MLU

I-MU02 I-MU03 I-MU04 I-MU05 CNS E1 16 18 20 28 A1 10.5 12 14 18 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 A1 10.5 12 14 18 L1 27 31 36 46 E1 14 18 20 28 L1 27 31 36 46 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 NDH10 8 10 10 14 Size 25 32 40 50 Size 25 32 40 50 +0.058 0 +0.058 0 +0.058 0 +0.070 0 CLS CLQ Applicable pin no.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

36 41 20 74 65 90 50 20 8-8-27

DOC1001322

Piping port size Table 3.4-1 Piping port size Description Port size Recommended Recommended piping tightening torque specifications Circulating fluid outlet port Rc1 36 to 38Nm 1.0 MPa or more Circulating fluid return port Rc1 36 to 38Nm 1.0 MPa or more 1.0 MPa or more Automatic fluid fill port Rc1/2 20 to 25Nm (Automatic fluid fill pressure: 0.2 to 0.5 MPa Overflow port Rc1 36 to 38Nm ID

HRX-OM-W060

Description Port size tightening piping torque specifications Chiller side 1 union 178 to 185Nm Circulating fluid outlet port Filter side Rc1 1 36 to 38Nm 1.0MPa or more CH1 Circulating fluid return port Rc1 2 36 to 38Nm 1.0MPa or more Tank drain port Rc3/4 2 28 to 30Nm Chiller side 1/2 union 64 to 70Nm Circulating fluid outlet port Filter side Rc1/2 1 20 to 25Nm 0.8MPa or more CH2 Circulating

HRX-OM-W032

Table 3-11 Piping port size Description Port size Recommended Recommended piping tightening torque specifications Circulating fluid outlet port Rc1 36 to 38Nm 1.0 MPa or more Circulating fluid return port Rc1 36 to 38Nm 1.0 MPa or more 1.0 MPa or more (Automatic fluid fill pressure: Automatic fluid fill port Rc1/2 20 to 25Nm 0.2 to 0.5 MPa Overflow port Rc1 36 to 38Nm ID 25 mm or more Length

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Table (17) Parts where grease is to be applied Application of grease Grease 1 Body (inner sliding surface) Piston(Seal groove) 4 Slider(Sliding surface) 7 GR-S-010 9 Tube gasket Piston seal 10 Cushion sealFor with air cushion 36 O-ring 25 26 33 36 9 10 10 1 9 36 4 4 26 33 25 33 26 25 37 - 2. Mount the tube gasket 9 to the left cover 3 to mount to the body 1 .

Electric Actuator Miniature Rod Type Miniature Slide table Type

If when only the actuator is purchased separately, confirm that the combination of the controller, which you have and the actuator is compatible. / See 6.3 Caution(1) on p.36 (1) Check that actuator label for model number.

MHF2

36 36 4H9 +0.030 0 depth 3 4-M5 x 0.8 thread depth 12 Mounting thread 6 127.5 5 Finger closing port M5 x 0.8 50 142 2-M5 x 0.8 thread depth 5.5 122 26 10.6 Mounting thread E 20 20 24 33 E 0 -0.1 1.2 4-4.3 through (Mounting hole) 27 37 1.2 37 M5 x 0.8 Finger opening port 4-7.5 +0.1 0 Close: 0 E-E Open: 641 8-M4 x 0.7 thread depth 4 106 Attachment mounting thread 4-M5 x 0.8 thread depth 5.5

MHF2

36 36 4H9 +0.030 0 depth 3 4-M5 x 0.8 thread depth 12 Mounting thread 6 127.5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Finger closing port M5 x 0.8 50 142 2-M5 x 0.8 thread depth 5.5 122 26 10.6 Mounting thread E 20 20 24 33 E 0 -0.1 1.2 4-4.3 through (Mounting

