Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: M5 (Body Ported M5X0.8)

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: M (Common EXH), Specifications: Standard, Rated Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: M5 (Base Mounted M5X0.8)

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: M (Common EXH), Specifications: T (Power Saver), Rated Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: M5 (Base Mounted M5X0.8)

Function: 2 (Normally Open), Piping: 4 (Base Mounted), Body Option: M (Common EXH), Specifications: Standard, Rated Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: M5 (Base Mounted M5X0.8)

Function: 2 (Normally Open), Piping: 4 (Base Mounted), Body Option: R (External Pilot), Specifications: Standard, Rated Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: M5 (Base Mounted M5X0.8)

HRX-OM-S004

Power supply block ended Cable qty. x Sensitivity Rated voltage size*2 screw crimp of leak current current terminal diamet [A] [mA] er 4 cores x AWG10 3phase HRS100-A-2030 R5.5-5 (4 cores x 5.5mm2) 200VAC(50Hz) HRS100-W-20*including ground 3phase 4 cores x AWG8 HRS150-A-20200 to 230VAC HRS150-W-20R8-5 40 (4 cores x 8mm2) (60Hz) *including ground HRS100-A-40HRS100-W-403phase 380 to 415VAC 30 M5

HRX-OM-R026

Stainless (Include heat exchanger brazing), SiC, Carbon, PTFE, PP, PE, POM, FKM, EPDM, PVC (No. copper used) Circulating fluid wetted materials Servieable conductivity: 0.22S/cm or more. (Resistivity: 4.5Mcm or less.)

ZP

Series ZP3 Lateral Pad diameter 10 to 16 Dimensions/With Adapter: Vacuum Inlet Lateral Pad type Flat with groove Pad Unit ZP3-Y10UM;-B5-B5 [Weight: 7.7 g] ZP3-Y13UM;-B5-B5 [Weight: 7.8 g] ZP3-Y16UM;-B5-B5 [Weight: 7.9 g] Vertical 8 8 8 M5 x 0.8 M5 x 0.8 M5 x 0.8 With Adapter: Vacuum Inlet M5 x 0.8 M5 x 0.8 M5 x 0.8 5 5 5 Square 8 Square 8 Square 8 Vertical 23 23 23 4 4 4 With Buffer: Vacuum

ZP

(mm) Vacuum entry (One-touch fitting) Lateral Vacuum entry direction Mounting female thread 6 tube 4 tube 8 tube Mounting Vacuum entry port Connection M5 x 0.8 19 18 Female thread One-touch fitting 10 to 16 M5 x 0.8 22 23 4 tube 10 to 16 20 to 32 M5 x 0.8 M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 6 tube 40, 50 M5 x 0.8 Pad dia.

ZP

(mm) Vacuum entry (One-touch fitting) Lateral Vacuum entry direction Mounting female thread 6 tube 4 tube 8 tube Mounting Vacuum entry port Connection M5 x 0.8 19 18 Female thread One-touch fitting 10 to 16 M5 x 0.8 22 23 4 tube 10 to 16 20 to 32 M5 x 0.8 M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 6 tube 40, 50 M5 x 0.8 Pad dia.

3 Port Air Operated Valve Series SYJA300 1

M5 x 0.8 Body side VZA222-P-M5 M5 x 0.8 0.13 0.35 0.52 0.15 0.43 0.60 N.O. M5 x 0.8 Body side VZA214-1P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Sub-plate side VZA214-2P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Body side VZA224-1P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O. Rc 1/8 Sub-plate side VZA224-2P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O.

Solenoid Valve

Otherwise, air leakage may result. 2) After screwing in the fittings, mount the M5 fitting assembly on the manifold base.

HEC-OM-U015

E PE Item Spec. 500 500 Facility water temp. 35deg.C RS-232C RS-485 Model No.

HEC-OM-R008

Use N NPT 5 AC100-240V M5,M6 screws (bolts) or equivalent to the fix the product. Note) Only HECR010 with AC200-240V Be sure to correctly tighten all screws to the required torque.

VZS

Single 88.5 3 position: 157.5 Double: 147.5 Single 104 300 (Lead wire length) 300 (Lead wire length) With light/surge voltage suppressor: Type LZ DIN terminal (D) Plug connector (M) 3 position: 161 Double 151 Single 98 300 (Lead wire length) MAX.10 3 position 156.5 Double 146.5 Single 95.5 73 With light/surge voltage suppressor: Type MZ With light/surge voltage suppressor Pg7 94 86.5 P PE

JSY1000/3000/5000 Series (Non Plug-in)

For the pilot EXH (PE) port When screwing piping or fittings into the valve, tighten them as follows. If the solenoid valve and the manifolds pilot EXH (PE) port is restricted extremely or blocked, abnormal operation of the solenoid valve may occur. 1) When using SMCs M3 or M5 fittings, follow the procedures below to tighten them.

VZM400

0 PE PE e !5 w !3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) Vacuum entry (One-touch fitting) Lateral Vacuum entry direction Mounting female thread 6 tube 4 tube 8 tube Mounting Vacuum entry port Connection M5 x 0.8 19 18 Female thread One-touch fitting 10 to 16 M5 x 0.8 22 23 4 tube 10 to 16 20 to 32 M5 x 0.8 M8 x 1.25 21 22 6 tube M5 x 0.8 58 60 6 tube 40, 50 M5 x 0.8 Pad dia.

5 Port Solenoid Valve SY Series

M5 port block assembly Pilot valve assembly A Bracket Assembly No. B Description No. Caution 3 5 7 SX 000-16-1A (with mounting screw) 3 5 7 SY9000 has no bracket.

VS 8-2/VS 8-4

VV801 M5 Tightening torque 2.3 to 3.7 Nm VV802 M4 Tightening torque 1 to 1.4 Nm Mounting screw Silencer cover External pilot Internal pilot D-side end plate Rivet Port plug Thread size, type Part no.