4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

SS5YJ3-32,S32Station -M5T Stations L1 L2 SS5YJ3-32,S32Station -N3T 3 52 44 6 83.5 75.5 8 104.5 96.5 10 125.5 117.5 20 230.5 222.5 2 41.5 33.5 4 62.5 54.5 5 73 65 7 94 86 9 115 107 11 136 128 12 146.5 138.5 13 157 149 14 167.5 159.5 15 178 170 16 188.5 180.5 17 199 191 18 209.5 201.5 19 220 212 Stations L1 L2 3 53 44 6 84.5 75.5 8 105.5 96.5 10 126.5 117.5 20 231.5 222.5 2 42.5 33.5 4 63.5

SFOD-OMT0005CN

MOT (6 ) (DC24V) (+)(+)(+) (+)(-) 7 PWR (5 ) 8 9 10 MAC EtherNet/IP MAC 11 FE () -13- 3.3

MB1

13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 135 139 156 156 190 190 22 30 35 35 40 40 to 500 to 500 to 600 to 600 to 800 to 800

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

HRX-OM-M090

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-M090 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Drain pan

Environment

6 @3 @2 !0 #4#5 #6 #7 @6 #1 #3 #9 #8 When rod end male thread selected Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

NCA1

1.26 9/16 1.06 1/8 1 3/4 1 1/2 1 3/8 2.09 2.40 3 5/8 6 6 250 (2.5") 1 1 1/8 6 11/16 1 1/2 3/4-16 7/8 1 1/8 5/16-24 3.1 3 3/8 0 3 1/8 3/8 5/8 3/8 1 1.30 9/16 1.06 1/8 2 1/4 1 1/2 1 3/8 2.13 2.48 3 3/4 6 1/8 6 1/8 325 (3.25") 1 1/2 7 7/8 1 3/8 5/8 1-14 1 1/4 1 5/8 3/8-24 3.9 3 3/4 1/2 0 3 13/16 1/2 1 15/16 5/8 1 1/4 1.57 3/4 1.18 11/64 2 3/4 2 1 5/8 2.59 2.72 4 1/4 7 3/8 7 1/8 400 (4") 1 1/

NCA1

Not available with W and K option 6-15-6 6 Series NCA1 Auto Switch Specifications Applicable Auto Switch/Refer to page 6-16-1 for further information on auto switches.

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

plating 14 O-ring FKM Fluoro coating 15 O-ring FKM Fluoro coating 18 PF2M7(-L) Series Dimensions PF2M7m-C4/C6/C8/N7(-L) A 48 A 48 18 18 OUT2 OUT1 OUT2 OUT1 10.2 DC() DC(+) 1.4 10.2 DC() DC(+) 1.4 38.5 (30.9) 38.5 (30.9) 13 3 13 3 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 18 2 x 3.4 2 x One-touch fitting Applicable tubing O.D.: 4, 6, 8, 1/4" 18 2 x 3.4 28 [mm] 28 Model A

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 14 (2, 4 port) 112 93 12 Y 25 (14 port) PE port 5 3 37 25 22 14 1 25 25 9 1/8 12 port 3/8-2 port 3, 5 port 1/4, 3/8 1 port 14 port 1/8 1/4, 3/8-2 port 2, 4 port EVS7-6-FG-D-M0 EVS7-6-F G-D-M0 H J I 186 196 89 89 13 (4 port) 50 50 13 (2 port) 13 (4 port) 50 50 13

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

32 24 15 17 9 1/8 (P, R port) 42 L plug connector (L): 10-SYJ54M-L-01 M plug connector (M): 10-SYJ54M-M-01 DIN terminal (D, Y): 10-SYJ54MD Y-01 M8 connector (WO): 10-SYJ54M-WO-01 Approx. 300 (Lead wire length) 65.5 [67.7] Applicable cable O.D. 3.5 to 7 82.4 74.9 49.6 [56.6] Max. 10 63.6 34.2 M8 x 1 48.5 54.1 36.6 Approx. 300 (Lead wire length) 60.7 [67.7] Pg7 6 6 6 6 75.5 74.6 55.7 [57.9]

