4-channel Flow Monitor (Remote type monitor unit) 5 to 50 10 to 100 20 to 200 50 to 500 L/min L/min L/min L/min L/min Instantaneous Setting/display flow range 1 2 0.5 to 10.5 2.5 to 52.5 5 to 105 10 to 210 25 to 255 L/min L/min L/min L/min L/min flow Min. setting/display unit 0.1 0.5 1 2 5 Flow L/min L/min L/min L/min L/min Accumulated Setting/display flow range 0 to 9 L Flow Min. setting/display unit 1 L Reference condition 3 Standard
i m i n a r y A l a r m D i s p l a y g i v e s w a r n i n g t h a t pressure is within 10% of set point T E C H N I C A L SPECIFICATIONS Fluid Air and Insert Gas Differential 3% F.S (Full Span) or less Accuracy 3% F.S (5~40C) 5% F.S (0~60C) Operating Voltage 12 to 24 VDC (Ripple: +10% or less) D I M E N S I O N S P R E S S U R E S W I T C H GS40 Output Open collector (NPN) 30V 80mA Action
L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32
Example) R When turn on the RWw0,bit6:Position, instruct 655.37 [mm] (65537d=10001h) 1 to Max ACC / DEC of the basic parameter *3) 1mm/s2 (1%) F to 8 H Deceleration 6 (Trigger LV) Deceleration 7 to 0 L Pushing Pushing *3) 1mm/s 1% F to 8 H 7 speed force 7 to 0 L 8 Trigger LV *3) 1% F to 8 H 9 7 to 0 L Pushing *3) 1mm/s speed F to 8 H RWw30001h RWw40001h 7 to 0 L 10 Moving force *3) 1% F to
L unit Air cushion 200 200 100 1 2 3 4 5 10 20 30 1002 3 4 5 10 20 50 Caution 40 50 Load mass (kg) Load mass (kg) 1.
10 16 10 to 60 97 10 20 10 to 60 FV FV M 104.5 12 25 10 to 50, 75, 100 124 12 28 10 to 50, 75, 100 B + Stroke L FT FX FZ FX (Dimensions other than A and L are the same as the front flange type.)
1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?
method setting unit 1 2 0.2 0.5 5 10 20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 0.2 PFM 0.01 L/min 10 0.5 25 Air N2 Thermal type Argon (MEMS) CO2 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal New New type Air N2 (MEMS) 1 L/min 5 500 Bypass flow type 10 1000 PF2A 0.1 L/min 1 10 0.5 L/min 5 50 1 L/min 10 100 2 L/min 20 200 Thermal Air N2 type (Thermistor) 5 L/min 50 500 5 L/min 150
Applicable cylinder Port variation MY2C16/25/40 MY2H16/25/40 MY2HT16/25/40 R R L L L L L L L L R R R R R R L R Slide table operating direction 1118
-6 Operating pressure Pa Conductance l/s Note 1) 14 45 80 160 200 5 1.3 x 10-10{1 x 10-10} at ambient temperature, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperature, excluding gas permeation External Operating time s 0.05 0.1 0.21 0.24 0.26 0.28 KF (NW), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Principle materials
A RR1 A1 L1 MM RR1 U1 NZ L L1 E1 10 12 16 20 +0.048 0 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 +0.048 0 5 6.5 8 10 0.4 0.2 0.2 0 0.4 0.2 0.4 0.2 10 12 16 20 12 16 20 25 12 16 20 25 5 6.4 8 10 21.5 32 34 41 6 8 8.5 10.5 16 25 25 30 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.25 6.3 8.1 10.3 12.8 7 14 11.5 14 21.5 6 11 8.5 16 21 25 30 M5 x 0.8 6.3 8.1 7 10 10 14.6 I-G012 I-Z015A I-G02 I-G03 Y-G012
Vacuum switch unit Filter unit Manual operation Vacuum switch Electrical entry Ejector exhaust Electrical entry PV/V port size Pilot valve Components Voltage Vacuum switch unit 10 ZX1 1 5 L Z E C K1 Ejector unit Valve unit N.C. type Vacuum switch unit 5 L Z E C K3 1 10 ZX1 Ejector unit Valve unit N.O. type Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370
Supply 24 VDC +10/-5% for output power source. Check the following and restart. (1)Check if the power is supplied to the EtherNet/IP device one level above. (When L/A IN LED is OFF.) (2)Check that the connectors of L/A IN and L/A OUT L/A IN and L/A OUT LEDs are OFF.
L 16 44 8 L (7.5) 8 2514 131 (35) (25) 5.5 47.04 SMC 55 10 Multi-core vinyl cable 0.3 mm2 x 25C 2-M2.6 x 0.45 Socket side Terminal no.
54 62 A + Stroke 2-FD MI W S Bore size (mm) FZ L M 25, 28 CEP1 10 55 18 16 60 20 FV CE1 20 64 20 25 65 22 34 CE2 28 72 22 40 FT FX L B + Stroke FZ ML2B A + Stroke 4-FD C J G5-S Rear flange style: MQQLG 10, 16, 20 25, 28 Bore size (mm) Stroke range (mm) A L 2-FD 4-FD CV 10 10 to 40 75 8 16 10 to 60 88.5 10 MVGQ 20 10 to 60 97 10 FV FV M 25 10 to 50, 75, 100 104.5 12 CC 28 10 to 50, 75,
22 34 CE2 28 72 22 40 FT FX L B + Stroke FZ ML2B A + Stroke 4-FD C J G5-S Rear flange style: MQQLG 10, 16, 20 25, 28 Bore size (mm) Stroke range (mm) A L 2-FD 4-FD CV 10 10 to 40 75 8 16 10 to 60 88.5 10 MVGQ 20 10 to 60 97 10 FV FV M 25 10 to 50, 75, 100 104.5 12 CC 28 10 to 50, 75, 100 124 12 L FT FX B + Stroke FZ FX (Dimensions except A and L are same as rod side flange style.)
min 7 / 7 For option T ,-MT : 10/14 For option T ,-MT : 7/10 For option-T1 : 10 /10 Flowdisplay range L/min 2 to 16 Circulating fluid system Electric conductivity display range S/cm 0.1 to 48(For option -DM) Electric conductivity setting range S/cm 0.5 to 45(For option -DM)21 Particle filter nominal filtration rating m 5 Bypass valve Installed Tank capacity L Approx. 4 Fluid outlet,fluid
L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations L1 L2 L3 L4 L1 L2 L3 L4 98 87.5 70 14 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12 148 137.5 122.5 13 160.5 150 133 14 173 162.5 143.5 15 185.5 175 154 16 110.5 100 80.5 15 123 112.5 91 16 135.5 125 101.5 17 135.5 125 112 12
22 24.6 28.8 D M L A D Q N O M M L L Note 1) D is maximum diameter.