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A 1.MGTM63-35st is made by installing a 15mm spacer inside a MGTM63-50st, however the overall length will be the same as the 50st. 7069 6283 5498 4712 3927 3142 2356 OUT 7854 1571 7854 100 30 6432 5718 5003 4288 3574 2859 2144 IN 7147 1429 7147 1N: Approx. 0.102kgf 1MPa: Approx.1.02kgf/cm2 Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Weight Table Additional Bracket Weight

(23.9) 18 30 24.5 EB P EA 2 x 2.2 die-cast hole (For manifold gasket positioning) 36 1/8 (EA, EB port) 1471 SYA3000/5000/7000 Series Dimensions/SYA7000 Series: Base Mounted 3/8, 1/4 (A, B port) 21 22.5 2 position single 11.5 13.5 SYA714002 03 57 77.5 42 10.4 61 M5 x 0.8 (Pilot port) B A PE 38 46 B A Manual override P EB EA 21 69 6.4 2 x 4.3 (For mounting) 87.5 1.8 (Ventilation hole) 26.5

/ exhaust center / pressure center SYA7 403 4 5 02 03 3/8, 1/4 (A, B port) 21 22.5 11.5 13.5 71.1 18.6 57 4 2 x M5 x 0.8 (Pilot port) 61 42 B A PE 38 46 B A Manual override P EB EA 2 x 4.3 (For mounting) 21 69 28.6 109.7 SYA SYJA VZA VFA VFRA 26.5 2 x 1.8 (Ventilation hole) VA 13.5 3/8, 1/4 (P , EA, EB port) 20.5 20.5 33 1743

The poppet valve has a pressure balancing mechanism in which port 2(A) pressure is constantly applied from the back and the center spring 4 is acting as a backup.

Series AN02 35 dB (A) 50 m Page 5-10-7 High noise reduction type A high noise reduction type silencer keeps the noise level inside a plant below 85 dB (A). Series ANA1 Page 5-10-8 40 dB (A) 30 m High noise reduction type Series ANB1 has a larger effective area with the same port size as Series ANA1.

PUSH Terminal block marking Model A COM B T TURN 0 1 0 1 VQ410 A side COM LOCK VQ420 Caution A side COM B side 3 4 5 6 0 1 VQ4 0 A side COM B side Valve Mounting After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque listed below. Note 1) Not polar, possible to use as COM.

Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com KNH-R02-100 KNH-R02-150 KNH-R02-200 1 1.5 2 R 1/4 R 1/4 R 1/4 14 14 14 52 52 52 46 46 46 T D H1 A L1 VMG Low noise nozzle with male thread: KNS (mm) Model Nozzle size D Connection thread L1 A Width across flats H1 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 R

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

U A B B A D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U SMC SMC Approx. U B A B A Approx. U D-A73C D-A80C D-J79C D-A7*C,D-A80C Approx. U Approx. U D-A7*C,D-A80C A B A B Approx.

A B 48 58 56.5 66.5 69 79 LS B LS 100.2 36 46 43.5 53.5 53 63 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 110.2 46 58 38 18 110.2 Special cap bolt LY LH 118 80 128 53.5 66.5 43 20 128 138 100 148 63 79 50 22 148 4-LD A + Stroke LS + Stroke X Y X Y LG LT LZ LX Bore size (mm) L1 LD LG LH LT LX LY LZ X Y 63 43.5 11 5 46 3.2 95 91.5 113 16.2 9 80 53.5 13 7 59 4.5 118 114 140 19.5 11

D-P5DW 40, 50, 63 B + First-stage stroke =U =U Mounted on different side in case of a full stroke of 25 mm or less B A [mm] Proper mounting position D-A7H,A80H D-A73C,A80C D-F7,J79,J79W D-F7V,J79C D-F7W,F7WV D-F7BAL,F7BAVL D-F79F D-F9 D-F9V D-F9W D-F9WV D-A79W D-F7LF D-A9 D-A9V D-F9BAL D-P5DWL D-A7,A80 Bore size (mm) A B A B A B A B A B A B A B A B 32 29 39.5 30 40.5 26 36.5 31.5 42 24.5

Note) Indicate the valve model no. as a label will be attached to the clip.

Insert a flat head screwdriver into the hook section of the clip groove. q Note) Indicate the valve model no. as a label will be attached to the clip. AZ-T-VCS Valve model no. on page 17-2-42/46 Seal part no. Valve w For VCS20 OR-1860-120P Tilt the screwdriver down in direction q so that the clip slides out in direction w.

OFF: Position data is handled as an absolute value. ON : Position data is handled as an incremental value. Reset (RES) Keeping RY(n 1)A or RY(n 3)A (RES) ON for 50ms or longer RY(n 1)A RY(n 3)A 1 allows an alarm to be deactivated. Some alarms cannot be deactivated by Reset RY(n 1)A or RY(n 3)A (RES). (Refer to section 10.4.1.)

OFF: Position data is handled as an absolute value. ON : Position data is handled as an incremental value. Reset (RES) Keeping RY(n 1)A or RY(n 3)A (RES) ON for 50ms or longer RY(n 1)A RY(n 3)A 1 allows an alarm to be deactivated. Some alarms cannot be deactivated by Reset RY(n 1)A or RY(n 3)A (RES). (Refer to section 10.4.1.)

bracket assembly with a part number shown in the table left below is included as an accessory.

Install a light shielding plate as a cover. position Modify the pulse and test the operation.

Regenerative absorption units and regenerative resistors are available as options, therefore, separately order a model compatible with the motor and driver selection from the options ordering procedures on page 100. 400 L1 (mm) a = 1000 Pitching Yawing Vertical Vertical m a a = 3000 a = 2000 200 L1 Mep 0 2 4 6 8 10 Transfer load m (kg) 600 a = 1000 L3 (mm) a = 2000 a = 3000 400 a 200 L3 Mey

Port size 01 C4 C6 Rc 1/8 4 cassette 6 cassette Solenoid on opposite A port Nil 1(P) port: Rc 1/8 3(R) port: Rc 1/8 Solenoid on same side as A port 2(A) port: Rc 1/8 S Valve stations Type S42 (Solenoid on same side as port A) 01 1 station 1(P) port: Rc 1/8 3(R) port: Rc 1/8 20 20 stations 2(A) port: Rc 1/8 4-13-7 8 Series VKF300 Dimensions: Manifold Body ported Common SUP, Common EXH/Top

This value is not measured by a flowmeter. It should be used as a reference value (rough indication).