Rotary Actuator

Grommet (G), (H) DIN terminal (D) L plug connector (L) DIN (EN175301-803) terminal (Y) M plug connector (M) Conduit terminal (T) Electrical entry Symbol Specifications/Description Applicable shaft type Coil rated voltage V AC (50/60 Hz) 24, 100, 110, 200, 220, 240 DC 12, 24 Allowable voltage change 10 to +10% of the rated voltage Shaft type variations S, X, Y, Z, T, J, K XA1 to XA24 Shaft

VQ7-6/7-8

A R side L side (2n-Rc1/8) D side D side 68.5 120.5 (single) 68.5 16 3 120.5 (single) 145 (double) 155 (3 position) 44 145 (double) 55 155 (3 position) 77.5 Bottom port drawing 153.5 165.5 121 12 14 PB PA 5 3 R 21 39 54 65 4-Rc1/8 (pilot pressure exhaust port) P SMC R1 R2 17 17 6-Rc3/8 (ports P, R) 26.5 26.5 L: Dimensions n: Stations Formula 10 9 8 7 6 5 4 3 2 1 L1 L1 = 43n + 64 494 451

Flow Control Equipment

(l/min (ANR)) Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Needle rotation (Turns) Needle rotation (Turns) Needle rotation (Turns) ASD530F ASD630F 1000 1500 14 20 10, 11 12 Flow (l/min (ANR)) Effective area (mm2) Effective area (mm2) Flow (l/min (ANR)) 12 1000 10 8 10, 11, 12 08, 09 15 500

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Standard piping type Centralized piping type Operating direction Operating direction Side Front Side Front L R L R L L L R L R R R R R R R L L L L L R L L L Back New Back R R R Bottom Bottom Port variation Port variation R and L can be mounted in any desired position.

Cylinder

L L 1===:: . e ~l Nut ftO'a E . d Nilt ;1 ' , 0 , d d u {} B I I H B ILH ~ I Model j Bore,size(rnm} . d , I .Ji'.. ..I ~. e ~:C _ ~1IlIO10 10' . M4 X0;7 2.4 , "la.tV NTP.()15 15 M5XO.a I 3,2 I 8 9.2 L.

C95Series

I~ _OJ ~I~) -25 60 70 65 11 0 115 120 OF5J5 1 pC. 10 :!l. 2 pes , ~~~ 10 0 DF!

MIW/MIS

Therefore select MIW (MIS) 20. 3 Escapements Series MIW/MIS Operating range MIW12 MIS12 MIW20 MIS20 The graph at right shows conditions of the work piece to be stopped; that is, the weight, transfer speed and the operating range of the point of application L. 30 20 10 L=120mm L=100mm L=80mm L=60mm L=40mm 20 L=90mm L=70mm L=50mm L=30mm 10 Work piece weight kg Work piece weight kg 5 5 1 1 Point

Rubber seal 5 Port Solenoid Valve Series SYJ5000

O.D.: 4, 5/32" : 6, 1/4" (2.3) L plug connector (L): SYJ5120-L-M5(-F) M plug connector (M): SYJ5120-M-M5(-F) DIN terminal (D): SYJ5120-D-M5(-F) M8 connector (W0): SYJ5120-W0-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.1 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 32.6 M8 x 1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] (2.3) 63.2 [65.4] 83 72.1 3

3 Port Solenoid Valve Metal Seal Series VZ200 1

plug connector: VZ4 5-L(Z)01 02 1 2 01 02 1 2 (Lead wire length) 300 With light/surge voltage suppressor Applicable code O.D. 3.5 to 7 Pg7 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) 83 75.8 53.5 01 02 1 2 M plug connector: VZ4 5-M(Z)23 300 15 10 10 With light/surge voltage suppressor (Lead wire length) 3-Rc1/8, 1/4 M5 x 0.8 Max.10 98 (Pilot EXH) M5 x 0.8 (Pilot EXH) 4-15-14

