6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds VV5Q 5 1 08
-196H-V 06 to 08 AL-197H-V 10 to 12 FKM-70 or EPDM-70 AL-198H-V Phosphoric ester 16 AL-199H-V 20 to 24 AL-200H-V 28 to 32 AL-201H-V Note) The material of seals (AL-196H-V to AL-201H-V) is EPDM-70.
ZFB100, ZFB101 ZFB200, ZFB201 ZFB300, ZFB301 ZFB401 16 x 14 x L60 rZFB200-08 tZFB300-08, -10 ZFB301-11, ZFB401-13 I-34S-A 10 x 6 x L33 12 x 8 x L42 14 x 10 x L45 I-35S-A I-36S-A I-39S-A 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. 10 pcs. yZFB401-13 Note) Elements and O-rings for the cover are sold in sets of 10 pieces each. 10 pcs.
Type Type Elbow type straight type In-line type REA25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REA32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REA40 AS2201F-02-06-X214 AS2301F-02-06-X214 AS2001F-06-X214 REA50 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 REA63 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 Table.
pressure: 0.5 MPa Inlet pressure: 0.5 MPa 05, 06, 07, 08, 09, 10 07, 08, 09, 10, 11 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Effective area (mm2) 23, 01, 03, 04 05, 06 03, 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321F AS331F AS421F AS431F Inlet pressure: 0.5 MPa Inlet pressure
Type Metric sizes Inch sizes Elbow Universal 2 3 3.2 01 23 1/8 5/32 3/16 1/4 5/16 3/8 1/2 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 Control type Meter-out Meter-in 0 1 Use 1/8 tubing.
Toggle Lever/VFM350-02-08 Panel mounted hole JIS Symbol 15N F.O.F. 0.5MPa supply 40 T.T. 3.5-50 VFM300 Series VFM300 Push Button (Mushroom)/VFM350-02-30R, B, G, Y Panel mounted hole JIS Symbol 21N F.O.F. 0.5MPa supply 4.8mm P.T. 1.7mm O.T. 6.5mm T.T.
ASD Model Meter-out type Rod and applicable tubing O.D. 4 10 8 6 Meter-in type AS1000P-04-04 AS2000P-04-04 AS2000P-06-06 AS2500P-06-06 AS3000P-08-08 AS3000P-10-10 AS1010P-04-04 AS2010P-04-04 AS2010P-06-06 AS2510P-06-06 AS3010P-08-08 AS3010P-10-10 AS AS-FE KE
KA00612M Relief valve FH441 20 to 24 (P85) (P85) (G145) Element KA00713 KA00104 KA01296M FH340 03 to 04 Differential pressure indicator (P22A) (P30) (G80) Case KA00720 KA00107 KA02476 FH34 06 to 08 (P32) (P44) (G105) KA00631M KA00102 KA00104 KA01759 FH44 to 64 03 to 04 (P20) (P30) (G65) w O-ring KA00720 Phosphoric FH44 to 64 06 to 08 FKM-70 FKM-90 KA00107 KA02477 Drain plug (P32) ester KA00722
(mm) a b Note 2) Effective area (mm2) Note 1) D Weight (g) M2 M1 L Model Applicable tube a 3.2 4 6 8 10 12 4 6 8 10 12 16 KQG2H23-04 KQG2H04-06 KQG2H06-08 KQG2H08-10 KQG2H10-12 KQG2H12-16 3.4 5.6 13.1 26.1 41.5 58.3 12.6 13.6 16.1 17 18.6 20.8 6.5 11.6 16.3 26 33.3 54.7 12 12.6 13.6 16.1 17 18.6 9 12 14 17 19 24.6 25.6 27.2 30.7 34.1 36.6 40.4 D M2 M1 L Note 1) D is maximum diameter.
Series VQ4000 Base Mounted Plug-in Unit How to Order Manifold VV5Q 4 1 08 K C8 F U1 Option Series Option None Exhaust cleaner: For D side mounting Exhaust cleaner: For U side mounting Special wiring specifications (Except double wiring) Name plate (T kit only) Symbol 4 VQ4000 Nil CD CU K N SB SD SU W Kit type (2) (2) Manifold (3) Control unit 1 Plug-in unit Refer to pages 2-5-40 to 2-5-43
Modbus ASCII protocol (ASCII notation) Request data : 01 08 0 1234 B1 [CR,LF] Response data (normal response) : 01 08 0 1234 B1 [CR,LF] (ASCII hexadecimal notation) Request data 3Ah 30h 31h 30h 38h 30h 30h 30h 30h 31h 32h 33h 34h 42h 31h 0Dh 0Ah Response data (normal response) 3Ah 30h 31h 30h 38h 30h 30h 30h 30h 31h 32h 33h 34h 42h 31h 0Dh 0Ah ii.
A M Weight (g) D L Nylon Urethane 2.1 2.3 3.6 7 3 3.5 5.2 KGR04-08 KGR04-06 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 10.4 16 5.6 5.6 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 37 37 39.5 42 41 42 42 50.5 50.5 12.8 17 6 18.5 13.1 13.1 15.2 20 4.5 5.1 33 8 15.2 18.5 20 26.1 18.0 32.8 (29.5) 20 25.5 25.5 17 20.9
A M Weight (g) L D Nylon Urethane 2.1 2.3 3.6 7 3 3.5 5.2 KGR04-08 KGR04-06 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 10.4 16 5.6 5.6 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 37 37 39.5 42 41 42 42 50.5 50.5 12.8 17 6 18.5 13.1 13.1 15.2 20 4.5 5.1 33 8 15.2 18.5 20 26.1 18.0 32.8 (29.5) 20 25.5 25.5 17 20.9
How to Order AMJ Metric size Applicable tubing size Metric size (Release button: Light gray) AMV Symbol Bore size Applicable model AEP B ZFC 0 02 05 Metric size ZFC05 ZFC10 ZFC20 02 23 04 06 08 2 3.2 4 6 8 HEP Made to Order B Inch size ZFC 1 05 01 Related X17 Metal case Equipment Refer to page 1115 for details.
How to Order Single Unit Ejector System ZK2 A 12 K 5 A L A 08 L Vacuum Pump System ZK2 P 00 K 5 A L A 08 L (1) (2) (3) (4) (5) (6) (7) (8) Remains blank when no option is selected. (1) System/Body Type Symbol System Body type Exhaust type A Silencer exhaust B Port exhaust note 2) Single unit G High-noise reduction silencer exhaust Ejector system C Complex exhaust note 3) F Individual port
How to Order Single Unit Ejector System ZK2 A 12 K 5 A L 08 L Vacuum Pump System ZK2 P 00 K 5 A L 08 L (1) (2) (3) (4) (5) (6) (7) (8) Remains blank when no potion is selected. (1) System/Body Type Symbol System Body type Exhaust type A Silencer exhaust B Port exhaust note 2) Single unit G High-noise reduction silencer exhaust Ejector system C Complex exhaust note 3) F Individual port exhaust
A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12