Proposals for Energy Saving

It cannot be mounted at a later time or used as a separate unit.

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Conduit terminal U 100.5 E J D I M A C H L B F K N.C.

CV/MVGQ

Z + Stroke ZZ + Stroke RHC MK(2) Single acting, Spring extend: CVM3D T Bore size Stroke RS Q G RS H A RZQ MI W S CEP1 CE1 H + Stroke CE2 Z + 2 x Stroke ZZ + 2 x Stroke ML2B AL D CZ H1 MM NN CX H L U CD HX A B1 Eh8 F I K N NA RR Bore size (mm) 20 25 32 40 C J G5-S 8 19 10 41 30 14 9 18 13 5 9 15.5 13 5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 10 19 10

CNG

9 Cushion seal A Steel ball A Urethane Carbon steel %6 @0 Steel ball B Same as cushion seal A Carbon steel @1 Cushion seal B Urethane %7 except 20, 25 standard stroke Tooth ring Stainless steel @2 Cushion ring gasket A Bumper NBR Urethane %8 @3 C type retaining ring for taper ring Carbon steel @4 Same as cushion ring gasket A except 20, 25 standard stroke Cushion ring gasket B NBR %9 C type

CNG

25 32 40 Stroke range with rod boot Standard Long stroke Bore size (mm) A AL B1 BC BN BP BZ C D GA GB GC GK GL GR GQ H1 I J 26 18 15.5 13 38 93 1/8 50.5 14 8 85 10 (12) 18 5.5 6 4 8 5 M4 x 0.7 Up to 200 201 to 350 20 to 200 201 to 350 31 22 19.5 17 45 103 1/8 57 16.5 10 96 10 (12) 25 6.5 9 7 10 6 M5 x 0.8 Up to 300 301 to 400 20 to 300 301 to 400 38 22 19.5 17 45 104 1/8 57 20 12 97 10 (

Modular F.R.L. Unit

Spacer with Bracket (Z) G Center of F.R.L. body C BB (Y100T, Y200T only) E 1 X-X EE (Y100T, Y200T only) RELEASE X B 2 E X G Seal Y200T Y400T J F A H K Spacer width D Applicable model F 6.8 12 14 18 18 20 G 4.5 5.5 7 9 9 11 H 14 19 21 26 27 31 J 2.8 3.2 4 4 4.6 6.4 K 25 30 41 50 50 70 A 6 3 4 5 5 6 B 82 96 96 120 BB 56 67 C 24.5 29 41 48 48 60 D 40.5 53 68 81.5 86 112 E 20 24 35 40 40 50

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM NA P S TA TB ZZ 5 6 6 8 11 11 13 16 M4 x 0.7 depth 7 5 M8 x 1.25 24 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 114 119 121 139 162 162 196 196 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 77 77 79 87 102 102 122 122 26 31 38 47 58 72 89 110 11 11 11 12 13 13 12 12 12 13 14 14 20 20 11 11 11 12 13 13

MB

25 14 14 20 30 30 32 14 14 20 30 30 32 28 28 40 60 60 64 50 12.5 CS1 64 16.5 80 23.5 C76 80 23.5 119 28.5 Note) For a double clevis, a pin (cotter pin) and a flat washer are equipped as standard.

Rotary Actuator/Vane Style Series CRB1

The maximum dimension L1 is, as a rule, twice the thread size. (Example) For M3: L1 = 6 Applicable shaft types: J, K, T The maximum dimension L2 is, as a rule, twice the thread size.

Cylinder

J. IS'" IN 1 5" lOst ~ 15s1 ' A ... B C E F 15 12 ' 27 31 7 16.5 22.5 29 19 14 4.2 M5 x O.8 i M22 x 1.5 I 20 23.5 29.5 36 5 , 37.5 43.5 50 ' 6 'a~e size ' .rom) .