Plug-in Unit

A (+) () () (+) 11 11 Station 6 Station 6 SOL. B SOL. B (+) () () (+) 12 12 SOL. A SOL. A (+) () () (+) 13 13 Station 7 Station 7 SOL. B SOL. B (+) () () (+) 14 14 Connector Manufacturers Example: SOL. A SOL. A (+) () () (+) 15 15 Station 8 Station 8 SOL. B SOL. B (+) () () (+) 16 16 Hirose Electric CO., Ltd. Sumitomo/3-M Limited Fujitsu, Ltd.

VZS

Unused Lead wire assy (13 stations) U side 6 stations Pin (14 stations) (n) Confirm an insertion of the lead wire assy after the insertion of pin by light pulling of the lead wire. 4. Mount the end plate !2 and !3 and tighten the bolt !1. 7 stations (15 stations) Note 1) Be careful that the packing and the O-ring do not fall out of the groove. Note 2) The tightening torque of bolt !

High Power Cylinder Series RHC

metal Bushing 11 Relief valve assembly (rod side) 12 Relief valve assembly (head side) 13 Aluminum alloy Clear anodized Relief valve body retainer 14 20: M5 x 0.8 x 6 25, 32: M6 x 1 x 6 40: M8 x 1.25 x 8 Nickel plated Chromium molybdenum steel Hexagon socket head cap screw 15 Nickel plated 20, 25: M5 x 0.8 x 6 32, 40: M6 x 1 x 8 Chromium molybdenum steel Hexagon socket head set screw 16

IDX-OM-W011

4 6-5 . 6-7 7 A 7-1 . 7-1 7-2 . 7-1 7-3 . 7-1 7-4 . 7-1 7-5 . 7-2 8 C 8-1 . 8-1 8-2 . 8-1 9 K 9-1 . 9-1 9-2 . 9-1 10 L 10-1 . 10-1 10-2 . 10-1 10-3 . 10-2 10-4 . 10-2 11 M 11-1 . 11-1 11-2 . 11-1 11-3 . 11-2 11-4 . 11-2 12 R 12-1 . 12-1 12-2 . 12-1 12-3 . 12-1 12-4 . 12-2 12-5 . 12-2 2 13 S 13-1 . 13-1 13-2 . 13-2 13-3 . 13-2 14 T 14-1 . 14-1 14

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A Ball bushing bearing #5 @5 #0 @6 @8 !7 !3 #8 !2 @1 !

EXxx-OMW0014CN

SI FW --1 SF/BF LED SI Web --2 SF/BF LED SI FW FW 81 No.EX-OMW0014CN-A . 13-4 US1/US2 LED No. 1 US1 LED SI US1 US1 SI US2 2 US1 LED US1 (DC19.2 V ) 3 US2 LED SI US2 US2 . 13-5 No. SI 1 SI US2 US2 . 13-6 FO LED No. 1 FO1 LED FO2 LED 1 2 02dB 2 FO1 LED FO2 LED 1 2 0dB 82 No.EX-OMW0014CN-A 13.2.

Auto Switch Guide

D-A90V OUT() Brown Contact protection box CD-P11 CD-P12 Reed switch OUT ( ) Blue (g) Weight D-A93V D-A96 D-A96V D-A90 D-A90V D-A93 D-A93V Model 8 8 Lead wire length: 0.5 m 6 6 6 6 LED Brown (Red) OUT (+) Brown Contact protection box CD-P11 CD-P12 41 41 Lead wire length: 3 m 30 30 30 30 Resistor Reed switch Zener diode Dimensions OUT () Blue D-A90, D-A93, D-A96 Blue (Black) D-A96V DC (+

HRX-OM-R028

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge temp. drop 4 High circulating fluid return temp. 5 High circulating