7

E U 300 1.2 7.5 T 5.5 5.5 A b a IN OUT B 2 x P Port size 4.5 4.5 L K D f J I F C e d Grommet (with surge voltage suppressor) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Material Brass, Stainless Steel p. 31 How to Order, Flow Rate Characteristics p. 9 JSXD50, 60 Port Size 3/4, 1 Body Material Brass, Stainless Steel p. 32 Construction, Common Specifications p. 10 JSXD70, 80, 90 Port Size 1 1/4, 1 1/2, 2 Body Material Bronze p. 33 Dimensions JSXD70, 80, 90 Applicable Flange 32A, 40A, 50A JSX10 Port Size 1/8 Body Material Stainless Steel, Brass p. 13

SQ1000/2000

Printed in Japan. 1st printing October, 2000 D-SMC.L.A. P-80 (D)

CRB2/CRBU2/CRB1

The angle is 60 when any of the following auto switches are used: D-90, D-90A, D-97, and D-93A. The angle is 69 when any of the following auto switches are used: D-S99(V), D-T99(V), and D-S9P(V) 3.

Table of Contents

90, D-90A, D-S99(V), D-T99(V), and D-S9P(V) The length is 30 when any of the following auto switches are used: D-97 and D-93A 2 The angle is 60 when any of the following auto switches are used: D-90, D-90A, D-97, and D-93A.

Aluminum High Vacuum Angle Valve

Power/Voltage At the Rated Voltage Model Starting Power (W) Current (A) Power (W) Current (A) Holding G/C/D/T, P5G 1.5 36 4.8 14.8 10 4.9 2.3 5.3 20 13.5 6.7 3.0 0.38 0.35 0.27 0.11 0.10 0.5 0.46 0.36 0.15 0.12 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.47 30.5 XLS-16P2G 0.24 30 G/C/D/T, P5G 2.0 47 50 Hz 60 Hz 50 Hz 60 Hz P1G 0.62 42 XLS-25P2G 45 0.35 XLA Construction/Operation XL XL Internal control

Vacuum Unit

, Description (Pressure Switch for Vacuum) p. 22 Pressure Switch for Vacuum with Energy Saving Function Specifications, Internal Circuit and Wiring Example p. 23 Port Layout Standard Products p. 24 Option -D p. 26 Option -L p. 29 Construction p. 31 Replacement Parts for Single Unit / How to Order p. 32 Exploded View of Manifold p. 33 Dimensions p. 35 Electrical Wiring Specifications

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

is 30 when any of the following auto switches are used: D-97 and D-93A 2 The angle is 60 when any of the following auto switches are used: D-90, D-90A, D-97, and D-93A.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

90, D-90A, D-S99(V), D-T99(V), and D-S9P(V) The length is 30 when any of the following auto switches are used: D-97 and D-93A 2 The angle is 60 when any of the following auto switches are used: D-90, D-90A, D-97, and D-93A.

AC

AWD ITV VBA VE VY G AL Model Port size B J A F G H I C D E 100 100 60 60 73 73 230 230 431(481) 437(487) 59 63 166 162 117 117 3-M5 X 0.8 X 6 3-M5 X 0.8 X 6 AL800-12 to 14-1 AL900-20-1 11/4 / 11/2 2 ( ) With float switch 1.17-10

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

1.6 x P 0.1 x Wcos + Wsin D 5.0 x P 0.1 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load weight & pressure Inclined operation (For vertical operation, refer to page 8-15-74.)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

85 90 95 120 145 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 D 35 40 45 50 55 60 40 45 50 55 60 65 40 45 50 55 60 65 70 75 80 85 40 45 50 55 60 65 70 75 80 85 50 55 60 65 70 75 80 D' 85 90 95 120 145 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 60 65 70 75 80 85 90 95 100 125 150 D' 40 45 50 55 60

CL

Minimum Stroke for Auto Switch Mounting (mm) No. of auto switches mounted 2 Different sides Auto switch model Same side n Different sides 1 Same side D-C7 D-C80 15 50 + 45 (n 2) 50 10 n 2 2 15 + 45 ( ) (n = 2, 4, 6) D-H7 D-H7W D-H7BAL D-H7NF 15 60 + 45 (n 2) 60 10 D-C73C D-C80C D-H7C n 2 2 15 + 50 ( ) (n = 2, 4, 6) 65 + 50 (n 2) 15 65 10 n 2 2 D-B5 D-B64 15 + 50 ( ) (n = 2, 4, 6) 15

Air Cylinder

50 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) MB MB1 D-H7 D-H7W D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CA2 CS1 D-H7C D-C73C D-C80C 5 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) CS2 D-G5 D-K59 D-B5 D-B64 5 15 75 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 75 + 55 (n 2) (n = 2, 3, 4,

Stability of suction position,

Formula examples with beams (Reference) L a b L a b L L L/2 L/2 L/2 L/2 Load/Shape conditions P P P P A C RA RB B A C RA RB B C A E D B RA RB RC RA=Pb/L RB=Pa/L W=P Formula (Reactive force: R, Total load: W) RA=RC=5Pb/16 RB=11P/8 RA=RB=P/2 W=P Mounting Position The basic mounting method is a horizontal lift.

REA/REB

2.8 x P First tentative bore size determination 0.3 x Wcos + Wsin D 5.0 x P 0.3 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load weight & pressure (Refer to page 25 for vertical operation.)

VZ100/300/500

R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Note 2) 64 (62) (5) 65 (65) Stroke (2.2) (3) 3 1.5 Encoder Z-phase detecting position Note 3) Encoder cable (7) Motor cable (7) (188.5) 48 60 46.8 55 30 70 Belt tension adjustment bolt (M4: Width across flats 7) 5H9 (+0.030 0 ) depth 5 n x 5.5 6 60 200 D x 200 (= E) 5 15 B Motor option: With lock (1.4) 96 (2.2) (220.5) Dimensions [mm] Stroke L A B n D E 300 590 306 430 6 2 400 400 690 406

Electric Actuator with Integrated Guide

Printed in Japan. 1st printing November, 2002 D-DN P-80 (DN) This catalog is printed on recycled paper with concern for the global environment.

VZS

from D side as the 1st one.