Prevents Micro-Bubbles

) A Stacking type Symbol 02 03 04 Body class 2 3 4 Port size 1/4 3/8 1/2 LVD Manifold stations 02 2 stations LVQ 05 5 stations LQ LVN How to Order Valve TI/ TIL LVH 2 0 02 C A Threaded type PA PAX Body class Material Symbol 2 3 4 Orifice dia. 4 8 12 Valve type Body class 2 3 4 PB Body Actuator section End plate Diaphragm Symbol PFA PP PPS PTFE C 0 N.C.

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLA 2 A 05 02 C LVN Body class TL/TIL Material Symbol 2 3 4 5 Body class 2 3 4 5 Thread type Manifold PFA Symbol C LQ3 Symbol Nil N Thread type Rc NPT Base type Port size (port P) A Stacking type Symbol 02 03 04 06 Body class 2 3 4 5 Port size 1/4 3/8 1/2 3/4 Manifold stations 02 2 stations 05 5 stations How to Order Valve LVA 2 0 02 C A Option Body

I

ISE5-02-27L Two Output NPN Open Collector 30V, 80mA ISE5-02-67L Two Output PNP Open Collector 80mA ZSE5B02 L O P T I O N S L 3m W I R I N G S P E C I F I C AT I O N S Non-Backlit (Std) B Backlit LCD S W I T C H S P E C I F I C AT I O N S P I P I N G S P E C I F I C AT I O N S 26 Analog 3-Wire 27 2 Output (NPN) 4-Wire 67 2 Output (PNP) 4-Wire 02 PT 1/4 T2 NPTF 1/4 T E C H N I C A L SPECIFICATIONS

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

VT/O317-G(-02) VT/O317-GS(-02) VT/O317-H(-02) VT/O317-HS(-02) VT/O317-C(-02) VT/O317-CS(-02) VT/O317-T(-02) VT/O317-TS(-02) VT/O317-TZ(-02) VT/O317-D(-02) VT/O317-DS(-02) VT/O317-DZ(-02) Coil assembly with terminal part no. Coil no.

0.4

N.C. 5 24 VDC 4-position dual 3-port valve (B) 4 2 B Note) 1 5 3 Function N.O. N.O. Symbol Specifications 4-position dual 3-port valve (C) Standard (0.4 W) Nil B K Note 1) 4 2 C Note) High-speed response type (0.95 W) 1 5 3 N.C. N.O.

VZS

8, 1/4 VQ7 ( ): Rc 1/8 EVS L plug connector 2 position double: VZS3250-L(Z)-01 02 3 position closed center: VZS3350-L(Z)-01 02 3 position exhaust center: VZS3450-L(Z)-01 02 3 position pressure center: VZS3550-L(Z)-01 02 K plug connector 2 position double: VZS3250-KZ-01 02 3 position closed center: VZS3350-KZ-01 02 3 position exhaust center: VZS3450-KZ-01 02 3 position pressure center: VZS3550

ZP

Model A B C Y D P Q R Model A B C D E F Flat Flat with ribs P Q R F F U C U C U C 1.2 1.6 2.6 4.8 7 9 ZPY20 20 25 32 23 14 28 5 4.5 2.3 1.8 1.7 N4 (Nylon tube 4/2.5) N4 (Nylon tube 4/2.5) 13.5 5 1.8 14.5 5 1.8 24 42 4 4 5 ZPY04U ZPY06U ZPY08U 8 35 6 0.8 ZPY25 14.5 24.5 42.5 N6 (Nylon tube 6/4) ZPY32 N6 (Nylon tube 6/4) 15.5 7 2.5 2.5 16.5 7 2.5 1 Deep U4 (Soft tube 4/2.5) U4 (Soft tube 4/

Soft Start-up Valve

98 DC 96 Dimensions (mm) Standard specifications Model Port size A C D E1 E2 G H J 1(P) 2(A) 3(R) AV2000-02-1 to 4G(Z)-A 1/4 1/4 1/4 66 47 24.5 20 20 33 Width across flats 22 30 AV2000-02-5 to 6G(Z)-A 1/4 1/4 1/4 AV3000-03-1 to 4G(Z)-A 3/8 3/8 3/8 76 50 29.5 20 20 38 Width across flats 24 35 AV3000-03-5 to 6G(Z)-A 3/8 3/8 3/8 AV4000-04-1 to 4G(Z)-A 1/2 1/2 1/2 98 56 39.5 26 26 49 Width across

Secondary Batteries

Port size Body size Port size Symbol 2 3 4 02 03 04 06 1/4 3/8 1/2 3/4 *Specifications and dimensions for the 90-series are the same as standard products.

