5 Port Air Operated Valve SYA3000/5000/7000 Series

3 4 5 109.7 48.1 51.6 38.1 2 x M5 x 0.8 (Pilot port) 13.6 B A One-touch fitting (A, B port) Applicable tubing O.D.: 8, 5/16" 10, 3/8" 2 x 4.2 (For manifold mounting) 19 42 (66) (52) 2 x 4.2 (For mounting) (5.5) 47.6 SYA7 20-02-(F2) 3 4 5 (49.5) (42.5) 30 1/4 (A, B port) 24.5 15 20 Manual override 1/4 (P port) 2 x 1.8 (Breathing hole) 0.9 2 40 (23.9) 18 30 24.5 EB P EA 2 x 2.2 die-cast hole

1.63

9 12 12 15 15 20 20 20 23 25 27 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 5.4 5.4 6.7 6.7 8.6 8.6 9.5 9.5 11 11 14 14 30.5 36.5 40.5 46.5 54.5 68.5 NPT1/8 NPT1/8 NPT1/8 NPT1/8 NPT1/4 NPT1/4 G1/8 G1/8 G1/8 G1/8 G1/4 G1/4 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 14 16 20 20 26 30 MGPWL, MGPWA 20, 25/A, E Dimensions (mm) MGPWL, MGPWA 32 to 63/A, E Dimensions (mm) Bore

MU

5, 10, 15, 20 5, 10, 15, 20 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET M5 X 0.8 Depth 11 AL 19.5 23.5 27 32 32 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8 Depth 7.5 M6 X 1 Depth 12 M6 X 1 Depth 11 M8 X 1.25 Depth 13 M8 X 1.25 Depth 11 M10 X 1.5 Depth 15 M10 X 1.5 Depth 14.5 M12 X 1.75 Depth 18 M12 X 1.75 Depth

MLGP

When using as a stopper, select a model with a stroke of 30mm or less for bore sizes 20 and 25, and 50mm or less for bore sizes 32 to 100.

MLGP

When using as a stopper, select a model with a stroke of 30mm or less for bore sizes 20 and 25, and 50mm or less for bore sizes 32 to 100.

0.5

performance is based on data using a charged plate (size: 150 mm x 150 mm, capacitance: 20 pF) as defined in the U.S.

3 Port Solenoid Valve SYJ300/500/700 Series

Manifold Specifications For internal pilot Type 20 Type 41,S41 Type 42,S42 Type For external pilot Type 20R Type 42R,S42R Single base type /B mount Manifold type Common SUP, Common EXH P(SUP), R(EXH) type 2 to 20 stations Valve stations Valve Base Location A port specifications Top Side Direction M5 0.8 1/8 NPTF M5 0.8 1/8 NPTF P,R port M5 0.8 Port size M3 0.5 A port M3 0.5 N3T (5/32" one-touch

RSQ

Bore size: 16, 20 E 4-O counterbore 2-N through Q 2-P F Stroke Y G T D W 20 (22) Workpiece transfer direction U V M 10 (11) H + Stroke A + 2 stroke B + Stroke 32 40 50 RSQB -K Bore size: 32, 40, 50 Stroke F Q 2-P Z J I G W E D T U 4-N through 8-O counterbore V 10 (11) 20 (22) H + Stroke A + 2 stroke B + Stroke M 0.2 E Built-in One-touch fittings (20 to 50) Tubing O.D.QA Tubing O.D. 6 QB

MVGQ

RS H A RZQ MI W S M5 x 0.8 P port CEP1 C + Stroke B + Stroke A + Stroke M5 x 0.8 R port CE1 CE2 [ ]: Denotes AC.

