SYJ300/500/700

When exchanging the pilot valve assembly only, "10-V115-D" is interchangeable with "10-V115-Y". Do not replace 10-V111 (G, H, L, M, W) with 10-V115D/Y (DIN terminal), and vice versa. Electrical entry DIN terminal Y With connector YO Without connector 698 Series 10-SYJ300/500/700 Specific Product Precautions 1 Be sure to read before handling.

Aluminum High Vacuum Angle Valve

) 1.3 x 10-8 Nil A B C None w, e w e DSeal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 XSA 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Modular F.R.L. Units

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

VFS

1, Metal joint q, w, Gasket A e, Guard !3 End plate (U side) assembly !1 AXT625-2A-20 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-2A-10 End plate (U) !1, Metal joint q, w, Gasket A e, Guard !3 AXT625-3A End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !

5

Applicable bore size A D L MM N R W Flat type Round type CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 Part no.

SQ1000/2000

1 Port plugs> CP VVQZ3000 w e r t

CRQ2

shaft Reversed shaft W W W W 10, 15 20, 30, 40 10, 15 W W W W W W 10, 15, 20, 30, 40 10, 15, 20, 30, 40 10, 15 Stepped round shaft with double-sided chamfer W W 10, 15 Stepped round shaft with double-sided chamfer Right-angle chamfer Double key 20, 30, 40 Combination Chart of Made to Order Chart 2.

ZP3

to 16 w q ZP3 B N 10 9 Model A B C q Pad dia.

MY1

W MY1H32 MY1H32 MY1H32 20 (500) MY1H25 MY1H25 MY1H25 l l MY1H16 MY1H16 MY1H16 MY1H20 (450) 10 (100) MY1H10 MY1H10 0 500 1000 1500 Support spacing (l ) (mm) 8-11-84 81 Series MY1H Mechanically Jointed Rodless Cylinder High Precision Guide Type Construction: 10 Centralized piping type @9 @5 !8 o i !6 !1 r @2 y u !7 t !4 !9 w MX MTS !

5 Port Solenoid Valve

10 (M4 x 34) 2 VP4 Valve + Restrictor spacer (VVQ5000-20A-1 5 ) q AXT632-25-5 (M4 x 82) 4 VQ 1/2 q w w AXT632-25-10 (M4 x 34) 2 Not necessary when mounting the sub-plate.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Best Pneumatics Vol. 14

Model Description AC10B G27-10-R1 G27-10-R1 (3) AD17 Y100 AC25B G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N (7) AC30B G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N (7) AC40B G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) AC40B-06 G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) AC50B G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N (7) AC55B G46-10-02 GC3-10AS G46-2-02 GC3-2AS

Fluoropolymer Piping Equipment

Connection threads R/NPT A A E E H L L M W N Min. port size W LVA M N LQ3H11-M 4 1/8" 29.5 28.5 10 9 11 33.5 32.5 14 10 4 2.5 LQ3H12-M 3 2 LQ3H21-M 6 1/8" 39.5 38.5 17 16 16 43.5 42.5 20 14 4 4 LQ3H22-M 1/4" 37.5 36.5 6 LQ3H31-M 10 1/8" 51 48 LVH (E, E) Port size R (NPT) LVD LVQ 4.4 4.4 LQ3H32-M 8 LQ3H33-M 10 1/4" 49 46 6.4 6.4 LQ3H34-M 8 LQ3H35-M 10 3/8" 48.5 45.5 10 7.5 LQ3H36-M 8 10 6.4

5 Port Solenoid Valve

7 w e r !8 @1 @6 @5 Cable 0.3 mm2 x 25 pins O.D. 1.4 !9 y t @0 u 10 Seal (Length) Polarity Terminal 015 no.

MY1

(max. 38) W 58 58 70 88 104 128 152 h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 FC 14 14 13 17 17 26 31 EY 39.5 45.5 53.5 67 83 106 129 EC 5.8 5.8 6.5 8.5 10 14 14 EB 30 32 38 50 57 66 77 EA 7 10 12 14 17 20 26 E 14.6 20 24 29 35 40 52 Model MY1C16 MY1C20 MY1C25 MY1C32 MY1C40 MY1C50 MY1C63 Low load shock absorber + Adjusting bolt MY1C Bore size Stroke L TT h h h E F EA EB W F For MY1C16, 20 Stroke adjusting

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

In the case of w/ One-touch fitting, the 5 mm stroke with 32 bore is the same external dimensions as 10 mm stroke.

Compact Rotary Actuator Series CRQ2

Applicable shaft types: S, W d1 = d1 = E3 = E1 = L2 = Y = L4 = L3 = Size 10, 15 Size 20, 30, 40 L1 = X = (mm) d1 Size 10 15 20 30 40 E4 = E2 = 2 to 3 2 to 4 2.5 to 3.5 3 to 5.5 4 to 7 (mm) (mm) Y 3 to 9 3 to10 L4 max Y Y L2 6 (9 Y) to Y 7 (10 Y) to Y L3 max X 2 X 2 L1 {10 (18 X)} to (X 2) {10 (20 X)} to (X 2) X 8 to 18 10 to 20 Size 10 15 Size 10 15 Symbol: A14 Symbol: A15 Symbol

42

2 Valve + Restrictor spacer (VVQ5000-20A-1 5) q AXT632-25-5 (M4 x 82) 4 q w w AXT632-25-10 (M4 x 34) 2 Not necessary when mounting the sub-plate.

Modular F.R.L. Unit

Nil A B C D q w e q w q w w q e q w The number inside indicates the combination order counted from the inlet side.

1

C85 Series CY1B Series REA C95 Bolt fixed from the upside CP95 Herisert tapped NCM F Note 1) For 6, 10 (CY1B) NCA R Note 2) Bolt fixed from the underside: MD D-X 20Body For 6, 10 (CY1B) Data F (1) MM LA R (2) L PA C HB M B HA W MD A Bore size (mm) 6 10 15 20 25 32 40 50 63 M3 x 0.5 x 3l 15 35 12 11 17 6.3 18 10 2.5 M3 x 0.5 x 3l 18 38 17 15 25 9.5 26 10 2.5 25 57 25 6.5 23 4 35 16.5