MLGC

Cutout window View A-A' Mounting Standard Stroke GK BP AG AB A AA AN B GD AH AI AJ AK AL AM AO AP BZ GC Bore size (mm) 20 25 32 40 Stroke range (mm) 92 3.5 9 9 75, 100, 125, 150, 200 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 94 73.5 13 11 54 75 32 28 134 150 108 140 M 8 135 110 4 9 9 104 86.5 16 15 62 88 37 29 160 176 125 165 M 8 160 75, 100, 125, 150, 200, 250, 300 110 4 9 9 104 86.5 16 15 62 88 37 30

MLGC

Bore size Bore size MLGClB RSMLGC , #1 (#1+#4) Bore size Bore size MLGClB SMLGC , #3 (#3+#4) 3.2-7 Series MLGC Front Flange Mounting/With Rear Plate MLGClFl-l-RStandard Stroke AN BP AG AM GK AB AL B GD A Bore size (mm) Stroke range (mm) AA AH AI AJ AK AO AP BZ GC 1/8 1/8 1/8 1/8 20 25 32 40 75, 100, 125, 150, 200 75 3.5 13 9 54 94 11 92 9 M8 32 28 134 150 108 140 135 Rc(PT) 73.5 88 4 16 9

MGC

45 194 42 M10 200 95 12 11 135 115 210 190 82.5 19 23 142 50 75 150 115 MGG Bore (mm) Z Y X W WH W V U T S R Q O P MGC 20 25 32 40 50 140 80 30 30 23 36 40 86 12 26 12 21 M6 X 1 M5 X 0.8 MGF 153 80 37 30 25 44 47 98 13 31 12 21 M6 X 1 M5 X 0.8 161 82 37 25 28.5 50 53 112 16 38 12 21 M6 X 1 Rc(PT)1/8 CY1 188 92 44 20 33 60 63 132 20 47 12 25 M8 X 1.25 Rc(PT)1/8 241 104 55 20 40.5 70 73 162

NCA1

included Order to match Rod Thread Rod Eyes Pivot Pin Part No A CA CB CD ER KK Part No CD CL NI-150 3/4 1 1/2 3/4 1/2 5/8 7/16 20 NCA1-150 1/2 1 7/8 NI-325 1 1/8 2 1/16 1 1/4 3/4 7/8 3/4 -16 NCA1-325 3/4 2 5/8 NI-800 1 5/8 2 13/16 1 1/2 1 1 3/16 1 -14 NCA1-800 1 3 1/8 NI-1000 2 3 7/16 2 1 3/8 1 9/16 1 1/4 -12 NCA1-1000 1 3/8 4 1/8 NI-1200 2 1/4 4 2 1/2 1 3/4 2 1 1/2 -12 NCA1-1200 1 3/4 5

VFS

Rc EA, EB Rc Rc 1 8 1 4 1 8 1 8 1 (Center) Pilot EXH port M5 x 0.8 G (PF) 1/4 Electrical entry Bottom Ported Size 5-bottom ported size (Refer to the below right.)

Modular F.R.L. Units

8, 1/4 AF30-A 1/4, 3/8 Bracket (Except AF10-A) AF40-A 1/4, 3/8, 1/2 5 Float type auto drain AF40-06-A 3/4 AF50-A 3/4, 1 AF60-A 1 Pages 43 to 54 Mist Separator AFM Series AFM20-A 1/8, 1/4 AFM30-A 1/4, 3/8 Bracket 0.3 AFM40-A 1/4, 3/8, 1/2 Float type auto drain AFM40-06-A 3/4 Pages 55 to 63 Micro Mist Separator AFD Series AFD20-A 1/8, 1/4 AFD30-A 1/4, 3/8 Bracket 0.01 AFD40-A 1/4, 3/8, 1/2

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

Section 11.8 1 5 1.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

8 1/4 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/8 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) Port size A, B port 1/8 Flow characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 2.2 1.4 1.7 2.1 1.4 1.8 2.1 2.0 1.5 1.9

