Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

M5 AS 1 000 Body size Lock nut option Nil J (3) 1 2 3 4 5 M3, M5 standard Hexagon lock nut Round lock nut 1 8 1 4 , standard standard standard standard 8 3 Note 3) Only for AS1000 2 1 Option H (1) 2 1 High temperature (5 to 80C) Thread type Low temperature (30 to 60C) L (2) Note 1) AS5000 is available as special. AS1000 is not applicable. Note 2) AS1000, AS2000 are not applicable.

Speed Controller: Standard Type Series AS In-line Type 1

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

Specifications Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Air 1.5 MPa 1.0 MPa 0.05 MPa 5 to 60C (No freezing) 0.16 dm3/(sbar) Sonic conductance of residual pressure release valve How to Order Symbol 01 AS 2 000 E Body size 2 3 4 Port size Port size Applicable series 1/8, 1/4 standard 3/8 standard 1/2 standard 01 02 03 04 1/8 1/4 3/8

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

Specifications Air 1.5 MPa 1.0 MPa 0.05 MPa 5 to 60C (No freezing) 8 turns 0.8 mm2 Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Number of needle rotations Effective area of residual exhaust valve How to Order JIS Symbol 01 AS 2 000 E Body size Port size 2 3 4 Port size Applicable series 01 02 03 04 1/8, 1/4 standard 3/8 standard 1/2 standard

Speed Controller: Standard Type In-line Type AS Series

M5 AS 1 000 Body size Lock nut option Nil J (3) 1 2 3 4 5 M3, M5 standard Hexagon lock nut Round lock nut 1 8 1 4 , standard standard standard standard 8 3 Note 3) Only for AS1000 2 1 Option H (1) 2 1 High temperature (5 to 80C) Thread type Low temperature (30 to 60C) L (2) Note 1) AS5000 is available as special. AS1000 is not applicable. Note 2) AS1000, AS2000 are not applicable.

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S coupler #OILTUBE + + %NERGYSAVINGEFFECTSWITH "LOWGUN6-' 1 Amount saved as a result OFENERGYSAVINGEFFECTS #OSTOFELECTRICITYCONSUMEDBYCOMPRESSOR HUNDREDOF ) 20% reduction 1 306 /year 1 600 1 450 1 300 1235 Conventional model 1 150 "LOWGUN 3COUPLER #OILTUBE 1 000 HOURS 850 4OTALWORKINGHOURSOFUSE "LOWGUN6-' %NERGYSAVINGEFFECTSWITH only Calculation conditions Amount saved as a result

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

•

x @ 0 1 N V : Capacity 2 0 : T ube I.D cm L : Tube length em V= 1000X4D2X L .Burst'prdof 0 x @ 0 Wat"'-o..wt(Wat..) 0 0 x @ 1 = 1 000 X"4 (O.6) 2X100 =O.02BR @ . llnte or no Influence o .

The MPa type displays up to 3 decimal places (.000).
For example, if the pressure is 0.120 MPa, it is displayed as “.120”. Note) Old ITV series regulators display only up to 2 decimal places (.00).

Body sizes: 16, 25, 32, 40; Stroke range: 50 to 1200mmin 50mm increments; Maximum work load: 75 kg (horizontal); 25 kg (vertical); Maximum speed: 1500 mm/s (H lead, size 25); Maximum acceleration: 10, 000 mm/s² (horizonal); 5,000mm/s² (vertical); Positioning repeatability: ±0.02mm (±0.015mm high precision type); Motor type: 24 VDC step motor with battery-less absolute encoder

Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s ²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with absolute batteryless encoder

I/O and actuator cables are also identical to the standard LEY Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s ²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with incremental A/B phase encoder

Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with incremental A/B phase encoder

Body sizes: 16, 25, 32, 40; Stroke range: 50 to 1200mmin 50mm increments; Maximum work load: 75 kg (horizontal); 25 kg (vertical); Maximum speed: 1500 mm/s (H lead, size 25); Maximum acceleration: 10, 000 mm/s² (horizonal); 5,000mm/s² (vertical); Positioning repeatability: ±0.02mm (±0.015mm high precision type); Motor type: 24 VDC step motor with battery-less absolute encoder

I/O and actuator cables are also identical to the standard LEY Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s ²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with incremental A/B phase encoder

Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s ²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with absolute batteryless encoder

Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s ²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with absolute batteryless encoder

Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with incremental A/B phase encoder

Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with incremental A/B phase encoder

Electro-Pneumatic Positioner, POSITIONER, 2.4 lb