Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

Specifications Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Air 1.5 MPa 1.0 MPa 0.05 MPa 5 to 60C (No freezing) 0.16 dm3/(sbar) Sonic conductance of residual pressure release valve How to Order Symbol 01 AS 2 000 E Body size 2 3 4 Port size Port size Applicable series 1/8, 1/4 standard 3/8 standard 1/2 standard 01 02 03 04 1/8 1/4 3/8

CLA

.:>: ~,j 61 71 327 347 65 12.5 80 336 356 I 100 1 14 40 'I, 56 .5 15 25 80 25 226 36 0 I ",', 000'" 0 64 72 356 381 65 14.0 81 365 390 Trunnion Type/CLAT Name plate to 1rl'JlCate loclO'Jng BP lock releasl rt \ P Frorll C I'I(jQr port , GA BO lock ()f!

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

Specifications Air 1.5 MPa 1.0 MPa 0.05 MPa 5 to 60C (No freezing) 8 turns 0.8 mm2 Fluid Proof pressure Max. operating pressure Min. operating pressure Ambient and fluid temperature Number of needle rotations Effective area of residual exhaust valve How to Order JIS Symbol 01 AS 2 000 E Body size Port size 2 3 4 Port size Applicable series 01 02 03 04 1/8, 1/4 standard 3/8 standard 1/2 standard

Speed Controller: Standard Type In-line Type AS Series

M5 AS 1 000 Body size Lock nut option Nil J (3) 1 2 3 4 5 M3, M5 standard Hexagon lock nut Round lock nut 1 8 1 4 , standard standard standard standard 8 3 Note 3) Only for AS1000 2 1 Option H (1) 2 1 High temperature (5 to 80C) Thread type Low temperature (30 to 60C) L (2) Note 1) AS5000 is available as special. AS1000 is not applicable. Note 2) AS1000, AS2000 are not applicable.

20

S coupler #OILTUBE + + %NERGYSAVINGEFFECTSWITH "LOWGUN6-' 1 Amount saved as a result OFENERGYSAVINGEFFECTS #OSTOFELECTRICITYCONSUMEDBYCOMPRESSOR HUNDREDOF ) 20% reduction 1 306 /year 1 600 1 450 1 300 1235 Conventional model 1 150 "LOWGUN 3COUPLER #OILTUBE 1 000 HOURS 850 4OTALWORKINGHOURSOFUSE "LOWGUN6-' %NERGYSAVINGEFFECTSWITH only Calculation conditions Amount saved as a result

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

•

x @ 0 1 N V : Capacity 2 0 : T ube I.D cm L : Tube length em V= 1000X4D2X L .Burst'prdof 0 x @ 0 Wat"'-o..wt(Wat..) 0 0 x @ 1 = 1 000 X"4 (O.6) 2X100 =O.02BR @ . llnte or no Influence o .

The MPa type displays up to 3 decimal places (.000).
For example, if the pressure is 0.120 MPa, it is displayed as “.120”. Note) Old ITV series regulators display only up to 2 decimal places (.00).

Body sizes: 16, 25, 32, 40; Stroke range: 50 to 1200mmin 50mm increments; Maximum work load: 75 kg (horizontal); 25 kg (vertical); Maximum speed: 1500 mm/s (H lead, size 25); Maximum acceleration: 10, 000 mm/s² (horizonal); 5,000mm/s² (vertical); Positioning repeatability: ±0.02mm (±0.015mm high precision type); Motor type: 24 VDC step motor with battery-less absolute encoder

Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s ²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with absolute batteryless encoder

I/O and actuator cables are also identical to the standard LEY Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s ²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with incremental A/B phase encoder

Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with incremental A/B phase encoder

Body sizes: 16, 25, 32, 40; Stroke range: 50 to 1200mmin 50mm increments; Maximum work load: 75 kg (horizontal); 25 kg (vertical); Maximum speed: 1500 mm/s (H lead, size 25); Maximum acceleration: 10, 000 mm/s² (horizonal); 5,000mm/s² (vertical); Positioning repeatability: ±0.02mm (±0.015mm high precision type); Motor type: 24 VDC step motor with battery-less absolute encoder

I/O and actuator cables are also identical to the standard LEY Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s ²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with incremental A/B phase encoder

Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s ²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with absolute batteryless encoder

Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s ²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with absolute batteryless encoder

Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with incremental A/B phase encoder

Body sizes: 16, 25, 40; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 800 mm/s (16mm lead, size 40); Maximum acceleration: 10, 000 mm/s²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with incremental A/B phase encoder

Cylinder with Lock Series CLS

across flats KA MM BZ GB EA D E V C B W FA AL T A K N N C B F M H BY S + Stroke ZZ + Stroke BW For 180, 200, 250 With rod boot BV e BZ BG BE l f h + l 4 x MA Effective thread depth MB (for holding eyebolt) ZZ1 + l + Stroke (mm) Stroke range (mm) Bore size (mm) A AL B BA BB BC BD BE BG BV BW MB BY BZ BP C D E EA F FA GA GB H K KA N M J MM MA GC 125 140 160 180 200 250 14 35 50 47 145 75 18

Rotary Table/Rack & Pinion Style Series MSQ

EE) YB effective depth YC GB GA EC ED ND 2 x J through JA counter bore depth JB 2 x K Shock absorber BD EF YA 2 WF Position of bottom positioning pin hole DD Note 1 Effective depth FB D NA 2 x JC depth JD BB 2 x P Port DE GD FA FD Effective depth FC GC 0.5 NB NC CB Q H (UU) SD SE BC DF (Through) SF A AA CA BA BA DG S Note 1) This part is not available with 180 specification.