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[ Kit Requires for S kit SOO'.

CQS

Thus, it can be used in a Class 100 clean room.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 3 3 3 3 CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 Piston speed mm

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

500 300 100 50 0.5 500 300 100 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s 8-16-7 7 Series CY1F Vertical Actuation 1.

MXS

9 3.11-27 Air Slide Table (Symmetric Style) Series MXSlL How to Order MXS 12 50 F9N S L AS Air slide table Symmetric style Number of auto switches 2 1 n S n Bore size (Stroke: mm) Auto switch Without auto switch 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75

Compact manifold regulator ARM5 Series

X 5.5 L3=50+R+V L4=50+T+X 50 SMC H H L L S S O O U U C C P P K K R 8 S U 57 (at knob locked) DIN rail part no.

V

S Type 660 (100) 8 20 34 70 Flow Rate L Type 360 (400) / / / / L Type 400 (400) 10 20 34 68 Air Consumption S Type 660 (100) 10 20 34 68 L Type 360 (400) H O W T O O R D E R ZH V A C U U M E J E C T O R *Vacuum pressure is quoted as mmHg below atmospheric (Torr Absolute) 1 Torr = 0.0197PSI D ZH D I M E N S I O N S M A X I M U M S U C T I O N F L O W R AT E/ A I R C O N S U M P T I O N U

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

Thermo-chiller

Operating time 20 s 30 s Voltage 10 s 5 s Min. 2 s dV dt 1 s = Voltage increase ratio 0.5 s dV 0.2 s 0.1 s Time 0.05 s 0.02 s dt 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 1500 < For option B [With earth leakage breaker]> 3. This product is installed with a breaker with the following operating characteristics.

HRX-OM-Q026

HRX-OM-Q026-V Operation Manual Installation Operation Original Instructions Thermo Chiller HRSH Series HRSH100-A-20HRSH100-A-40HRSH100-A-20-S HRSH150-A-20HRSH150-A-40HRSH150-A-20-S HRSH200-A-20HRSH200-A-40HRSH200-A-20-S HRSH250-A-20HRSH250-A-40HRSH250-A-20-S HRSH300-A-20HRSH300-A-40HRSH100-W-20HRSH100-W-40HRSH100-W-20-S HRSH150-W-20HRSH150-W-40HRSH150-W-20-S HRSH200-W-20HRSH200-W-40HRSH200

7

CKGA80, 100/CKPA80, 100/With Magnetic Field Resistant Auto Switch (Rod Mounting Type) 1 P3DWASC CK G A 80 Y Built-in standard magnet type with magnetic field resistant auto switch 100 Built-in strong magnet type with magnetic field resistant auto switch 100 P79WSE CK P A 80 Y Built-in standard magnet Number of auto switches Nil S 2 pcs. 1 pc.

Lightweight and Compact

Item Unit Standard value Influence 10 s Corrosion Scale generation 5 s pH (at 25C) 6.0 to 8.0 v v Electric conductivity (25C) [S/cm] 100* to 300* v v Chloride ion (Cl) [mg/L] 50 or less v Sulfuric acid ion (SO42) [mg/L] 50 or less v 2 s Min. 1 s Standard item 0.5 s 0.2 s Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Cable length) EX500-AP010-S (1 m) EX500-AP050-S (5 m) EX500-AP010-A (1 m) EX500-AP050-A (5 m) @6 @7 Protocol PROFIBUS DP, DeviceNet Number of functional poles M12: 5 pins Key type A-coded Cable O.D. 6 mm Wiring Conductor nominal cross section 0.3 mm2/AWG22 Wire O.D.

Cylinder with Lock Series MNB

B2 H S + Stroke ??

IDG

50/6 3 25/3 Nil P R None (Standard) 5 With fitting for purge air discharge 10 20 30 50 60 75 100 100/11 200/22 300/35 500/60 600/65 750/80 1000/110 Flow direction (Right Left) With dew point indicator S Standard equipment Note) In the case of two or more options, indicate them alphabetically.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

For 90 rotation Single vane (S): 80 to 100 adjustable Adjustment range of adjustment bolt (A) Adjustment range of adjustment bolt (B) 180 10 10 22.5 Allowable radial load (N) Size Allowable thrust load (N) Positioning pin hole 20 1 15 40 3 30 50 7 60 Adjustment bolt (A) Adjustment bolt (B) 60 20 80 Single vane (S): 170 to 190 adjustable For 180 rotation 11-5-6 6 Series MSUA Rotary Table:

Best Pneumatics Vol. 14

Applicable model Attachment mounting position Description Symbol Nil None VY1 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve G AW + [K] + AL AC20A to 40A AF + AR + [S] + AL AC20 to 60 Port size PPA AW + [S] + AL AC20A to 40A Pressure switch Body size Port size S AF + [S] + AR AC20B to 60B Symbol 10 20 25 30 40 50 55 60 AL AF + AFM + [S] + AR AC20C to

Compact Cylinder with Lock Series CLQ

locking Double end taps 63 80 100 Features 2 Compact Cylinder with lock Double Acting: Single Rod Series CLQ 20, 25, 32, 40, 50, 63, 80, 100 How to Order B 40 30 D F CLQ Without Auto Switch A73 S B 40 30 D F CDLQ With Auto Switch Number of auto switches With auto switch (built-in magnet) Nil S n 2 pcs. 1 pc.

2/3 Port Valve

(No need to add options "S" and "L".)

JA/JAH/JB/JS

200 JAHF80-30-200 JAHF100-42-300 63 80 100 60 73.5 86 24 30 42 2 2 3 106 131 152 100 125 150 72 82 100 66 79 96 21 24 29 24 38 42 2 2.5 3 2.8 5.2 9 22000 36000 55000 18 18 22 20 22 24 41 46 55 RS H A RZQ Foot Style: JAHL MI W S JAHL40, 50 Center of sphere CEP1 CE1 CE2 ML2B R C J G5-S JAHL63 to 100 Center of sphere CV MVGQ CC RB R J (mm) Maximum operating tension and compression force (N