Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(same side) 70 Bore size (mm) D-F9BAL Auto switch model 1 or 2 pcs. (different sides) 25 40 50 63 80 D-Z7/Z80 10 10 11 13 40 32 50 Bore size (mm) 63 80 Auto switch type No. of auto switches Model D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV 6 5 6 8 2 pcs. (same side) 70 60 D-Z7/Z80 Reed switch D-Y7BAL 5.5 5.5 6 7 1 or 2 pcs.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Auto Switch Weights D-F9N(V) (g) DC (+) Brown [Red] Model D-F9BV D-F9PV D-F9NV D-F9B D-F9P D-F9N 6 7 7 6 7 7 Lead wire length 0.5m Main switch circuit OUT Black [White] 31 37 37 31 37 37 Lead wire length 3m Auto Switch Dimensions DC () Blue [Black] D-F9N, D-F9P, D-F9B D-F9P(V) DC (+) Brown [Red] Main switch circuit OUT Black [White] DC () Blue [Black] D-F9B(V) D-F9NV, D-F9PV, D-F9BV OUT (

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

U side D side D D D D D D 3 2 1 Stations How to Order Solenoid Valve 10 SV 1 1 0 0 F 5 Note) Clean series Note) Available with manifold block for station additions. Refer to the WEB catalog.

XL

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

Series IDG

75 100 50/6 3 25/3 Nil P R None (standard) With fitting for purge air discharge Flow direction (rightleft) With dew point indicator 5 100/11 200/22 300/35 500/60 600/65 750/80 1000/110 10 20 30 50 60 75 100 S Standard equipment Note) In case of two or more options, indicate them in alphabetical order.

Modular Type Air Filter Series AF

to left AF30 to 60 F Note 2) R Z Note 6) AF20 to 60 Note 1) Drain guide is NPT1/4 (applicable to AC30 to 60) Note 2) Drain guide is G1/4 (applicable to AF30 to 60).

Rubber seal 5 Port Solenoid Valve Series SYJ7000

SYJ7000-22-1 SYJ7000-22-2 V111(T)No. 1 2 3 4 5 6 Aluminum die-casted 1/8 1/4 Body Piston plate End cover Piston Spool valve assembly Spool spring Sub-plate 7 8 Pilot valve How to Order Pilot Valve Assembly V111 5 G V115 5 D Rated voltage Coil specifications Light/surge voltage suppressor 5 6 1 2 24 VDC 12 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 V AC 50/60 Hz] 220 VAC

New

D-DN

Brake mechanism added

D-M9WV D-M9A D-M9AV D-B5 D-B64 D-A9 D-A9V D-F5NT D-A59W CEP1 CE1 Bore size (mm) CE2 CE2 A B A B A B A B A B A B A B A B A B 40 50 63 80 100 6 4 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 ML2B 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 6.5 4.5 8 10 17.5 16 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 7.5 8 14

%silltr

A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .

SMC Basic Pneumatics

A r-ll B T-l I t# r. r-1 zK 9K Flg. 8.25 Two cylinder cascade- P N E U M A T I C T E C H N O L O G Y APPENDIX SYMBOLS T H E S Y M B O L S F O R F L U I D P O W E R S Y S T E M S A N D C O M P O N E N T S A R E S T A N D A B D T Z E D I N I S O 1 2 1 9 . T H E S T A N D A R D C O M B T N E S H Y D R A U L I C A N D P N E U M A T I C C O M P O N E N T S .

MHF2

2.8 22 DC (+) Brown 2.6 4 Main circuit switch OUT Black Most sensitive position 6 DC () Blue D-F9V Switch mounting screw M2.5 x 4l Slotted set screw D-F9B, F9BV 4.3 Indicator light 2 OUT (+) Brown 20 2.7 2.8 4.6 3.8 3.1 OUT () Blue 6.2 4 Most sensitive position 6 27 2-Color Display Solid State Switch/Direct Mounting D-F9NW(V), D-F9PW(V), D-F9BW(V) Auto Switch Specifications Grommet D-F9W

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Table of Contents

Auto switches are shipped together but not assembled. 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Action D Double acting Port thread type Type M5 x 0.8 Rc1/8 NPT1/8 G1/8 Bore size 6, 10, 16, 20, 25 32 32 32 Symbol Standard stroke (mm) 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50, 60 5, 10, 15, 20, 25, 30, 40, 50, 60, 70, 80, 90, 100 Nil TN TF Applicable Auto Switches/Refer

Rubber seal 5 Port Solenoid Valve Series SYJ5000

It is already built-in to the rectifier circuit. 2 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 Electrical entry 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] D With connector DIN terminal DO Without connector DC specifications of type D and DO is only available with 12 and 24 VDC. Power saving circuit is not available in the case of D or DO type.

5 Port Solenoid Valve SY Series

It is already built-in to the rectifier circuit. 50 60 110 VAC Hz [115 VAC Hz] 3 50 60 50 60 50 60 4 220 VAC Hz [230 VAC Hz] Electrical entry D With connector DIN terminal DC specifications of type D and DO is only available with 12 and 24 VDC.

MY1

6 D-F9B(V) OUT(+) Brown [Red] D-F9NV, D-F9PV, D-F9BV M2.5 x 4 Slotted set screw 4.3 Main circuit of switch 2 Indicator light OUT() Blue [Black] 20 2.7 2.8 4.6 3.8 3.1 6.2 4 Most sensitive position 6 15 Solid State Switches with 2-Color Display: Direct Mounting Type D-F9NW(V), D-F9PW(V), D-F9BW(V) Specifications Grommet D-F9W, D-F9WV (with indicator light) D-F9NW D-F9NWV D-F9PW D-F9PWV D-F9BW

Short Stroke Electric Actuator Series LX

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 59 F 5H9 +0.030 0 depth 5 29.5 D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BD-25 LXFH5BD-50 LXFH5BD-75 LXFH5BD-100 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 6 Refer to page 299 for mounting. (11.5) 38 E Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg