IDU/IDF

min IDF11C is selected as the model to process an air flow larger than 1400 l/min (ANR) with a 60Hz power supply, according to data D-2.

VS 8-2/VS 8-4

VSR8-2-FDCG-D VSR8-4-FDCG-D VSR8-2-FDBG-D VSR8-4-FDBG-D VSR8-2-FDAG-D VSR8-4-FDAG-D 6 A 4 A 3 A 1 A 5 B 2 B Output COM. 1 2 3 4 5 6 7 8 9 10 IP65 enclosure compliant 4-position dual 3-port valves (Rubber seal only) kit (Terminal block box) L Model A side B side Symbol Connector wiring diagram (Mixed wiring) Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

MHL2 MHR MDHR2-20, 30 MDHR2-10, 15 MHK MHS H H MHC2 MHT2 L L MHY2 When auto switch D-F9NV, D-F9PV, D-F99BV is used. When auto switch D-F9N, D-F9P, D-F9B is used. When auto switch D-F9NV, D-F9PV, D-F9BV is used. MHW2 Max. protrusion of auto switch from edge of body: L, H Unit: mm Max.protrusion of auto switch from edge of body: H MRHQ 6.8 MDHR2-20 Auto switch model no.

Power Clamp Cylinder

A B C CKZT50-A045B 30 to 105 30 to 120 CKZ50-42 3680N-R D E F CKZT63-A045S 30 to 105 30 to 120 63 CKZT63-A045B CKZT63-A015S 30 to 90 30 to 120 CKZT80-A045S CKZT63-A015B 30 to 90 30 to 105 63 80 CKZ63-42 3680N-R A B C CKZT80-A045B 30 to 105 30 to 105 CKZ63-42 3680N-R D E F For mounting bolt, a hexagon socket head cap screw and a spring washer No. 2 are recommended. 30 to 105 CKZT80-A015S

Air Cylinder Series MB

2-d d Dd9 D C L l m H B Note 1) d (Through hole diameter) Bore size (mm) Clevis Knuckle Part No.

LEY-OM007

DC2410% LEY 16 [ _ / R / L ]A LEY 25 [ _ / R / L ]A [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 (kg) 0.58 0.62 0.73 0.87 0.98 1.09 1.20 1.14 1.21 1.38 1.64 1.82 1.99 2.17 2.34 2.52 LEY 16 D A LEY 25 D A [mm] 1) 30 50 100 150 200 250 300 30 50 100 150 200 250 300 350 400 (kg) 0.58 0.62 0.73 0.87 0.98 1.09 1.20 1.13 1.20 1.37 1.63 1.81 1.98 2.16 2.33 2.51 [kg] 0.12

39

45 60 75 90 105 120 135 None 15 30 Arm mounting position 45 Right L R Left D 60 Both sides 75 90 105 120 135 Refer to Other Clamp Cylinders on page 12 for 80.

0.4

Applicable fitting size Noise reduction (dB) Effective area (mm2) (Cv factor) Series Model A L D d D VQ2000 10 AN20-C10 36.5 57.5 30 16.5 30 Elbow fitting assembly VVQ2000-F-L(C4/C6/C8/N3/N7/N9) It is used for piping that extends upward or downward from the manifold.

CJ5-S

d Material: Stainless steel 440 (Pin) Stainless steel 304 (Snap ring) D C d Dd9 H1 B1 t m t l m L Part no.

CJ5-S

d Material: Stainless steel 440 (Pin) Stainless steel 304 (Snap ring) D C d Dd9 H1 B1 t m t l m L Part no.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-L) 50 L/min 40 30 25 20 15 10 5 00 5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

MQQ

Action D Double acting Cylinder stroke Bore size (mm) Standard stroke (mm) Mounting Bore size 10, 20, 30, 40 10 Through hole & double end tapped (standard) Foot type Front flange type Rear flange type Double clevis type B L F G D Note) 10 16 20 25 28 10mm 16mm 20mm 25mm 28mm 10, 20, 30, 40, 50, 60 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 75, 100 25 10, 20, 30, 40, 50, 75, 100 28 Note

Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

MQQ

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

MQQ

Action D Double acting Cylinder stroke (mm) Bore size (mm) Standard stroke (mm) Mounting style Bore size 10 10, 20, 30, 40 Through-hole/Both ends tapped common (Standard) Foot style Rod side flange style Head side flange style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

D DeviceNet L IO-Link For single axis Mounting 7 Screw mounting 8* DIN rail mounting * The DIN rail is not included.

MXS

70 75 80 GA 22 22 22 22 55 61 102 154 190 KA M 92 92 92 102 115 156 197 255 295 MXS25L-10 MXS25L-20 MXS25L-30 MXS25L-40 MXS25L-50 MXS25L-75 MXS25L-100 MXS25L-125 MXS25L-150 162 218 258 3.11-34 Air Slide Table Series MXS Auto Switch Mounting Position for Stroke End Detection Reed switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V Stroke B Stroke E Model Operating range A 10 20 30 40 75 100

Possible to transfer a workpiece at low-speed.

A S G D L TG effective depth TL TF effective depth TL TD TB TC (mm) D (g6) DD (h9) AU A B BA BB BC BD BE BU F H J JA JB JJ K Size Rotation angle 20 30 40 90, 180 50 25 2.5 63 (11) 14 34 14.5 30.4 10 30 M8 x 1.25 11 6.5 3 90, 180 M5 x 0.8 depth 6 68 30 3 69 (11) 14 39 16.5 49 16 34.7 12 32 M10 x 1.5 14 8.5 4 90, 180 M6 x 1 depth 7 76 32 3 78 (13) 16 47 18.5 55 16 40.4 15 36 M10 x 1.5 14

240

NS 20 20 25 25 40 40 50 70 70 LT 64 64 74 74 84 84 94 104 114 LB 20 25 30 LA 10 10 20 20 30 30 20 25 30 J 4 4 4 4 4 4 6 6 6 Stroke (mm) 5 10 15 20 25 30 40 50 60 D-X 27 MXH Series Auto Switch Mounting Minimum Stroke for Auto Switch Mounting Applicable auto switch model (mm) Number of auto switches mounted D-A9, A9V D-M9, M9V D-M9W, M9WV D-M9A, M9AV 1 pc. 2 pcs. 5 10 5 5 5 10 Auto Switch Proper