AN

Model (Screw-in connection) Model Port size Effective area (mm2) Weight (g) ANA1-01 10 4 37 16 A B C Dimensions (mm) 1 8 ANA1-02 15 14 64 22 18 1 4 ANA1-03 35 3 8 22 84 25 21 36 98 30 24 110 111 46 36 180 132 50 41 544 200 74 60 612 230 74 60 873 271 86 70 ANA1-04 60 1 2 ANA1-06 90 3 4 JIS symbol ANA1-10 160 1 1 1 ANA1-12 280 1 4 ANA1-14 450 1 2 ANA1-20 610 2 Construction/Parts/Dimensions

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5

MLGP

MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking ID IE IF IG IH J K L 79.5 10 10 12 32.5 8.5 9 9 83 M5 M5 M6 26.5 36 40 49 M5 x 0.8 6.5 7 8 21.2 18 21 24 10 12 16 36 42 48 10.5 37 9.5 10 9 24 30 34 6 7.5 9 18 21 24 32 3 20 25 32 20, 30, 40, 50, 75, 100, 125 150, 175, 200, 250, 300, 350 84 36.5

3 Port Air Operated Valve Series SYJA300 1

71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26

5 Port Air Operated Valve Series SYA3000/5000/7000 1

: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2-1.8 2-M3 x 0.5 (Pilot port) A B 11 1.5 17.5 (For mounting) 2-3.2 equivalent (18.5) A B Manual override 14 36 (18.5) (21) Manual override 41.6 13.5 15 41.6 28.5 21 R2 P R1 13 R P R (11) (0.5) 10 5 5 2-1 (Bleed port) 10 10 7 7 2-1 (Bleed port) M3 x 0.5 (Piping

VFR

0 3-5-80 81 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR5000 Plug-in 2 position single/double, 3 position closed center/exhaust center/pressure center 0 1 2 position single: VFR510 -F(Z) 21 [25] 32 [39] 40 [40.5] 31 [36] 25 [24] 31 [36] 1 2 31 [41] 16 [19.5] 16 [19.5] EA P EB VK A B 32 [39] 40 [40.5] VZ 5-Rc 3/8, 1/2, 3/4 EA, EB port = Rc 1/2 in case of

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Ltd. 89 Tuas Avenue 1, Jurong Singapore 639520 TEL: 6861-0888 FAX: 6861-1889 RUSSIA SMC Pneumatik LLC. 36/40 Sredny prospect V.O. St.

Guide Cylinder/Compact Type Series MGC

) 23 (32) 24.5 (33.5) 23.5 (32.5) 17.5 (26.5) 20.5 (29.5) 22.5 (31.5) 19 (28) 40 40 34.5 35 37.5 38 35 39 36.5 35.5 29.5 32 34.5 31 32 (36) 28 (40) 29.5 (41.5) 28.5 (40.5) 22.5 (34.5) 25.5 (37.5) 27.5 (39.5) 24 (36) 50 50 40 40.5 43 43.5 42 46 43.5 42.5 36.5 39.5 41.5 38 ( ): Set values for long stroke, double rod Note) Adjust the auto switch after confirming the operating conditions in

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Steel 1300 Series VFR5000 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Plug-in: 2 Position Single/Double, 3 Position Closed Center/Exhaust Center/Pressure Center 2 position single: VFR510 -F(Z) 0 1 21 [25] 32 [39] 40 [40.5] 31 [36] 31 [36] 25 [24] 1 2 31 [41] 16 [19.5] 16 [19.5] EA P EB SJ A B 32 [39] 40 [40.5] SY 5 x 3/8, 1/2, 3/4 EA, EB port = 1/2 in case of 3/

Digital Flow Switch (Integrated display type)

Selection of display colour SoG/SoR/REd/GRN (Page 36) 5. Completed [F 1] Setting of OUT1 is completed. -31No.PF-OMM0005-N 1. Selection of output mode Press the or button in function selection mode to display [F 1] on the main screen. The sub screen displays [oUt1] and the currently set output mode alternately. Press the button.

Rotary Table/Rack & Pinion Style Series MSQ

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 101 102 100h9 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 119 120 116h9 118h9 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2