s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed
.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Non-Locking Push Type, Sensor/Switch Specifications: P3 [Pressure Sensor: -14.5 to 14.5 (-100 to 100); Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Elbow ø1/8" One-Touch Fitting, Option: -
.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Non-Locking Push Type, Sensor/Switch Specifications: P3 [Pressure Sensor: -14.5 to 14.5 (-100 to 100); Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Straight ø5/32" One-Touch Fitting, Option: Screwdriver Handling
.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Non-Locking Push Type, Sensor/Switch Specifications: P3 [Pressure Sensor: -14.5 to 14.5 (-100 to 100); Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Straight ø4mm One-Touch Fitting, Option: Bracket for Single
.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Non-Locking Push Type, Sensor/Switch Specifications: P3 [Pressure Sensor: -14.5 to 14.5 (-100 to 100); Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Elbow ø1/8" One-Touch Fitting, Option: -
.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Locking Type, Tool Required, Semi-Standard, Sensor/Switch Specifications: P3 [Pressure Sensor: -14.5 to 14.5 (-100 to 100); Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Straight ø5/32" One-Touch Fitting, Option
.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Non-Locking Push Type, Sensor/Switch Specifications: P3 [Pressure Sensor: -14.5 to 14.5 (-100 to 100); Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Straight ø4mm One-Touch Fitting, Option: B+K
.; Release Valve: N.C., Rated Voltage: 24VDC, Electrical Entry: L-Type Plug Connector w/Lead Wire, Manual Override: Non-Locking Push Type, Sensor/Switch Specifications: P3 [Pressure Sensor: -14.5 to 14.5 (-100 to 100); Output: 1 to 5V, Accuracy ±2% F.S. or Less], Pressure Switch Lead Wire: w/o Lead Wire w/Connector, Vacuum Port: Straight ø1/8" One-Touch Fitting, Option: -
Clean Air Module Without restrictor With restrictor S Digital flow switch ON/OFF valve Nil Without digital flow switch NPN open collector 1 output + Analog output (1 to 5 V) PNP open collector 1 output + Analog output (1 to 5 V) NPN open collector 2 outputs PNP open collector 2 outputs NPN open collector 1 output + Analog output (4 to 20 mA) PNP open collector 1 output + Analog output (4 to 20 mA) P1 P2 P3
Weather resistant NBR 3 2 Bracket A 1349161A 131515A Bracket Bracket 2 1 set Valve assembly Brass, HNBR 4 Bracket B 13639A 13649A 13 Hex. socket head cap screw Valve spring Stainless steel 5 136310 136410 2 KA00892 KA00904 12 Valve O-ring NBR 6 1 O-ring 11.5 x 8.5 x 1.5 14.5 x 10.5 x 2 Bracket A 2 Bracket KA00078 KA00083 2 1 set assembly Bracket B O-ring 136312 136412 NBR 7 13 JIS B 2401 P3
Flow Rate and Effective Sectional Area Note) Use caullon with soft nylon or polyurethane at maximum operating pressures. ,< , AI'Ipj;30f , Modil .A$P3;IDF " . 111iR,d30F ,. ';'A,pP4:?cF , 06, a8 010 0 10 012 rv,iIljme:tersi~e 06 08 08 01 /4" Tube out&ide . Inch' size I0 1/4" 03/8' 05/16" 05/16" diameter . . 03/S' 051160 1/2" Flbw."rate tlin\~ 330 750 350 C ,oP/rolled flow .
be rotated in 360(4 positions every 90) depending on desired stopping direction. (20 rotatable in 180, 2 positions only.) 90 Flange side Axial direction LOption POversized piston rod With cancel cap With lever detection switch With locking mechanism V m/min Bore size(mm) Rod dia(mm) 20 14 Work W Work W Work W Cancel cap ON OFF 32 20 Work W Work W 50 32 63 40 80 50 Lever detection switch P3
2 14.5 x 10.5 x 2 11.5 x 8.5 x 1.5 Valve O-ring NBR y 2 2 Bracket A Bracket B Hex. socket head cap screw Bracket assembly 1 set 2 136312 136412 JIS B 2401 P5 JIS B 2401 P3 O-ring NBR u !3 35 x 31 x 2 28 x 25 x 1.5 O-ring NBR i How to order (1) When adding n stations to ARM Regulator n pcs.
Parallel I/O Type: P (PNP), I/O Cable Length: 5 m, Option: D (DIN Rail Mounting)
Parallel I/O Type: P (PNP), I/O Cable Length: 1 m, Option: D (DIN Rail Mounting)
Parallel I/O Type: N (NPN), I/O Cable Length: 1 m
Parallel I/O Type: N (NPN), I/O Cable Length: 1 m, Option: D (DIN Rail Mounting)
Parallel I/O Type: N (NPN), I/O Cable Length: 5 m
Parallel I/O Type: N (NPN), I/O Cable Length: 5 m, Option: D (DIN Rail Mounting)