51

MB1 D-G5, K5, G5W, G5BA D-K59W, D-G59F, D-G5NT 20 to 100 D-C7, C8/D-C73C, C80C 20 to 63 CA2 CS1 Hs Hs CS2 24.5 16 A B B A D-H7, H7W D-H7NF, H7BA, D-H7C 20 to 63 D-B5, B6, B59W 20 to 100 Hs Hs 24.5 16 A B B A (mm) Auto Switch Proper Mounting Position Auto Switch Mounting Height (mm) D-G5W D-K59W D-G59F D-G5 D-K5 D-G5NT D-G5BA Auto switch model Auto switch model D-M9 D-M9W D-M9A D-A9 D-H7

HRX-OM-X071

capacity . 9-11 9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow (for water-cooled type) . 9-15 9.7.1 HRR050-W-20. 9-15 9.7.2 HRR050-W-40. 9-15 9.8 Types

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension

C95

9 i *1 *1 C95K32 A A-A A !2 !

SYA3000/5000/7000

) VZA 13.6 B VFA A One-touch fitting (A, B port) Applicable tubing O.D.: 8, 5/16" 10, 3/8" 19 2 x 4.2 (For manifold mounting) VFRA 42 VA (66) 2 x 4.2 (For mounting) (52) (5.5) 47.6 SYA7 20-02-F2) 3 4 5 (49.5) (42.5) 30 24.5 1/4 (A, B port) 15 20 Manual override 1/4 (P port) 2 x 1.8 (Breathing hole) 0.9 2 40 (23.9) 18 30 24.5 EB P EA 2 x 2.2 die-cast hole (For manifold gasket positioning)

CJ5-S

S Dimensions R V Head side flange style (G): CG5GNS GA GB FT Width across flats KA 2-Rc P H1 Width across flats B1 D I RE A B AL A MM Width across flats NA K REC C0.1 8-J 4-FD M S + Stroke ZZ + Stroke H FX0.15 B CX CY Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 MQQ M Up to 200 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25

CJ5-S

S Dimensions R V Head side flange style (G): CG5GNS GA GB FT Width across flats KA 2-Rc P H1 Width across flats B1 D I RE A B AL A MM Width across flats NA K REC C0.1 8-J 4-FD M S + Stroke ZZ + Stroke H FX0.15 B CX CY Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 MQQ M Up to 200 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

VV3Q11 (L5) (L4) (L3) (8.5) 88 L2 48.7 L1 Plug ass'y VVQ100-12A2 3 1 (35) (45) 33 (5.5) 23.5 12.3 E 3 2 R11(Min. bending inner radius) 21.5 Manual override (29.3) 104 D side U side Stations 1 2 3 4 5 n 2-M50.8(E port) 2-M50.8(P port) 42.9 A A (8.5) 20 5 15 (7.5) 5 (A port) n-M50.8 15 P=10 Dimensions n: Stations(Max.18 stations) Equation : L1=10n+32 L2=10n+43 n L 2 52 63 83 112.5 123 3 62

Refrigerated Air Dryer

IDU3E-10, IDU4E-10 IDU6E-10 30 mA IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 Type 200 V 5 A IDU3E-20, IDU4E-20 IDU6E-20 S Option symbol IDF1E-10 to 11E-10, IDU3E-10 to IDU6E-10 With power cord connection The option allows the connection of a power cord to a terminal block.

VDW Series

VDW VDW 1.6 CV = 0.07 10 20 5.0 VDW10 VDW10 1 CV = 0.03 VDW10 1 CV = 0.03 1.0 0.1 0.001 0.01 0.1 1 10 Pressure differential P = (P P) MPa Viewing the graph To generate a water flow of 4l/min at a differential pressure of 0.1MPa, an effective area with Cv factor 0.28 (VDW303) or more is required.

VQ5000

106 46.8 59.2 9 9 U side 83.5 55.5 M5 ground screw 19 34.5 n 12 X 2n-Rc 3/8, 1/2 4(A), 2(B) port B 2 A 4 6 Indicator light B 2 A 4 A B 5 SMC SMC SMC SMC SMC A B B B B B B 2 A 4 Manual override A B 4 A L2 L1 58.5 P = 41 B 2 A 4 A B 3 A B 2 A 4 A B 2 A 34.5 48 68.5 P = 41 B 2 A 4 A 1 A X 12 Stations R4.5 15.5 17 22 51 69 117 D side 107.8 179 (Single, Double, 3 position, Rubber type) 184.5