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

AREA4 33 AREA4 33 N.C. 1 N.C. 1 4 4 Load Load INP1 14 INP1 14 N.C. 1 N.C. 1 24 24 Load Load INP2 34 INP2 34 N.C. 1 N.C. 1 5 5 Load Load INP3 15 INP3 15 N.C. 1 N.C. 1 Load Load 25 25 INP4 35 INP4 35 ALARM1 ALARM1 Load Load N.C. 1 16 N.C. 1 16 6 6 ALARM2 ALARM2 Load Load 36 36 N.C. 1 N.C. 1 26 26 ALARM3 ALARM3 Load Load 17 17 N.C. 1 N.C. 1 7 7 ALARM4 ALARM4 Load Load 37 37 N.C. 1 N.C. 1 27

SYJ300/500/700

8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

Title not found

Cable length (L)[m] 1 3 5 8 A B C (30.7) (16.6) (23.7) Connector A1 (12.7) (10.2) (5.6) (10.5) 1.5 3 5 8 (7.0) Connector C (14.2) (6.7) (5.7) Connector A2 3 2 1 (Terminal no.) 1 3 2 4 1 4 10 (13.5) AB 1 3 15 1 2 (18) 20 AB 15 16 (30.7) (11) L Produced upon receipt of order (14.7) (10) Connector D Connector B With lock and sensor Connector A1 terminal no. 1 2 3 Connector C terminal no. 1 2

Digital Flow Switches

2 1/8, 1/4 Note 1) The system accuracy when combined with PF2A3.

A

279 122 10 AMG650 1 12 388 160 10 AMG850 2 479 220 10 H O W T O O R D E R W AT E R S E P A R AT O R S E R I E S AMG AMG S U B-S TA N D A R D S P E C I F I C AT I O N S B O D Y S I Z E 150 1/8 Basis 250 1/4 Basis 350 3/8 Basis 450 1/2 Basis 550 3/4 Basis 650 1 Basis 850 1 1/2 Basis O P T I O N S Nil None B Bracket C NC Autodrain D NO Autodrain P O R T S I Z E 01 1/8 02 1/4 03 3/8 04 1/2 06

Digital Flow Switches, Series PF2A, Series PF2W

2 1/8, 1/4 Note 1) The system accuracy when combined with PF2A3.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Compatibility with the PFG300 digital flow monitor 0.01 0.02 0.05 1 2 0.1 0.3 0.5 5 10 20 25 50 100 150 200 300 500 600 1000 2000 3000 6000 12000 PF2M7(-L) 0.001 L/min 0.01 1 0.02 2 0.01 L/min 0.05 5 Dry air N2 Ar CO2 0.1 10 Thermal type (MEMS) 0.3 25 0.1 L/min 0.5 50 1 100 1 L/min 2 200 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min PFG300 10 1000 Bypass flow type 20 2000 PFMC

Electric Actuator / Guide rod Slider

Overhang direction:L3[mm] 250 250 600mm stroke L3 m 200 200 500mm or less 150 150 600mm stroke or less 100 100 50 50 0 0 0 1 2 3 4 5 0 1 2 3 4 5 Workload[kg] Workload[kg] 300 300 250 250 Overhang direction:L4[mm] L4 m Overhang direction:L4[mm] 600mm stroke 200 200 600mm stroke or less 500mm stroke or less 150 150 100 100 50 50 0 0 0 1 2 3 4 5 0 1 2 3 4 5 Workload[kg] Workload[kg] 500 500

Electric Actuator / Slider Type 《 AC Servo Motor 》

Table4-1.

PFxx-OMX0002

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Measurement diagnostics 0: Within range 1: Out of range (HHH) 14 Fixed output 0: Normal output 1: Fixed output (Setting of output check) 15 Error Diagnosis 0: Error not generated 1: Error generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow

Magnetically Coupled Rodless Cylinder

Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.