LVQ

(mm) LVQ0-S Dimensions (N.C. valve) A B C D E F G H J K L M N P Q R Model LVQ20-S LVQ30-S LVQ40-S LVQ50-S LVQ60-S 25.5 46 31.5 58 33.6 56.5 12 77 21.8 37 5 7 15 31.3 21 25.3 23.5 47 29.5 59 45.4 77 16.5 95 32 50 6 7 20 37.2 25 31.2 23.5 47 29.5 59 45.4 82.5 22 109 37.5 55.5 6 7 20 37.2 25 31.2 35 70 41 82 75 127 25 141 50.2 78.2 10 7 20 50.8 38.5 45 35 70 41 82 75 137 32 150 60 88 10 7 20

NCM

(F dimension=0.51") D Rod clevis C B A E J K L G F H (inch) Part no.

Lightweight and Compact

Contents Applicable model HRS-EP020 NPT thread conversion fitting set HRS090-A-20/40-J HRS-EP021 G thread conversion fitting set Part no.

Digital Pressure Switch

/A2L/B2L/-C01L: Rc1/8 -A2L: URJ1/4 -B2L: TSJ1/4 -53No.PS-OMM0003-J With bracket (Rear piping) ZS-24-A With bracket (Rear piping) ZS-24-D -54No.PS-OMM0003-J With bracket (Bottom piping) ZS-35-A -55No.PS-OMM0003-J Panel mount adapter (Rear piping) ZS-35-C Panel cut-out dimensions -56No.PS-OMM0003-J Panel mount adapter (Bottom piping) ZS-35-B Panel cut-out dimensions -57No.PS-OMM0003-J Revision

C95Series

IIIB OA DB IOL lou DC OX iDE .1 00 DS OH Z ODHIl ": ~ 46 , 31 1 21 18 5 3a , 2' 1 51 l a.5 6.6 If 7 32 1184 lO ' ;~ 52 35 ,24 I 22 15.5 41 21 i 54 16.5 6.6 11 9 ' 36 l a, J:!'

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Stroke: S MXP10-10 Width across flats 1.5 Width across flats 5 A Piping port H 13 2-M5 x 0.8 (Plug: M-5P) 7 16.7 6.5 M3 x 0.5 3.7 21 20 8.5 19 0.5 A 4-M4 x 0.7 4-M3 x 0.5 depth 4 15 20 0.05 Prepared hole dia. 3.3 W 27 0.5 0.05 Piping port D B 2-M5 x 0.8 28 10 J 6 Mounting reference planes B D 10 9.5 Section AA MXP10-20 Without magnet and switch rail 8 2-M3 x 0.5 depth 3.5 For rail mounting

Slider Type/Ball Bushing Bearing

, 25 CY1H15/20/25 L LL 4 x M thread depth MM PA 15 20 25 CY1H -B Guide central axis ZZ XA XB PB Piping port surface S + Stroke LW 2 x P EB EA HC HP H HA HB NT HG HT Square nut for body mounting J 8 PP W N A Z + Stroke Square nut insertion TW NL CY3B CY3R CY1S (mm) Model A 97 102.5 125 EB 21 22 24 H 46 54 63 HA 33.5 42.5 46 HB 33.5 41.5 46 HC 45 53 61.5 HG 17 16 25 HP 42 50 58.5 HT 19 23.5

Hygienic Design Cylinder Series HY

end. 50 mm W 856 Series HYB Hygienic Design Cylinder Round Type Dimensions HYB20 to 100 A 2 x P GA GB E2 0 -0.05 I (E1) C0.1 B0.1 D 4 x J 4 x J KA K (F1) B0.1 S + Stroke F2 H C0.1 NB ZZ + Stroke NA R 21 20, 25 (mm) GA Bore size (mm) Port: M5, Rc, NPT Port: G A B C D E1 E2 F1 F2 GB H I J 20 25 32 40 50 63 80 100 18.5 18.5 20 26 32 38 50 60 M4 x 0.7 depth 8 M5 x 0.8 depth 10 M6 x 1.0 depth

Vacuum

Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.