Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

REA/REB

6 6 6 9 D-Y5/Y6/Y7 6 5 5 5 5 6 Since this is a guideline including hysteresis, not meant to be guaranteed.

REA/REB

6 6 6 8 D-Y5/Y6/Y7 6 5 5 5 5 6 Since this is a guideline including hysteresis, not meant to be guaranteed.

Clean Room Rodless Cylinder Series CYP ø15, ø32

-ASD330F-01-08 10-ASD230F-M5-06 2.

Modular Type Regulators Series AR

Note 6) Note 6) Note 6) Note 6) Note 5) Note 5) Note 5) Note 5) Note 5) Note 5) Z Note 5) Z Note 4) Note 1) Option B, G, H are not assembled and supplied loose at the time of shipment.

REA/REB

6 @0 #3 r #0 t o w !7 @2 @3 !8 #4 #5 !2 #6 #2 u e !1 !3 #1 @6 @8 @5 @7 @9 @4 Parts list Parts list Material Material No. Description Note Note No.

Fieldbus System

P-tight screw (4 x 14) 2 pcs. w Valve Plate EX600-ZMV1 EX600-ZMV2 (Specialized for SY series) Enclosed parts Round head screw (M4 x 6) 2 pcs. Round head screw (M3 x 8) 4 pcs. Enclosed parts Round head screw (M4 x 6) 2 pcs.

Dual Speed Controller with One-touch Fitting Series ASD 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

Sine Rodless Cylinder Series REA/REB

Operating Range (mm) Bore size (mm) Auto switch model 10 25 15 20 32 40 D-A7, A8 6 6 6 6 6 6 D-F7, J7, F79F 3 3 4 3 3 3.5 Since this is a guideline including hysteresis, not meant to be guaranteed. (assuming approximately 30% dispersion) There may be the case it will vary substantially depending on an ambient environment.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

(-F2) L 143.4 (Lead wire length) Insulation: Red (+) Insulation: Black () 5.9 4.1 14.7 12 0.3 mm2 (71.7) Cable type (TT) 52-SY5220-TT-01 (-F2) Max.10 L (Lead wire length) 177 Lead wire marking No.1 (+), No.2 () 0.75 mm2 (88.5) 6 ATEX Compliant Body Ported Type Series 52-SY5000 Dimensions 3-position closed centre/ exhaust centre/pressure centre L plug connector (L) 22.6 16.7 3 52-SY5420-L

Membrane Air Dryer

Q r Q1 Inlet air Series IDG6 15 1.22 2.17 Step 6 20 1.10 1.52 Confirmation of pressure drop $P1 [MPa] Step 6 25 1.00 1.00 30 0.92 0.65 Single unit (Refer to pages 7 and 8.)

Booster Regulator/Air Tank

VBA20A-03 VBA20A-F03 VBA10A-02 VBA10A-F02 VBA11A-02 VBA11A-F02 G27-20-01 AN200-02 ANA1-02 KT-VBA10A-18 VBA40A-04 VBA40A-F04 VBA22A-03 VBA22A-F03 VBA42A-04 VBA42A-F04 VBA43A-04 VBA43A-F04 Model Description Pressure gauge Silencer High-noise reduction silencer Elbow for silencer G27-20-01 AN400-04 ANA1-04 G36-10-01 AN400-04 ANA1-04 KT-VBA22A-7 AN300-03 ANA1-03 G N S L G36-10-01 AN300-03

VQ4000

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

Digital Flow Switch (Integrated display type)

) 88 12 20 2.8 depth 6.2 PF2M711/721W-N7(-L) 88 10.3 20 2.8 depth 6.2 -104No.PF-OMW0007-E PF2M7#S-#1/2(-L) (mm) Model A B P Q PF2M705/710/725/750S-01(-L) 94 14 2.8 depth 8.4 2.5 depth 6 PF2M705/710/725/750S-N1(-L) 96 14 2.8 depth 8.4 2.5 depth 6 PF2M705/710/725/750S-F1(-L) 98 14 2.8 depth 8.4 2.5 depth 6 PF2M711/721S-02(-L) 98 17 2.8 depth 6.2 2.5 depth 5 PF2M711/721S-N2(-L) 98 17 2.8 depth

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

Shock Absorbers and Rate Controls

N/A 6. +0. 6. +0.t3/0 6.02 38.1 6.0 8.3 5.9 t0.0 861 .S !

VZA2000

VZA4221-01 VZA4321-01 VZA4421-01 VZA4141-1-01 VZA4141-1-02 VZA4141-2-01 VZA4141-2-02 VZA4241-1-01 VZA4241-1-02 VZA4241-2-01 VZA4241-2-02 VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-01 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 Single Double Closed center Exhaust center 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49 0.49 0.47 0.47 0.14 0.14 0.15 0.15 2.0 2.0 1.9

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

PFxx-OMJ0005CN

8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01