Series: Guide, Clean Series, Size: 40, Mounting Pitch: S, Stroke, mm: 1000

Series: Guide, Clean Series, Size: 40, Mounting Pitch: S, Stroke, mm: 950

Series: Guide, Clean Series, Size: 40, Mounting Pitch: S, Stroke, mm: 400

Series: Guide, Clean Series, Size: 40, Mounting Pitch: S, Stroke, mm: 200

Ionizer Gun

600 750 900 1050 1200 1350 1500 Distance [mm] Distance [mm] 5) 6) Supply pressure 0.4 MPa Consumed flow rate 316 L/min (ANR) Supply pressure 0.5 MPa Consumed flow rate 390 L/min (ANR) 200 200 150 150 2s 1.5s 100 100 50 50 1.5s 1s 0.5s 1s 0.5s 0 0 -50 -50 -100 -100 -150 -150 -200 -200 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 Distance [mm]

PF2x7.eng

Lead wire and connector Model Width across flats of attachment Hysteresis mode 2 Piping port (IN side) : This drawing is the model of PF2A710/750.

Membrane Air Dryer

1000 600 750 1000 Purge air flow rate L/min(ANR) 125 150 190 65 80 110 Inlet air pressure MPa Inlet air temperature oC Inlet air saturation temperature oC Ambient temperature oC *Note 1 *Note 1 -15 -20 *Note 2 Standard performance conditions *Note 3 0.7 25 25 25 Dew point indicator purge air flow rate 1L/min (ANR) {In case of inlet air pressure 0.7 MPa} 1/2 1/2 Port size 3/8 1/2 3/8 1/2

ChemicalThermo-con Series HED SEMI

Heat exchanger Radiating method W Water-cooled Temperature controller 007 B HED C 2 Cooling capacity Communication 003 005 007 A B RS-485 RS-232C 300 W 500 W 750 W Temperature controller Power supply 2 Single-phase 180 to 242 VAC 50/60 Hz 176

In-line Air Filter

Symbol Specifications X01 Different diameters (IN side < OUT side) X02 Different diameters (IN side > OUT side) X03 Blue element X04 Filtration: 10 m X05 FKM/Oil free (Seal) X06 Nylon 5 20 L/min 750 mm2 7 100 L/min 1260 mm2 Applicable tubing O.D. Metric size Symbol Applicable tubing O.D.

Air Tank Series AT 1

750 750 850 850 6 9 9 9 12 12 12 16 16 460 665 693 693 1162 1162 1162 1416 1416 19 19 19 19 19 19 19 27 27 80 M16 x l 250 M16 x l 250 M16 x l 250 M16 x l 300 M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1 2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2

Industrial Filter

(oC) 80oC (60oC for a product with pressure gauge) Number of element 4 4 Note2) or 8 4 Note2) or 12 Element size (mm) note3) 65 to 70 250 65 to 70 500 (For 8 elements: 65 to 70 250) 65 to 70 750 (For 12 elements : 65 to 70 250) Element replacement differential pressure (MPa) 0.1 Cover SUS304 Case SUS304 Material O-ring FGES: NBR FGEL: FKM Leg SS400 Mass (kg) Body only 10 13 18 Internal

In-line Air Filter

Body size Body size 20 L/min 100 L/min Symbol Filtration area 750 mm2 Specifications Different diameters (IN side < OUT side) Different diameters (IN side > OUT side) Blue element Filtration: 10 m FKM/Oil free (Seal) Nylon Symbol X01 X02 X03 X04 X05 X06 5 7 1260 mm2 Applicable tubing O.D.

In-line Air Filter ZFC Series

Symbol Specications X01 Different diameters (IN side < OUT side) X02 Different diameters (IN side > OUT side) X03 Blue element X04 Filtration: 10 m X05 FKM/Oil free (Seal) X06 Nylon 5 20 L/min 750 mm2 7 100 L/min 1260 mm2 Applicable tubing O.D. Metric size Symbol Applicable tubing O.D.

Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS

Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS

Main Body Peripheral Component: Main Body, Type: Sliders, Stroke(mm): 750, Max. Transportable Mass Range (Horizontal)(kg): 20.1 to 50.0, Max. Transportable Mass (Horizontal)(kg): 30, Max. Transportable Mass Range (Vertical)(kg): 2.1 to 5.0, Max.

Element Material: B (Bronze), Element Size: 300 (ø65 x â„“750), Nominal Filtration Accuracy: 120 μm, Element Seal Material: N (NBR)

Element Material: B (Bronze), Element Size: 300 (ø65 x â„“750), Nominal Filtration Accuracy: 100 μm, Element Seal Material: N (NBR)

Element Size: 300 (ø65 x â„“750), Nominal Filtration Accuracy: 5 μm, Element Seal Material: N (NBR)

Material: L (Body: Stainless Steel 304; Gasket/O-ring: FKM), Element Length: C [ℓ750 (ℓ250 x 3)], Port Size R: 20 (2), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 10 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Pressure Gauge: G2 [G46-10-02X3 (Stainless Steel at Wetted Parts)]