU 32. 5 45. 5 41. 5 50. 5 54. 5 64. 5 77. 5 73. 5 82. 5 86. 5 ZL Rod end shape: Pad direct mounting ZY Tubing bore: 10 Tubing bore: 16 to 50 ZF

VXP21/22/23

64 160 170 180 135 140 155 67.5 70 77.5 169 (186.5) 51.5 54.5 59 100 105 120 36 42 52 23 25.5 25.5 35 40 40 12 14 14 92 (102) 184 (199) 103 (113) 202.5(217.5) 114 (124) ( ): N.O. 17-3-52

VXZ

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 K P 88 97 108.5 113.5 72 80 95 100 95 95 97 97 62 62 64 64 17-3-67 8 The VX series will be revised shortly. Series VXZ22/23 Construction N.C. N.O.

Series VQ Metal Seal/Rubber Seal Body Ported

Series MELSEC-A AJ71PT32-S3, AJ71T32-S3 A1SJ71PT32-S3 Max. 64 stations, connected to remote I/O stations (Max. 512 points). 16 outputs, 2 stations occupied.

Series VQ Base Mounted Metal Seal/Rubber Seal

Series MELSEC-A AJ71PT32-S3, AJ71T32-S3 A1SJ71PT32-S3 Max. 64 stations, connected to remote I/O stations (Max. 512 points). 16 outputs, 2 stations occupied. T unit Can be connected with PLC I/O card for serial transmission. EX300-TMB1For models of Mitsubishi Electric Corp. EX300-TTA1For models of OMRON Corp. EX300-TFU1For models of Fuji Electric Company Ltd.