VZ3000

A E Push type A Push-locking type E Dimensions: Single Dimensions: VZ1120-G-M5-X1 Push type A (Push type A) Manual override Manual override (Non-locking) (Mounting hole for manifold) Push-locking type E (Piping port) Manual override (Push-locking type E) ( ) Pressing makes the valve operate.

Short Stroke Electric Actuator Series LX

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 59 F 5H9 +0.030 0 depth 5 29.5 D 4 4 6 6 E 60 90 90 90 F 30 60 60 60 G (50) (50) 100 100 Model LXFH5BD-25 LXFH5BD-50 LXFH5BD-75 LXFH5BD-100 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 6 Refer to page 299 for mounting. (11.5) 38 E Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Body Resin SYJ q (A) 2 Spool valve Aluminum/NBR w e r Pilot valve VK 1 (P) 3 (R) Port plug Resin/NBR VVQZ100-CP VZ VT VQZ200/300 VT Metal seal Rubber seal VP VG q r w e q r w e VP VQ VQZ N.C. N.C. VZ (A) 2 (A) 2 VS 1 (P) 3 (R) 1 (P) 3 (R) q r w e q r w e N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts No.

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

2 r y e !5 o !

V

THREE-PORT VALVES FIVE-PORT VALVES D I R E C T A C T I N G VT S E R I E S (S E E V A LV E S E C T I O N) V A C U U M V E R S I O N SY B O D Y P A R T E D (S E E V A LV E S E C T I O N) H O W T O O R D E R VT S E R I E S H O W T O O R D E R SY S E R I E S VT3 V Refer to series VT307/327 P O R T W AY SY 20 X20 S I Z E 07 17 25 S I Z E E N T E R A S S TA N D A R D P A R T F O R E X T E R N

%silltr

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

SMC Basic Pneumatics

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

3 Port Solenoid Valve

Single r w u e y i q !

XLAQ/XLDQ

Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66 79 C 1 1 2 2 D 12 11 11 E 30 40 55 75 F 17

Compact Cylinder with Air Cushion and Lock Series RLQ

Cylinder model C D Mounting bolt size RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 90 M5 x 90 L Mounting bolt CLJ2 95 M5 x 95 L 100 M5 x 100 L CLM2 110 M5 x 110 L 8 C Flat washer D 120 M5 x 120

RLQ

Bore size (mm) 32, 40 50, 63 T2 T1 M F E D B Part No.

REC

Bore size Stroke range Mounting hole REA 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 4 60 75 13 8 18 15.5 34 26 13 10 41 150 to 700 20 FX 25 4 60 75 17 10 22 19.5 40 32 13 10 45 150 to 700 26 REC 32 4 60 75 17 12 22 19.5 40 32 13 11 45 150 to1000 26 20, 25, 32 40 36 5 66 82 22 14 24 21 52 41 16 12.5 50 200 to1000 32 RHC NA S Z ZZ NN P H1 H2 I K MM N Bore size Stroke range 1 8 30 20 M20 X 1.5 146

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2 39.5 60 12 3.2 33.5 5.8 2 39.5 75 17 4.2 36.5 7.5 3 50 75 17 4.2 36.5 7.5 3 50 13-5-6 7 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Body Ported Type (Without silencer): ZH05D --to ZH15D --S L S L

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Non-locking push type Push-turn locking slotted type Push-turn locking lever type R port P, E port Note) Enter the cable length symbol in .

IZx-OMP0064

Power supply connector POWER Connector (e-con) IZS41, IZS42 7 8 12 13 9 1 2 3 4 5 10 11 14 6 Operation NO.

3

75 23.5 43 25.5 45 40 65 47.5 72.5 20 Extended M With arm CK CLK Retracted 25 20H7 (Arm side I.D

AC Servo Motor Driver (CC-Link Type ）

Negative response [E] [e] Command error Command not existing in the specifications was transmitted.

FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Cylinder with Turntable Series MGT

25st 50, 75, 100st Larger than 100st WA WB Bore size (mm) 63 80 100 X XA XB XC XL YY YL Z 52 52 72 50 54 47 38 42 35 128 128 148 28 28 48 24 28 11 88 92 85 8 10 10 6 7 7 5 6 6 80 100 124 4 5 5 20 24 28 M10 x 1.5 M12 x 1.75 M14 x 2.0 D-X (mm) MGTM (Slide bearing) MGTL (Ball bushing bearing) (mm) AA A E BD Bore size (mm) 63 80 100 AA A E DB Bore size (mm) 63 80 100 Individual -X 25, 50st Larger