ITV

Output deviation factor (% F .S.) 0.6 Return 0.5 0.4 0.2 0 0 Out 0.2 0.4 0.5 0.6 0.8 1 2 3 4 1 0 25 50 75 1 5 100 Input signal (%F.S.)

High Vacuum Angle Valve, XL Series

Port S (10) remains pressurized and valve S (18) remains open.

Series AK1000

200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) 0 50 100 150 200 250 300 350 400 450 500 550 600 650 700 Flow rate (slpm, N2) AK1200HF 150 psig (1.0 MPa) 50 psig (0.34 MPa) Inlet pressure: 100 psig (0.69 MPa) AK1200FC Inlet pressure: 150 psig (1.0 MPa) 3/4 inch connections ) 100 0.69 75 0.52 0.62 90 0.55 80 60 0.41 Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure

Rotary Table/

SU) S AA YB effective depth YC YA 2 View With shock absorber MSQBR (mm) FU Size 70 100 200 55.4 55.5 74.7 (Max. approx.

Table of Contents

DIN rail for 9 stations J kit (Flat ribbon cable connector) S kit (Serial) kit F kit (D-sub connector) P kit (Flat ribbon cable connector) When changing the manifold style into a DIN rail mount Order brackets for mounting a DIN rail. (Refer to Option on page 2-4-24.) F 25P U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P J 20P U S Type No.

A_HEC-OM-K001

A l a r m S e q u e n c e Function M O D E < O f f 5.5 How to operate 5-11 A_HEC-OM-K001-1.7 Chapter 5 Operation <12> Heating power upper limit value setting: Mode indication Heating Power Upper Limit Default value: 100 % Setting range 0 to 100% Heating power upper limit value Heating Power Upper Limit indicates that it is heating power upper limit value setting mode.

air-filter-e

B S Bronze Stainless steel 316 Symbol Element size Nominal filtration accuracy (m) Symbol Nominal filtration accuracy (m) 1 A Element size 65 x L250 65 x L500 65 x L750 65 x L1000 100 200 300 400 1 2 5 10 20 40 70 100 120 001 002 005 010 020 040 070 100 120 5 B 3 A 255 Sintered Metal/Fiber Elements Specifications Material Bronze Sintered Metal Filter Elements Stainless steel 316 Operating

Air Preparation Equipment

B S Bronze Stainless steel 316 Symbol Element size Nominal filtration accuracy (m) Symbol Nominal filtration accuracy (m) 1 A Element size 65 x L250 65 x L500 65 x L750 65 x L1000 100 200 300 400 1 2 5 10 20 40 70 100 120 001 002 005 010 020 040 070 100 120 5 B 3 A 255 Sintered Metal/Fiber Elements Specifications Material Bronze Sintered Metal Filter Elements Stainless steel 316 Operating

DOC1023126

PLC *3) (Provided by customer) IO cable *1) Part no.JX-CI-E--S PC *2)*3) (Provided by customer) Communication cable /USB cable *1) Part no.JX-CT-E 120.3 120.3 mm mm 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 Communication cable Power supply for controller IO cable 24VDC Power supply cable *1) Part no.JX-CD-E--S Power supply cable *1 Optional

New

12 100 15 100 15 100 Note 1) Power consumption, Apparent power: The value at ambient temperature of 20C and when the rated voltage is applied.

Card Motor

Maximum speed (mm/s)Note 6) 100 10 100 10 100 10 400 41 to 104F (5 to 40C) (No condensation) 35 to 85 (No condensation) 6.7 (190) 2.5 (70) Operating temperature range Operating humidity range (%) Weight oz (g)Note 7) 4.6 (130) 1.8 (50) 8.8 (250) 3.2 (90) Table weight oz (g) Fig. 4 Note 1) Continuous thrust can be generated and maintained continuously.

2/3 Port Valve

1) _ S L, Z _ S L, Z T Manifold base Mark Applicable valve VX21l1-00 VVX21 VVX22 VVX23 Port size VX22l1-00 VX23l1-00 1 2 Rc(PT) Rc(PT) 1 8 1 4 AC All common ports are 3/8.

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Maximum acceleration: 2000mm/s Positioning time (sec.) Positioning distance (mm) 1000 500 100 10 1 10 100.4 50.4 10.4 1.4 0.5 100 10.4 5.4 1.4 0.5 0.4 Speed (mm/s) 150 7.1 3.8 1.1 0.5 0.4 300 3.8 2.2 0.8 0.5 0.4 Values will vary slightly depending on the operating conditions.

LG1H

Positioning distance (mm) 1000 500 100 10 1 10 100.5 50.5 10.5 1.5 0.5 100 10.5 5.5 1.5 0.6 0.5 Speed (mm/s) 500 2.7 1.7 0.9 0.6 0.5 1000 1.9 1.4 0.9 0.6 0.5 A B C D Values will vary slightly depending on the operating conditions.

mb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

70astamb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

17

0.1 0.06 1 0.1 0.02 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Technical Data Piston speed mm/s Piston speed mm/s Piston speed mm/s Piston speed mm/s 1187 Mechanically Jointed Rodless Cylinder Basic Type 25, 32, 40 MY1B Series RoHS How to Order M9BW 25 Z 300 MY1B Basic type Made to Order Refer to page 1189 for details

TABLE OF CONTENTS

Body Brass Body S. S.

5 Port Solenoid Valve

D-sub Note 1) M12 CC-Link Note 1) D-sub S kit: IP40 specification (IP67 specification for all other S kits) Note 2) For SI unit part number, refer to page 1.

New

Q VXF25B< VXF26B< VXF27B< VXF28B< 20 20 20 20 20 20 20 20 108 111 111 111 100 103 103 103 30 30 30 30 52.5 52.5 52.5 52.5 20 20 20 20 94.5 97.5 97.5 97.5 17 2 Port Solenoid Valve For Dust Collector Series VXF2 Dimensions: Flange type VXF25B<<S S E J Qp2 Tp2 R J R Q z280 24.4 I K 1/2 Exhaust port K 1/2 Exhaust port I 24.4 U (32) L