Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

L M L CXTM L Series Action Double acting/Single rod Double acting CY1B: 6 10, 15, 20 25, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25

Series VCS

2 Port for Steam Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Digital Flow Switches

Sensor 1 l/min 5 l/min 10 l/min 20 l/min 50 l/min 100 l/min 200 l/min 500 l/min Flow rate range 1 l/min 10 l/min PF2A510 0.5 l/min 10.5 l/min 5 l/min 50 l/min PF2A550 52.5 l/min 2.5 l/min 10 l/min 100 l/min PF2A511 105 l/min 5 l/min 20 l/min 200 l/min 210 l/min 10 l/min PF2A521 50 l/min 500 l/min 525 l/min 25 l/min PF2A551 Sensor Flow rate range 0.5 l/min 2

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

L G ZA F H K J ZX I B C E D A ZR ZM 2 x M3 countersunk head screw mounting hole ZMA ZQ ZH ZU ZFC10, 20 ZL Applicable tubing O.D.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

2 Port for Steam Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

3 Way,3 Port Solenoid Valve NVZ Series

/NVr'i|Zt-01-(OM) crommevNw4zl -20-(OG) NW$21-20-(OH) L type plug connec-tor M typ plug connector /NW4Z1-20-(OL) /NW4Z1-20-(OM) 11.91(3m) f]: with indicator light ancj surge voltage suppressor Symbol (intmal pilot tpe) N.C.

Fieldbus system EtherNet/IP compatible SI Unit

(When L/A port1 LED is OFF.) L/A port1 or L/A port2 LEDs are OFF.

Modular Type Air Filters Series AF

D U With Auto Drain S F W M 4 T BRACKET MOUNTING THREAD R C G J Q P K N 2 A H L E IN OUT Bracket (Optional) D NPT 1/4 5 Series AW20~40 Filter Regulator How To Order AW 30 N 03 D 8 Z X48 Filter Regulator With External Epoxy Coating, Stainless Fasteners Name Plate, Caution Plate On Bowl in psi, F Body Size Symbol 20 30 40 Size 1/8 3/8 1/2 Bowl Symbol 2 8 Applicable Body Size 20 30, 40 Description

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

B D Dimensions (mm) Dimensions (mm) A B C D E F G H Y A B C D E F G H Y Model Model ZPT40HBJ25-01-A18 ZPT63HBJ25-01-A18 72 127.5 83 138.5 50-01-A18 50-01-A18 107 162.5 118 173.5 40 41 28 43 20.5 32 13 63 65 46 68 31.5 43 21.5 75-01-A18 75-01-A18 143 198.5 154 209.5 ZPT50HBJ25-01-A18 ZPT80HBJ25-01-A18 75.5 131 88.5 144 50-01-A18 50-01-A18 110.5 166 123.5 179 50 52 36 54 24 35.5 16.5 80 83

Manifold Specifications

VFN DIN Rail Manifold Common SUP/Common EXH How to Order Type 45 (Non plug-in type) Applicable solenoid valve C D 45 05 C6 VV5Z3 G L M D G L M D VZ34Stations 4(A), 2(B) port size VZ3502 2 stations Applicable blanking plate assembly VZ3000-69-2A 20 One-touch fitting for 4 One-touch fitting for 6 20 stations C4 SUP/EXH block mounting position C6 DIN rail length specified B D U Both sides:

Plug-in Unit

For EX126 SI unit mounting F kit, 25 pins P kit, 26 pins P kit, 20 pins T kit L kit with 0.6 m lead wire L kit with 1.5 m lead wire L kit with 3.0 m lead wire M kit 26 pins Double wiring of 1st to 8th stations Double wiring of 9th to 12th stations EX250-SPR1 EX250-SAS EX250-SMJ EX250-SDN1 EX250-SCA1 EX250-IE1 EX250-IE2 EX250-IE3 EX250-EA1 EX250-EA2 EX500-Q001 EX500-Q001-X1 EX500-Q101 EX500

ML1

CE2 ML2B ML1C Mounting Position (Stroke End)/Reed Switch Mounting Position (Stroke End)/Solid State Switch D-E73A (L), D-E76A (L), D-E80A (L) D-M5B (L), D-M5N (L), D-M5P (L) D-M5BW (L), D-M5NW (L), D-M5PW (L) D-M5NTL, D-M5PTL REA REC RHC MTS CC Lead wire clamp/Lead wire cap (option) Series Lead wire clamp Lead wire cap ML1C LC-01 LP-01 Unit: mm Lead wire clamp/Lead wire cap (option) 25 32

AR20-B to AR60-B

Model Option AR20(K)-B AR25(K)-B AR30(K)-B AR40(K)-B AR40(K)-06-B AR50(K)-B AR60(K)-B Bracket assembly Note 1) AR23P-270AS AR28P-270AS AR33P-270AS AR43P-270AS AR52P-270AS Set nut AR23P-260S AR28P-260S AR33P-260S AR43P-260S Note 2) Round type Note 3) Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 (with color zone) Standard G36-10-01-L G46-10-01-L Pressure Round type

Micro-Mist Separator with Prefilter Series AMH

Bracket (Option) Optional Specifications J: With drain guide u I T: With element service indicator T Maintenance , Drain space Dimensions with mounting bracket E~ment service indicator B E F G H I J Model Port size A C D K L M N 0 P Q R S T U 5 9 5.5 35 54 70 26 4.5 1.6 24 37 AMH150 1/8, 1/4, 3/8 159 20 63 20 76 20 76 20 90 20 90 20 106 20 106 20 122 20 160 10 166 56 15 10 187 66 20 10 187

Style: Pressure Switch w/ T-Spacer, Body Size: 30 (AC30), Thread Type: Rc, Port Size: 01 (1/8), Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: L (3m), Pressure Unit of the Scale Plate: MPa

Style: Pressure Switch w/ T-Spacer, Body Size: AC30, Thread Type: Rc, Port Size: 1/8, Set Pressure Range: 0.1 to 0.4 MPa, Lead Wire Length: 3m, Pressure Unit of the Scale Plate: MPa

One-touch Fittings

Q D M L 1: D is maximum diameter.

Table of Contents

D-sub Connector. Series SV D-sub Connector. How to Order . Manifold Electrical Wiring. Dimensions . Series SV1000 for D-sub Connector. Series SV2000 for D-sub Connector. Series SV1000 for D-sub Connector. Series SV2000 for D-sub Connector. Series SV3000 for D-sub Connector. Series SV4000 for D-sub Connector. Flat Ribbon Cable Connector . Series SV Flat Ribbon Cable Connector.

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

IFW5 10 03 N 1 1 PSE Z I SE3 Diaphragm style flow switch PS Light 0 None Z I SE1 2 1 With neon light (110 VAC, Red) 2 With neon light (110 VAC, Green) Flow range ZSP 3 With neon light (220 VAC, Red) Low flow setting possible (1 l/min) 10 1 to 10 l/min 4 With neon light (220 VAC, Green) 20 10 to 20 l/min Simple flow setting Without removing the cover, you can set with a screwdriver from

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2