Display Pressure: 4 (0.4MPa), Connection Thread: 01M (R 1/8, M5 Female), Grade: SRB (General Degreasing, Production Line), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

Display Pressure: 4 (0.4MPa), Connection Thread: 02 (R 1/4), Grade: SRA (Precision Cleaning, Clean Room M5.5), Attachment: C (Clear Cover Non Removable, Wrench Tighten)

VXA21/22

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 8 The VX series will be revised shortly.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

: 37 Rc(PT) 1/4 Top VQZ300 2 to 20 VZ VQZ3l2 VV3QZ32-lll VT VT VP VG How to Order Manifold Assembly (Example) VP D side U side 1 3 4 5 stations 2 VQ VQZ VQZ212-5M-C6 4 set VV3QZ22-05C VVQZ200-10A-2 VQZ212-5M-C6 1 set (C kit 5 stations manifold base) 1 set (Blank plate assembly) 4 sets (N.C. style) VZ VS Prefix "" mark to valves etc. to be assembled on the manifold.

ZX

Nil L Grommet (0.6 m) CL Connector (3 m) CN Without connector Unit for replacement For ejector system (PD and PS ports are equipped with plugs.) 01 1 Grommet (3 m) C Connector (0.6 m) Thread type Exhaust Nil F G Rc 1 8 08 8 (6) Digital vacuum switch unit Supply port location Nil C Common exhaust Individual exhaust 21 C 0X ZSE3 D R L Left side Right side T NPTF Unit for replacement B Both

7.4

B 4-position dual 3-port (N.O. + N.O.) (Pressure center) C 4-position dual 3-port (N.C. + N.O.) Electrical entry Symbol Specifications Configuration Body Ported Note) It cannot be mounted on a manifold.

VCW

Symbol 01 02 03 04 06 Class 3 Class 2 Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Electrical entry C Conduit G Grommet Orifice size Symbol 2 3 4 5 7 10 Class 3 Class 2 Orifice diameter Class 4 2mm 3mm 4mm 5mm 7mm 10mm D -DIN connector DL -DIN connector with light DO-For DIN connector (without connector) T -With conduit terminal TL-With conduit terminal/light Note) Note

Modular Type Air Filter Series AF

Drain guide 1/4 Note 4) AFM30, 40 Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right to left AFM20 to 40 N Note 1) Float type auto drain (N.O.)

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Symbol 01 02 03 04 06 Class 3 Class 2 Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Electrical entry C Conduit G Grommet Orifice size Symbol 2 3 4 5 7 10 Class 3 Class 2 Orifice diameter Class 4 2mm 3mm 4mm 5mm 7mm 10mm D -DIN connector DL -DIN connector with light DO-For DIN connector (without connector) T -With conduit terminal TL-With conduit terminal/light Note) Note

3 Port Solenoid Valve

01 02 SS073A Stations C L2 0.1 W with power saving circuit L1 1.8 18 5 23.5 21 P = 7.2 11 22 3.5 3.5 8 R1.7 7 25.5 3.4 28.5 3.5 150 (lead wire AWG#26) 27 5 150 (lead wire AWG#26) 3.5 6 barb fitting 1 (SUP) port n U side 1 2 3 4 5 D side 6 barb fitting 3 (EXH) port (18) 12 7 5 5 3.5 3.2 3.5 P = 7.2 12.8 n-3.2, 4 barb fitting 2 (OUT) port Dimensions Formulas: L1 = n 7.2 + 14.8, L2 = n 7.2

AZ1000

2PW Delivery pressure Bonnet option Code Delivery pressure 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) Code Bonnet Standard Panel installation 4) No code P BP 01 Bonnet port (NPT 1/8 inch) 4) Panel mounting hole: dia. 1.56 inch (39.6 mm).

ZSE40/ISE40

(Refer to Precautions on page 16-2-24 for details.) 1.5 01: R 1/8 T1: NPT 1/8 Data ZSE40(F)/ISE40-W1 2-M4 x 0.7 thread depth 4 20 30 Rc 1/8 MPa 7 19 20 30 OUT2 OUT1 SET 6.5 R 6.4 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7.8 7 2.5 2.6 30 15.2 42 10.7 4 6 For splash proof use (IP65), insert an air tube into the atmospheric release port.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Refer to the table below for accessory/option combinations Thread Rc (PT) Table: Accessory/Option combinations Depending on model l Not available Available F G (PF) N NPT Accessories Options C C D -J -R D J T AMD150 R AMD250 AMD350 AMD450 Applicable models Accessories /Options Port size AMD550 AMD650 AMD850 01 B B 06 10 14 1 8 3 4 1B N.C. auto drain N.O. auto drain Drain guide 1/4B IN R

ARJ1020F

Inch size ARJ310F-N01 5/32" 1/4" 03 07 14-4-11 9 Series ARJ310 Flow Characteristics Inlet pressure: 0.7 MPa ARJ310-01 ARJ310F-01-04 ARJ310F-01-06 0.7 0.7 0.7 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

CJ2X/CUX/CQSX/CQ2X/CM2X

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Model Option 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Bracket assembly Note 1) AR50P-270AS Note 2) AR20P-270AS Note 3) Note 3) AR25P-270AS AR30P-270AS AR40P-270AS Set nut AR20P-260S AR25P-260S AR30P-260S AR40P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) 10: G49-4-01, 21: G49-4-01

VZA200/400

Rc 1/8 Body side VZA422-P-01 M5 x 0.8 0.53 0.17 2.2 0.49 0.17 2.0 N.O. Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Sub-plate side M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C.

Series VCS

Standard 1 2 3 4 5 6 7 Stainless steel Clip Stainless steel, Cu Tube assembly Class H Coil assembly Stainless steel, PTFE (FKM) Armature assembly PTFE (FKM) Seal Stainless steel Return spring Brass Body Dimensions (mm)/Bracket 1in = 25.4mm A J 4-G C 1.5 B D E L 4-H Valve mounting hole F Bracket mounting dimensions (mm) B C D E F G H J L A Bracket part no.

Series VCL

Optional Standard 1 2 3 4 5 6 7 Clip Stainless steel Tube assembly Stainless steel, Cu (for class H coil) Stainless steel Coil assembly Class H Class B Armature assembly Stainless steel, FKM O-ring FKM Return spring Stainless steel Body Stainless steel C37 Dimensions (mm) /Bracket 1in = 25.4mm A J 4-G C 1.5 B D L E 4-H Valve mounting hole F Bracket mounting dimensions A B C D E F G H