CEx-OMQ0013

YES NO NO 2 YES YES NO NO YES 10 2-2 (CEU2) (AC100V,15) (24V10,0.4A) (0.3MPa0.5MPa) 3) () (CE1-R**) (CE2**) 11 2-3 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 12 * 3. 3-1 () 40 50 63 80

Vacuum Unit Ejector / Vacuum Pump System

The purity class of compressed air quality based on ISO8573-1:2010 2 : 6 : 3 Solid particle Moisture Oil Max number of particles per m3 Oil concentration (mg/m3) 0.1 < d 0.5 0.5 < d 1.0 1.0 < d 5.0 Pressure dew point Particle size d (m) Class Class (oC) at air pressure Class of 0.7 MPa 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 Not specified 90,000 1,000

IZx-OMV0005

Note (mm) Models A 01 02 01 02 IZN10E06 3.5 IZN10E07 7 28 Doc. no.IZ-OMV0005 16 17 One-touch fitting (Elbow)IZN10E(mm) Models B C D IZN10E-16 22 16 11.5 IZN10E-17 24.5 18.5 12 Female threads for pipingIZN10E-11 Width across flats: 12 29 Doc. no.IZ-OMV0005 L-bracketIZN10-B1 (Mounting angle adjustable range) 40o 2 x Hexagon socket head cap screw M3 x 6 (Accessory) Pivot mounting Inward mounting

Compact Electric Actuator Series LG1

How to Order B LG1 02 1 Cable length 02 03 04 05 2m 3m 4m 5m Nonstandard Motor Cables Cables for connecting nonstandard motors and drivers. Cable lengths other than those shown below should be arranged by the customer.

Digital Flow Switch (Integrated display type)

Name Lead wire colour Function 1 L+ Brown 18 to 30 VDC 2 N.C.

Vacuum Unit Ejector / Vacuum Pump System

assembly ZK2-CH 2 04 -A Connector type Applicable stations 1 D-sub connector (25 pins) 02 For 2 stations manifold 2 Flat ribbon cable connector (26 pins) 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold -43No.

Compact Cylinder

32 30 D Z CQ2 B R 32 to 100 30 M9BA B CDQ2 32 Z R D With auto switch With auto switch (Built-in magnet) Number of auto switches Mounting B A L F G D Nil S n 2 pcs. 1 pc. n pcs.

NCQ2/CQ2

/A7 H/A80H D-A73C/A80C D-F7 /F7 V D-F79F/F7 W D-F7 WV/J79 D-J79W/J79C D-F7BAL D-F7BAVL A 33 33 37 D-M9 D-M9 V D-M9 W D-M9 WV D-M9 AL D-M9 AVL D-A9 D-A9 V D-A73 D-A80 D-A79W D-F7NTL A 30 30 34 40.5 43.5 B 30 30 34 40.5 43.5 A 34 34 38 44.5 47.5 B 34 34 38 44.5 47.5 A 32.5 32.5 36.5 B 32.5 32.5 36.5 B 33 33 37 A 30 30 34 B 30 30 34 A 38 38 42 B 38 38 42 Bore size 125 140 160

Electric Actuator/Slider Type

Weight [g] Auto switch model D-M9NW(V) D-M9PW(V) D-M9BW(V) Auto Switch Internal Circuit 0.5 8 8 7 D-M9NW/M9NWV 1 14 14 13 Lead wire length (m) 3 41 41 38 DC (+) Brown 5 68 68 63 Main circuit of switch OUT Black How to Order D-M9 N W V L DC () Blue Series Lead wire length D-M9PW/M9PWV Nil 0.5 m M 1 m L 3 m Z 5 m Nil In-line V Perpendicular Wiring/Output type DC (+) Brown Electrical entry N

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

The load factor for each direction can be obtained as follows. x = 0/250 = 0 y = 50/180 = 0.27 z = 200/1000 = 0.2 5. x + y + z = 0.47 1 1500 1500 1000 800 1000 1000 Lz 600 L3 [mm] L1 [mm] L2 [mm] 400 500 500 200 Ly Lx 0 10 20 30 40 50 60 0 0 10 20 30 40 50 60 0 0 10 20 30 40 50 60 0 Work load [kg] Work load [kg] Work load [kg] 670 Model Selection LEFS Series AC Servo Motor Table Accuracy

CQ2

Note Applicable switch Reed switch Solid state switch 30 d D-F7, J79 D-F7V D-J79C D-F7W, J79W D-F7WV D-F7BAL D-F7F, D-F7NTL No.