0.55

/Dimensions Standard/VPA344-1l 01 02 A B 1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 11.2 30 18.5 1/8, 1/4 3(R) port 1/8 12(PA) port 2A NO 35 43 NC 12 12 3R 1P NC (1/8) 12(PA) port 12 6.7 58.2 18.5 65.2 60 59 24 X 12 M5 x 0.8 (Breathing hole) 19.5 39 1/8, 1/4 1(P) port For vacuum/VPA344V-1l 01 02 A B 1/8, 1/4 2(A) port 19.5 12 40.5 2 x 4.2 (For mounting) 18.5 1/8, 1/4 3(R) port

VZ5000

length) G: 300 mm H: 600 mm VZ5440 VK VZ Manual override (Non-locking) (Mounting hole) VF VFR VZ5540 VP4 VZS VFS VS4 VQ7 (PE port) EVS 2-Rc 1/4 (3(R1), 5(R2) port) 3-Rc 1/8, 1/4 (1(P), 4(A), 2(B) port) VFN L plug connector (L) VZ5 40-LM plug connector (M) VZ5 40-M01 02 3 4 5 01 02 3 4 5 (Lead wire length) 300 (Lead wire length) 300 DIN terminal (D) VZ5 40-D01 02 3 4 5 : With light/surge

Standard Combinations

(The SI unit type is provided for use in Japan.) 01 02 03 04 1/8 1/4 3/8 1/2 17 Series AC Spacers and Brackets Accessories Spacer (X) D Center of F.R.L. body C 1 X-X B X RELEASE Y200 Y400 2 X Applicable model A 3 4 5 B 35.5 47 57 C 18.5 26 31 D 48 59 65 Model Y200 Y300 Y400 Seal ACG20 ACG30 ACG40 A Spacer width Part no.

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) 1/8 VF3;3;-;;1-01 1(P), 5(EA), 3(EB) 1/8 4(A), 2(B) 1/4 VF3;3;-;;1-02 1(P), 5(EA), 3(EB) P: 1/4, EA, EB: 1/8 4(A), 2(B) 1/4 VF3;4;-;;1-02 VF3000 1(P), 5(EA), 3(EB) 1/4 4(A), 2(B) 3/8 VF3;4;-;;1-03 1(P), 5(EA), 3(EB) 3/8 1(P), 5(R), 3(R) 1/4 Type 30 manifold base 4(A), 2(B) 1/4 Type 40 manifold base 1(P), 5(R), 3(R) 1/4 Applicable

A

O D C L E V I S D I M E N S I O N S M O U N T I N G N U T B C D Part No Bore Size A 0.65 0.13 3/8-24UNF NSNP-P006 6 (1/4) 0.56 0.79 0.16 1/2-20UNF NSNP-P010 10 (3/8) 0.69 0.86 0.19 9/16-18UNF NSNP-P015 15 (5/8) 0.75 B C D Part No Bore Size A 0.11 0.36 5-40UNC JM-005 6 (1/4) 0.31 0.43 0.13 10-32UNF JM-02 10 (3/8) 0.38 0.43 0.13 10-32UNF JM-02 15 (5/8) 0.38 F ND E B D C Part No Bore Size G

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Sub-plate side M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Body side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O. Sub-plate side M5 x 0.8 0.45 0.32 1.9 0.57 0.19 2.4 N.O.

Valve Single Unit

2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Weight (g) Valve model Type of actuation L plug connector M plug connector 1, 5, 3 (P, EA, EB) 4, 2 (A, B) Grommet C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Single Double Closed center 108 109 116 117 0.81 0.33 3.3 0.93 0.23 4.1 2 position 0.63 0.38 2.4 0.70 0.31 2.9 SX720--02 Rc 1 4 Exhaust center Pressure center Single Double

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

pilot port (Only external pilot style(R)) 3 4 5 3 4 5 L plug connector (L): VQZ2 5 (R)lLl 0 1 01 02 0 1 01 02 DIN connector (Y): VQZ2 5 (R)lYl Indicator light 148<150> 300 (Lead wire length) 67.5<68.5> Applicable cord O.D. 3.5 to 7 Pg.7 155.5 MAX.10 53<56.5> 71.5 Indicator light Cover diameter 1.5 Cross section 0.23mm2 < >: AC 82.5 75 3 4 5 M plug connector (M): VQZ2 5 (R)lMl 0 1 01 02

0.4

Note 4) Dual 3-port type is not applicable. 2 2-position double (Rubber) 4-position dual 3-port valve (C) 2(B) 4(A) 2(B) (A)4 Note) C C: Locking type (Manual) (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C. N.O.

7.5

Flow Characteristics SJ2000 Flow characteristics Port size 4/23/5 (A/BE) 12/4 (PA/B) 1(P) 3/5(E) 4, 2 (A, B) C [dm3/(sbar)] C [dm3/(sbar)] Cv b b Cv 0.04 0.55 0.13 0.13 0.50 0.04 C2 C8 0.08 0.16 0.33 0.36 0.13 0.08 C4 0.52 0.06 0.18 0.20 0.29 M3 0.06 SJ3000 Flow characteristics Port size 4/23/5 (A/BE) 12/4 (PA/B) 1(P) 3/5(E) 4, 2 (A, B) C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b 0.04 0.56 C2

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

X Port size) Speed controller System figure System Solenoid valve SYJ7l40-01 Rc(PT)1/8 (S = 12.6mm2) AN110-01 (S = 35mm2) 4 X 1/8 AS2301F-01-04 A 02 03 AS3301F-06 6 X 1/4 B q 02 03 AS3301F-08 SYJ7l40-02 Rc(PT)1/4 (S = 12.6mm2) 8 X 1/4 C AN200-02 (S = 35mm2) 02 03 AS3301F-10 10 X 1/4 D 12 X 1/4 12 X 1/2 AS4001F-12 w E 1.2-53 Series SYJ7000 How to Order Light and surge voltage suppressor