DOC1023126

PLC *3) (Provided by customer) IO cable *1) Part no.JX-CI-E--S PC *2)*3) (Provided by customer) Communication cable /USB cable *1) Part no.JX-CT-E 120.3 120.3 mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 Communication cable Power supply for controller IO cable 24VDC Power supply cable *1) Part no.JX-CD-E--S Power supply cable *1 Optional

LEF-OM007xx

6 1000 20 5 100 30 4 10 50 6 1000 5 5 100 15 4 10 30 6 1000 20 5 100 50 4 10 60 6 1000 10 5 100 40 4 10 50 6 1000 50 5 100 80 4 10 100 LEFS16 500 500 LEFS25 900 500 Please aspirate it from the port on both sides when aspirating 50 /min(ANR).

Air Slide Table Series MXQ

Contents D6 8 12 16 20 25 MXQ 6-PS MXQ 8-PS MXQ12-PS MXQ16-PS MXQ20-PS MXQ25-PS GR-S-005 (5g) GR-S-010 (10g) GR-S-020 (20g) GR-S-050 (50g) GR-L-005 (5g) GR-L-010 (10g) GR-L-020 (20g) GR-L-050 (50g) 8 12 16 20 25 6 8 12 16 20 25 MXQ 8R-PS MXQ12R-PS MXQ16R-PS MXQ20R-PS MXQ25R-PS MXQ 6P-PS MXQ 8P-PS MXQ12P-PS MXQ16P-PS MXQ20P-PS MXQ25P-PS -X Guide Individual -X Cylinder 127 Series MXQ Auto Switch

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Note 4) Interface regulator is only capable of regulating the P port pressure. 0.06 1.9 2.1 4.5 4.5 P A P B A EA B EB Effective area at supply side (mm2) (3) S at P1 = 0.7 MPa, P2 = 0.5 MPa Effective area at exhaust side (mm2) (3) S at P2 = 0.5 MPa How to Order Solenoid Assembly Non plug-in type C DXT170 5 L Flow Characteristics {1(P) 4(A)} Conditions: Inlet pressure setting 0.7 MPa

High-precision Digital Pressure Switch

increment 1027 0x0403 0 R/W dtH2 (Delay time at ON) U16 0 Y Settable values 0x0 ~ 0x1770 (0 ~ 6000) 1028 0x0404 0 R/W dtL2 (Delay time at OFF) U16 0 Y Setting of OUT2 delay time at OFF 0.01 s increment Settable values 0x0 ~ 0x0BB8 (0 ~ 3000) 1030 0x0406 0 R/W FiL (Digital filter) U16 0 Y Setting of digital filter 0.01 s increment Displayed pressure value can be adjusted within 5%R.D. 0.1%

IR1000/2000/3000

400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 1000 0 200 400 600 800 Flow rate ( /min (ANR)) Relief flow rate ( /min (ANR)) Supply pressure P1 (MPa) 14-5-11 11 Series IR1000/2000/3000 Series IR3000 Flow Characteristics Relief Characteristics Pressure Characteristics Testing methods conform to JIS B 8372.

Auto Switch Guide

Data Switch operating range (mm) Cylinder speed (mm/s) Switch detecting time DC () Blue Ex.) Cylinder speed 1000 mm/sec. Sequencer response time 0.1 sec. Detecting point dispersion Within 100 mm (= 1000 mm/sec. x 0.1 sec.) Take PLC response time into consideration when using.

HRX-OM-Y098

Configuration One thermo-chiller for one controller. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

HRX-OM-X037

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

Solid State Auto Switch

The load doesnt work. < Auto switch operating range [mm] / Actuation operating speed [mm/s] -22No.D-S-OMJ0004-G Specifications D-M9B(E)(V)/D-M9N(E)(V)/D-M9P(E)(V) PLC: Programmable Logic Controller Switch part no.

HRX-OM-W060

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRL Series 3.3 Installation 3-27 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Large Size Vacuum Module: Series ZR

AC voltage: S is not available for AC.

RSH/RS1H

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

RSH/RS1H

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

PSxx-OMV0008CN

5000 580 5200 MPa 0 2.0 -0.105 2.100 kPa 0 2000.0 -105 2100 Kgf/cm 2 0 20.394 -1.07 21.41 ISE75G bar 0 20.000 -1.05 21.00 psi 0 290.08 -15.2 304.6 (PD) 1000 5000 790 5200 MPa 0 5.0 -0.25 5.25 Kgf/cm 2 0 50.99 -2.5 53.5 bar 0 50.00 -2.5 52.5 ISE76G psi 0 725.2 -36 761 (PD) 1000 5000 800 5200 MPa 0 10.000 -0.50 10.50 Kgf/cm 2 0 101.97 -5.1 107.1 bar 0 100.00 -

25

Kinematic viscosity [m2/s] = Viscosity [Pas]/Density [kg/m3] 1 cP = 1 mPas = 10-3Pas 1 cSt = 1 mm2/s = 10-6m2/s 591 PB1313A Series Working Principle: Air Operated When air is supplied with the external 3-port solenoid valve turned ON (energized), air enters the driving chamber and the diaphragm moves to the left.

Compact Electric Actuator Series LG1

P Ground ball screw Rolled ball screw Sliding screw S N Table 1: Feed Screw and Stroke Combination Correspondence Table Stroke (mm) Model 500 600 700 800 900 1000 1200 100 200 300 400 LG1H212PAStroke Screw combination LG1H212NAStroke LG1H212PCStroke LG1H212NCStroke LG1H212SCStroke Please note that combinations other than those shown above cannot be produced.

V

P D I M E N S I O N S (N)VM1000 T O G G L E D I M E N S I O N S (N)VM1000 P U S H B U T T O N PT= Pre-travel OT= Over travel TT= Total travel S Y M B O L S (N)VM1000 T O G G L E S Y M B O L S (N)VM1000 P U S H B U T T O N S Y M B O L S (N)VM1000 O N E W AY Courtesy of Steven Engineering, Inc. !

Modular Type Filter Regulator Series AW

Refer to Features 1 for details. 57 Filter Regulator AW10 to 40 Flow Characteristics (Representative values) Condition: Inlet pressure 0.7MPa AW10 AW30 Rc 3/8 AW40-06 Rc 3/4 M5 0.6 0.6 0.6 0.5 0.5 0.5 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 150 125 100 75 50 25 0 1000 0 3000 4000 1000 2000 Flow rate L/min (ANR) 0 0 0 500

PFMB.eng

Power is supplied S S S SET (S) button Press this button to change the mode and to set a value. L Press the S button for 2 seconds or longer. DOWN () button Selects the mode and decreases the ON/OFF set value. M Setting F0 Setting F1 Setting F99 N Indicates the unit currently selected. Unit display The output will not operate for 3 seconds after supplying power.