Escapements Series MIW/MIS

Therefore select MIW (MIS) 20. 3 Escapements Series MIW/MIS Operating range MIW12 MIS12 MIW20 MIS20 The graph at right shows conditions of the work piece to be stopped; that is, the weight, transfer speed and the operating range of the point of application L. 30 20 10 L=120mm L=100mm L=80mm L=60mm L=40mm 20 L=90mm L=70mm L=50mm L=30mm 10 Work piece weight kg Work piece weight kg 5 5 1 1

Large Bore Compact Cylinder Series CQ2

L Y69BL 5m .

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 35 190 190 190 190 190 190 190 10 10 10 10 10 10 10 10 10 10 10 10 10 10 90 80 65 50 45 40 35 60 50 50 40 40 30 20 17 23 27 33 37 44 57 36 50 66 68 78 91 115 40 54 60 72 82 95 19 40 54 60 72 82 95 19 21 27 31 37 41 48 61 21 27 31 37 41 48 61 10 20 30 50 70 100 200 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotation angle.

ITV

Count Pressure Characteristics Flow Characteristics Set pressure: 20 kPa Supply pressure: 100 kPa Flow characteristics measurement conditions 0 1.0 Exhaust flow rate of the vacuum pump used for measurement: 500 l/min (ANR) Inlet vacuum pressure: 100 kPa (When outlet flow rate is 0 l/min (ANR)) Maximum flow rate: 132 l/min (ANR) (With inlet vacuum pressure at 39 kPa) 10 Set point Set point

MNB

45 86 30 111 12.5 22 10 65 359 14 22 80, 100 MB-B08 175 30 55 11 116 73 64 45 86 30 111 12.5 22 10 65 379 +0.084 0 14 22 9-6-18 19 Series MNB Accessory Bracket Dimensions Rod End Nut (Standard equipment) Knuckle Joint Pin, Clevis Pin 30 d Dd9 2-d CL D C L l m CL1 H B MLGC Bore size (mm) Clevis Knuckle Part no.

MNB

45 86 30 111 12.5 22 10 65 359 14 22 80, 100 MB-B08 30 55 175 11 116 73 64 45 86 30 111 12.5 22 10 65 379 +0.084 0 14 22 9-6-18 19 Series MNB Accessory Bracket Dimensions Rod End Nut (Standard equipment) Knuckle Joint Pin, Clevis Pin 30 d Dd9 2-d CL D C L l m CL1 H B MLGC Bore size (mm) Clevis Knuckle Part no.

MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Refer to page 829-10 8-29-23 24 Dual Rod Cylinder: Double Rod Type Series CXSW 6, 10, 15, 20, 25, 32 How to Order Y7BW CXS W L 100 S 20 Nimber of auto switches Double rod type Nil S n 2 pcs. 1 pc. n pcs.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

22 3.2 6 8 10 12 3.2 4 6 8 10 31.5 32 35 39 43 D VT Color: White VP VG L DIN rail VP 12.5 (Pitch) 5.25 7.5 AXT100-DRS070 As for , enter the number from the DIN rail dimensions table. 25 35 5.5 VQ 12.5 L Dimension L = 12.5n + 10.5 VKF Each manifold can be mounted on a DIN rail.

25

With air purge Supply pressure: 0.1 MPa (8.6 L/min [ANR] per cartridge) Supply pressure: 0.1 MPa (4.3 L/min [ANR] per cartridge) 12 12 10 10 Discharge time (s) Discharge time (s) 30 Hz 30 Hz 8 8 1 Hz 1 Hz 6 6 4 4 2 2 Sensing AC Sensing AC 0 0 0 500 1,000 1,500 2,000 0 500 1,000 1,500 2,000 Installation distance (mm) Installation distance (mm) Supply pressure: 0.3 MPa (17.6 L/min [ANR] per

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

L RUN SERIAL UNIT L ERR.