Rotary Table/Rack & Pinion Style Series MSQ

SU) S AA YB effective depth YC YA 2 View With shock absorber MSQBR (mm) FU Size 70 100 200 55.4 55.5 79.5 (Max. approx.

58

-500 Basic weight 12.45 (kg) Additional weight 2.23 (kg/100 mm) Cylinder stroke 500 (mm) 12.45 + 2.23 x 500/100 = 23.60 (kg) 3/4 28 to 30 160 3.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Locked condition Released condition 8-21-5 5 Guide Cylinder Series MGG 20, 25, 32, 40, 50, 63, 80, 100 How to Order MGG L B 32 100 H7BW Number of auto switches Bearing type Nil S n 2 pcs. 1 pc. n pcs.

CLQ

If it is long, this may cause unlocking malfunction and reduce the lock's service life, etc. 50 50 Load weight kg Load weight kg 100 100 80 80 10 10 63 63 5 5 50 50 40 40 32 32 1 1 0.5MPa 0.4MPa 0.5MPa 0.4MPa 25 25 0.5 0.5 20 20 100 500 100 500 Maximum speed mm/s Maximum speed mm/s Extension locking, Rubber bumper Retraction locking, Rubber bumper W 200 200 100 100 B 50 A 50 A 100 100 Load

CE

SET MODE RZQ SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC Auto switch mounting orientation can be freely selected (3 mounting surfaces) MI W S Includes all functions of the CEU1.

JXCx-OMT0061CN

() 2 () * ) () 3 11.1 12 64 ()() No. 1 2 mm 2 2 mm/s mm mm/s mm/s % % mm mm mm/s % 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 47 - () TB No. No. 063 No.

energy saving effect

L Required facility water system 10 s 5 s 2 s Min. 1 s 0.5 s 0.2 s 0.1 s Model Heat radiation [kW] Facility water specifications HRSH100-Wl-l Approx. 20 Refer to "Facility water system" in the specifications on pages 167 and 169. 0.05 s HRSH150-Wl-l Approx. 27 HRSH200-Wl-l Approx. 34 HRSH250-Wl-l Approx. 40 0.02 s 0.01 s 100 135 200 300

High Power Cylinder Series RHC

Cushion adjustment (relief adjustment) labor is the same as general purpose cylinder adjustment (cushion needle adjustment). 200 150 Cushioning quality (RHCF40-500, load weight 5kg, supply pressure 0.5MPa, horizontal drive) High power cylinder 500 General purpose cylinder Cushioning capacity [J] 100 1000mm/s 3000mm/s 2000mm/s 500mm/s 400 Stroke [mm] 300 50 200 100 50mm/s 20 25 32 40 50 63

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

SU) S AA YB effective depth YC YA 2 View With shock absorber MSQBR (mm) FU Size 70 100 200 55.4 55.5 74.7 (Max. approx.

IZx-OMP0064

IZS42-1120 3 10 0.2MPa 0.1MPa 2.5 8 0.3MPa Discharge time [s] Discharge time [s] s s 2 0.4MPa 0.5MPa 6 1.5 4 1 2 0.5 0 0 0 50 100 150 200 0 500 1000 1500 2000 mm mm Installation distance [mm] Installation distance [mm] 3) With Energy saving static neutralization cartridge With air purge, For IZS42-1120J 4) With Energy saving high-efficiency cartridge With air purge, For IZS42-1120V 10 10

Short Stroke Electric Actuator Series LX

D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BC-25 LXFH5BC-50 LXFH5BC-75 LXFH5BC-100 Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 2kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 50 10 1 100 50 10 1 10 10 10.1 5.1 1.1 0.2 10.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s

CNS

500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 3000 3000 2000 2000 160 140 125 1000 1000 Load weight: m (kg) Load weight: m (kg) 700 800 900 700 800 900 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-8-7 8 Cylinder with Lock

XL

Port S (10) remains pressurized and valve S (18) remains open.

High-Precision Digital Pressure Switch

kPa 0 100 kPa 500 kPa 1 MPa 100 kPa 0 100 kPa 500 kPa 1 MPa 2 MPa 5 MPa 101 kPa 101 kPa Withstand pressure 500 kPa Withstand pressure 500 kPa 0 0 100 kPa 100 kPa 100 kPa 100 kPa Withstand pressure 500 kPa Withstand pressure 500 kPa 100 kPa 100 kPa Withstand pressure 2 MPa 1 MPa 1 MPa Withstand pressure 1.5 MPa 100 kPa Withstand pressure 4 MPa 2 MPa 2 outputs (NPN/PNP) 2 outputs (NPN/PNP)

CATALOG VC10

Body Brass Body S. S.

JXCx-OMT0062

Move mm/s mm mm/s2 mm/s2 mm/s mm mm mm 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 Caution Writing of the step data should be performed while the electric actuator is stopped 59 - Details of step data Setting name Range Description No. 0 to 63 Number of the step data.

Modular F.R.L. Units

Lock button 12 B AC10-A Series AC20-B to AC60-B Series Dimensions AC10-A S N A F M J R B C V Q2 Q1 Q1 IN OUT 2 x P1 (Port size) U P2 G Clearance for maintenance (Pressure gauge port size) Drain AC20-B S N A F M J R B C Q2 V Q1 Q1 K IN OUT 2 x P1 (Port size) U P2 G Clearance for maintenance (Pressure gauge port size) Drain AC25-B to AC60-B N A F S J M R V Q1 Q1 B C K OUT IN 2 x P1 (Port size

ITV

Output deviation factor (% F .S.) 0.6 Return 0.5 0.4 0.2 0 0 Out 0.2 0.4 0.5 0.6 0.8 1 2 3 4 1 0 25 50 75 1 5 100 Input signal (%F.S.)

High Vacuum Angle Valve, XL Series

Port S (10) remains pressurized and valve S (18) remains open.

Series AK1000

200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) 0 50 100 150 200 250 300 350 400 450 500 550 600 650 700 Flow rate (slpm, N2) AK1200HF 150 psig (1.0 MPa) 50 psig (0.34 MPa) Inlet pressure: 100 psig (0.69 MPa) AK1200FC Inlet pressure: 150 psig (1.0 MPa) 3/4 inch connections ) 100 0.69 75 0.52 0.62 90 0.55 80 60 0.41 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure