High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

100

Specific Product Precautions 22 A ZL3/ZL6 Series Exhaust Characteristics (Representative value) ZL3H ZL3M 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 0.3 0.4 0.5 400 500 450 400 350 300 250 200 150 100 50 0 0.2 0.6 Vacuum pressure Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure 350

Dual Speed Controller with One-touch Fitting Series ASD

Flow Direction Symbols on Body Meter-out type Meter-in type Flow Rate and Effective Area Symbol JIS Symbol ASD230F ASD330F ASD430F ASD530F ASD630F Model 6 8 10, 12 10 12 Metric size 4, 6 8, 10 1/8" 5/32" 3/16" 1/4" 6 6, 8 1/4" 5/16" 3/8" Tubing O.D. 3/16" 1/4" 1/4" 5/16" 3/8" 3/8" Inch size Flow rate l/min (ANR) Controlled flow (Free flow) 500 600 700 1200 1300 175 295 350 75 {N R/min}

IDUS/IDFS

condition r C = 0.90 based on condition r 2 2 Based on condition t, A and C Corrected air flow = 350 (0.75 x 1.00) = 467 l/min (ANR) 3 3 Based on condition t, B and C Corrected air flow = 1200 (0.95 x 0.90) = 1400 l/min (ANR) Based on condition y; IDUS4E is selected as the model to process an air flow larger than 467 l/min (ANR) with a 50Hz power supply, according to data D-1.

Special Specifications:

C With N.O. auto-drain D With drain guide (2) 150 250 350 450 550 650 850 With N.C. auto-drain J Note 1) 850 size comes with a ball valve. Note 2) Drain piping, or piping for a stop valve, like a ball valve, is required. 850 size comes with a ball valve. substitute with (Symbol: A).

MK

MK-F020 MK-F025 MK-F032 MK-F040 MK-F050 MK-F063 Bore size (mm) 20 25 32 40 50 63 Accessory With boss in head side 2 3 5 7 13 25 With arm 100 100 200 200 350 350 13 32 Centering location ring Set pin Bolt for cylinder body Rear flange type (including mounting bolt) 133 153 166 198 345 531 Calculation: (Example) MKG20-10RFN Standard calculation: MKB20-10R 250 g 6 g 133 g 2 g 100 g 491

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping directions Maximum stroke Cushion Bore size (mm) Model Height Overall length mm mm 150 200 250 300 350 400 450 500 550 600 50 100 CX 10 15 25 15 10 25 240 350 310 For 100mm stroke cylinder Series Series 10 500 CY1F CY1H CY1F CY1H MY2H Concentrated

These options include a symmetric style, stroke adjusters, axial piping and auto switches., CYL, SLIDE TABLE, CLEAN ROOM, ACTUATOR, MXS/MXJ GUIDED CYLINDER, B5, 4MM MXJ CLEAN-ROOM, .13227 lb, ModelAdjuster optionGradeIntake flowl/min (ANR)?11-MXJ4(L)Without adjusterGrade 3 (Class 100 or equivalent)1

CG1-OM0227

. <> 6080 D-M9A(V) M3M3 0.60.7Nm (M2.5) (M2.5)0.050.1Nm 56mm 1)(M2.5) 2)M3 BMA3 A 12 4 1) (BMA2-A)(BJ5-1/) () 2) (BMA2-AS/)(BJ4-1/) D-M9A(V) () BBA3:D-B5,B6,G5,K5 BBA4:D-C7,C80,H7 3)BBA3 Best Pneumatics No. P1357 D-H7BA,G5BA BBA3,BBA4 5 (30%) 13 14 () (mm) 1) () 2) 6. 15 7 Best Pneumatics No. P.12631371 Best Pneumatics No.

