XM, XY ) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B
7 i o A A' Cylinder tube sectional view A-A' !0 !1 Parts list No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !
N 9 T L A N 1 * S 1 9 T L A N ) a P M ( g i s p e r u s s e r p y l p p u s . x a M ) 5 . 1 ( 0 2 2 ) a P M ( g i s p e r u s s e r p g n i t a r e p o . x a M ) 0 . 1 ( 0 5 1 e g n a r . p m e t g n i t a r e p O ) C 0 6 ~ 5 ( F 0 4 1 ~ 3 2 t n a c i r b u l d e d n e m m o c e R ) 2 3 G V O S I ( 1 # l i O e n i b r u T y d o B C D A e r u s s e r p e n i l d n a k n a t n e e w t e
T) LVQ LQ (mm) Dimensions PB LVN T U Model LVD2-S LVD3-S LVD4-S LVD5-S PA 28 9.6 TI/ TIL 34 17.5 A B 35 20 U PA 57 25 PAX With flow rate adjustment & by-pass PB (Max. S) (Max.
4 Rubber y POM Piston A !5 Stainless steel u POM Plunger !6 Stainless steel i POM Valve seat (A) !
03(S)A 5/32" 8.2 AS221F-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 19 (19) AS221F-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 20 (21) AS321F-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS321F-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS321F-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS321F-03-07(S)A 1/4" 3/8 19
M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
pressure of 0.5 MPa and a temperature of 20C. 15-9-93 3 Construction Elbow type Meter-out type Universal type Meter-out type e u !
M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .
0 w u r e !2 Component Parts Description No. Material PBT PBT Brass Brass Note White Black (1) Body A Handle Body B Needle 1 2 3 4 !1 q i !
D-A73C D-A80C D-F7WV D-F7BAL D-F7BAVL D-F7W D-J79W D-F7NTL D-F79F D-F7V D-J79C D-F7 D-J79 [For CLKQ] [For CKQ] B A B A U U Direct mounting type Applicable auto switch: D-A9 D-A9V D-F9WV D-F9BAL D-M9V D-F9W [For CKQ] D-A9, D-F9W D-A9V, D-M9V D-F9WV D-F9BA U U B A [For CLKQ] D-A9, D-F9W D-A9V, D-M9V D-F9WV D-F9BA U U B A 14 Series CKQ/CLKQ Pin Clamp Cylinder Proper Auto
5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts MB No. q w e r t y u i o !0 !1 No.
5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.
ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping I M <-iD;;,;; uo200 08; 12mm lead 10.05 100 08
D-X 571 B RSQ Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V 12 Hs B B A B B A 16, 20 B A Hs B Hs B A Hs B A Hs B A 32 to 50 A A B A A B A Hs D-A7 D-A80 D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F79F D-F7NT D-F7BA D-A73C D-A80C D-J79C D-A79W D-F7WV D-F7V D-F7BAV 16, 20 B A Hs B A Hs
Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD
6 to 12 LVA 27.5 F Q S F (Q) 34 LVH LVD LVQ 25 U LQ R C R C LVN (44) G1/2 TI/ TIL E B A H D E (S) G1/2 2-P Port size PA B A H D 2-M Thread depth N 2-P Port size PAX 2-M Thread depth N L PB L K K N.C.
Power supply output VI: 20 [kVA] Q = P = V x I x Power factor In this example, using a power factor of 0.85: = 20 [kVA] x 0.85 = 17 [kW] Cooling capacity = Considering a safety factor of 20%, 17 [kW] x 1.2 = W Efficiency Q = P = In this example, using an efficiency of 0.7: 13 0.7 = = 18.6 [kW] Cooling capacity = Considering a safety factor of 20%, 18.6 [kW] x 1.2 = 22.3 [kW] 20.4 [kW] *1
CA CB D NA A U BA S + Stroke BB H 0 0.3 CX + 0.2 + 0.1 R Z + Stroke ZZ + Stroke 0 0.3 CD (Cd) A BA BB CA CB CX D GA GB H MM NA NB R S U Z ZZ Bore size (mm) 10 15 15 12 17 14 3.3 3.2 4 8 18 28 M4 x 0.7 12.5 22.5 5 46 8 82 87 16 15 18.3 18.3 20 20 5 6.5 5 8 23 28 M5 x 0.8 12.5 27.5 8 47 10 85 93 Clevis pin and snap ring are shipped together. 10-14-8 9 Stainless Steel Cylinder Series CJ5-S