CM2

1.25 15 30 M26 x 1.5 1/8 26 0 0.033 32 45 8 13 12 30 19 30 14 22 9 10 5.5 9 19.5 17 25 6 37.5 M10 x 1.25 15 34.5 M26 x 1.5 1/8 26 0 0.039 40 50 11 16 14 38 30 39 18 24 10 15 7 11 21 22 41.2 8 46.5 M14 x 1.5 21.5 42.5 M32 x 2 1/4 32 Dimensions by Stroke Built-in One-touch Fittings 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore size (mm) Stroke Q P Symbol S ZZ Z S ZZ Z S ZZ Z Z

Electric Actuator

Size Order no. 22 16 25 32 LE-D-2-1 LE-D-2-2 LE-D-2-3 $1 Component Parts No. Description Description Note 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 No.

Rotary Actuator

Single round shaft: ClRA1BT Double shaft (round shaft, with four chamfers): ClRA1BJ Double round shaft: ClRA1BK D D D H H H H UU UU M N 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size D (g6) H Size D (g6) G H M N UU L Size D (g6) H UU 30 8 25 50 15 36 63 17 41 80 20 50 100 25 60 30 8 6 25 10 8 75 7.8 50 15 11 36 20 15 118 14 63 17 13 41 22 17 139 16 80 20 15 50 25 20 167 19 100 25 19 60 30 25 202 24

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Compact Cylinder Series CDQ2 With Auto Switch Minimum Stroke for Auto Switch Mounting (mm) D-A7H D-A80H D-F7 D-J79 D-M9 D-F9W D-A7 D-A80 D-A73C D-A80C D-A9V D-F7W D-J79W D-F7BAL D-F79F D-F9BAL No. of auto switches mounted D-F7V D-J79C D-F9V D-F7WV D-F9WV D-F7BAVL D-P5DWL D-A9 D-A79W CUJ CU 1 pc. 2 pcs. 5 5 10 15 15 20 10 30 CQS 5 10 15 15 20 20 10 30 CQM (g) Weight (g) Additional Weight CQ2

Digital Flow Switches Series PF2A

Pin description Load is an analog input equipment such as a voltmeter, ammeter. 1 DC(+) PF2A7H-(-M) 68 69 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30 V 80 mA or less OUT1 Load Black H 0 V or Blue 50 msec 50 msec PF2A7H-(-M) 28 29 A B C D E F G H I J Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc1, NPT1, G1 36 M5 x

CM2

19 30 14 30 10 30 25 13 8 45 25 26 34.5 37.5 M10 X 1.25 19.5 17 6 15 10 5.5 M26 X 1.5 9 9 22 19 30 14 30 12 25 13 8 45 32 26 21 41.2 M14 X 1.5 21.5 42.5 46.5 22 8 15 7 M32 X 2 11 10 24 30 39 18 38 14 16 11 50 40 32 Dimensions by stroke Built-in One-touch fitting (mm) Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 Bore Symbol P Q S Z ZZ S Z ZZ S Z ZZ S Z ZZ S Z ZZ Bore 87 158 167

E-P HYREG ® Series VY1 1

00 02 03 04 Symbol Mounting Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 3 E-P HYREG Series VY1 Standard Specifications

Tie-rod Type Hydraulic Cylinder

4, 6, 8 ) 80 + 30 (n 2) (n = 2, 4, 6, 8 ) 35 + 30 (n 2) (n = 2, 3, 4 ) 90 + 30 (n 2) (n = 2, 4, 6, 8 ) 100 + 100 (n 2) (n = 2, 4, 6, 8 ) D-A3 D-G39 D-K39 Different surfaces 100 + 100 (n 2) (n = 2, 3, 4 ) Same surface 1 pc. 75 80 90 10 75 75 80 80 Different surfaces 35 55 90 90 90 + 30 (n 2) (n = 2, 4, 6, 8 ) Same surface 75 + 30 (n 2) (n = 2, 4, 6, 8 ) 80 + 30 (n 2) (n = 2, 4, 6,

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Type Model Features Applicable size Electrical entry Grommet (Perpendicular) D-A80 Grommet (In-line) Without indicator light D-A80H 30 Reed switch Connector (In-line) D-A80C Grommet (In-line) Without indicator light, built-in contact protection circuit D-A64 50 to 100 Grommet (In-line) Without indicator light D-A67 30 Grommet (In-line) D-F7NTL With timer Solid state switch 50 to 100 Grommet