CEx-OMI0064

CR ,, (EE ) 2ROM E 2ROM (100 ,E ), 2ROM E (3) : # : ASCII ,, 30H ) # 0 0 V R 23H 30H 30H 56H 52H 23H+30H+30H+56H+52H=12BH 2B ,30H 32H 3BH : # 0 0 V R 2 ; [CR] 23H 30H 30H 56H 52H 32H 3BH 0DH )ASCII ASCII 09 A B C D E F ASCII 30H39H 41H 42H 43H 44H 45H 46H 30H39H 3AH 3BH 3CH 3DH 3EH 3FH 27 - (4) 1bit () bit (ON 1) b7 b6 b5 b4 b3 b2 b1 1 0 () ON () (5) VR # 0 0 V R [CR] No. #

LEC-OM005xx

LECP,LECA LECPA Output pin Output pin0 B1 12 Output pin0 Output pin1 B2 13 keykey Output pin2 B3 14 Output pin1 Output pin3 B4 15 Output pin4 B5 16 Output pin5 B6 17 Output pin6 B7 18 Output pin7 B8 19 Output pin8 B9 20 Last output pin Output pin9 B10 Output pin10 B11 Output pin11 B12 Output pin12 B13 (6-3-5) Input pin monitor It is possible to monitor the input pin of the controller with

LEC-T1_C

OUT mon 1 Output pin0 [ ] Output pin1 [ ] OFF Output pin2 [ ] ON (6-3-4-2) CN5 Output pin LECP,LECA LECPA Output pin0 Output pin0 B1 12 keykey Output pin1 B2 13 Output pin1 Output pin2 B3 14 Output pin3 B4 15 Output pin4 B5 16 Output pin5 B6 17 Output pin6 B7 18 Last output pin Output pin7 B8 19 Output pin8 B9 20 Output pin9 B10 Output pin10 B11 Output pin11 B12 Output pin12 B13 (6

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

When a switch only is shipped, "BBA4" screws are attached D-C7/C8 D-H7l BM2-020 BM2-025 BM2-032 BM2-040 D-B5/B6 D-G5NTL BA2-020 BA2-025 BA2-032 BA2-040 D-A3lA/A44A D-G39A/K39A BM3-020 BM3-025 BM3-032 BM3-040 1.4-80 Series CM2Q Sliding Resistance of The Low Friction Side Boss-cut Style Boss for the head cover bracket is eliminated and the total length of cylinder is shortened.

VQC

Cylinder port size C3 C4 C6 M5 CM L3 L4 L6 L5 B3 B4 B6 B5 LM With 3.2 One-touch fitting With 4 One-touch fitting With 6 One-touch fitting M5 thread Mixed sizes and with port plug Top ported elbow Wtih 3.2 One-touch fitting Top ported elbow With 4 One-touch fitting Top ported elbow With 6 One-touch fitting M5 thread Bottom ported elbow With 3.2 One-touch fitting Bottom ported elbow With 4

Adapter Material: Brass, Standard, Pad Diameter: ø16, Pad Type: B (Bellows), Pad Material: U (Urethane Rubber), Mounting Thread Size: A12 (M12 x 1, Male Thread), Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

Pad Diameter: ø16, Pad Type: B (Bellows), Pad Material: N (NBR), Buffer Specifications: JB (Rotating, w/Bushing), Stroke: 15mm, Vacuum Inlet: B5 (M5 x 0.8, Female Thread)

Adapter Material: Brass, Standard, Pad Diameter: ø13, Pad Type: UM (Flat w/Groove), Pad Material: S (Silicone Rubber), Mounting Thread Size: B5 (M5 x 0.8, Female Thread)

Pad Diameter: B08 (ø8, Blast Type), Pad Type: MU (Flat, Works w/Adapters ZP2A-M01P, ZP2A-M02P, ZP2A-M04), Pad Material: S (Silicone Rubber), Mounting: B5 (M5 x 0.8 Female Thread)

Adapter Material: Brass, Standard, Pad Diameter: ø10, Pad Type: UM (Flat w/Groove), Pad Material: S (Silicone Rubber), Mounting Thread Size: B5 (M5 x 0.8, Female Thread)

Adapter Material: Brass, Standard, Pad Diameter: ø8, Pad Type: UM (Flat w/Groove), Pad Material: S (Silicone Rubber), Mounting Thread Size: B5 (M5 x 0.8, Female Thread)