High Vacuum Angle Valve

Auto switch: By applying pilot pressure from the pilot port P-1, the piston-coupled valve overcomes the operating force by the pressure, and the valve opens. (Pilot port P-2 is open.) Alternatively, by applying pilot pressure to pilot port P-2, the valve closes. (Pilot port P-1 is open.) The magnet activates the auto switch.

Vacuum Unit

, Description (Pressure Switch for Vacuum) p. 22 Pressure Switch for Vacuum with Energy Saving Function Specifications, Internal Circuit and Wiring Example p. 23 Port Layout Standard Products p. 24 Option -D p. 26 Option -L p. 29 Construction p. 31 Replacement Parts for Single Unit / How to Order p. 32 Exploded View of Manifold p. 33 Dimensions p. 35 Electrical Wiring Specifications

125

66.1 R 50 25 2 P=31 22.5 7.5 24 2 x Port 1(P): 1/4 L1 L2 67.5 Supply from both ends when there are 5 stations or more. 71.6 82.9 (Station n) (Station 1) VVEX2-1 (Internal pilot) 67.5 51.5 A A 37.5 VEX VEX 11 P=31 30 n x Port 2(A): 1/4 R P L Dimensions Formula: L1=31n+29, L2=31n+14 n: Stations Station L dimension 2 3 4 5 6 7 8 L1 91 122 153 184 215 246 277 L2 76 107 138 169 200 231 262 1735

Mechanically Jointed Rodless Cylinder Series MY2

MY1W Load mass kg MY2C MY2HT25 Horizontal impact: P = 0.5 MPa 2000 1500 MY2H H unit Impact speed mm/s MY3A MY3B 1000 L unit 500 400 300 MY3M Air cushion 200 100 1 2 3 4 5 10 20 50 40 30 m1 max. m2, m3 max. Load mass kg MY2HT40 Horizontal impact: P = 0.5 MPa 2000 1500 H unit Impact speed mm/s L unit 1000 500 400 300 Air cushion 200 1003 5 10 20 30 50 100 200 m1, m2, m3 max.

LVQ

LVQS P.526 Integral Fitting Type Flare Integral Fitting Type Manual Type Integral Fitting Type Hyper Fittings LQ1, LQ2 Series LVQH P.535 Manual Type Integral Fitting Type Space Saving/Space Saving Connection LQ1, LQ2 Series LVQHS P.539 Fittings and Special Tools P.544 Air Operated Type Flare Integral Fitting Type Hyper Fittings LQ3 Series LVQ-Z P.545 Air Operated Type Flare Integral Fitting

Vacuum Ejector Series ZM

(P) and individual air pressure supply port (P) can be mounted together.

ZP

(Male thread) Mounting Male thread Female thread Female thread Vacuum entry port Female thread Common Female thread Female thread Female thread P. 13-11-91 to 92 P. 13-11-86 to 88 P. 13-11-86 to 88 P. 13-11-89 to 90 P. 13-11-93 to 94 Buffer stroke Pad dia. 40 50 63 80 100 125 Buffer stroke (mm) 25 50 75 100 Pad Material and Characteristics : Little or no influence : Can be used depending

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

less No Z80 IC circuit P P Y59A Y69A P p P 3 wire (NPN) IC circuit 5V 12V Y7P Y7PV P p P 3 wire (PNP) IC circuit Y59B 12V Y69B P p P 2 wire Y7NW Y7NWV P p P 3 wire (NPN) 5V 12V Diagnostic indication (2 color indicator) IC circuit Y7PW Y7PWV P p P 3 wire (PNP) Relay, PLC Grommet Solid state switch Yes 24V Y7BW Y7BWV P p P Water resistant (2 color indicator) Y7BA p P 2 wire 12V P5DW Magnetic

Air Fittings & Tubing

P.2.1-49 M-5ALHU-4 Rc(PT)1/8 X M5 female M-5ER Gasket M-5ALHU-6 P.2.1-50 To seal M3 thread P.2.1-52 M-3G Hose nipple Manifold Rc(PT)1/8 can be diverted in up to 9, M5 stations, includes panel or bracket mounting 4/2.5 X M5 M-5H-4 For nylon, soft nylon, and polyurethane tube Rc(PT)1/8 X M5 female (9 stations) P.2.1-49 M-5M 6/4 X M5 M-5H-6 P.2.1-52 Series/Model Style Application Note P.2.1

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

LECSS2-S5 LECSS2-S7 LECSS2-S8 LECSS1-S5 LECSS1-S7 LECSS1-S8 Driver L1 L2 L3 Power supply Main circuit power supply 3-phase 200V to 230VAC, 50/60Hz L1L2L3 1-phase 200V to 230VAC, 50/60Hz L1 L2 1-phase 100V to 120VAC, 50/60Hz L1 L2 When using driver built-in regenerative resistor, connect P( ) and D.

LEC-OM02904

P-D P P C C G3 D (2) G4 5m 5m (1) 1.

MY1

4 40 100 1 2 3 4 5 10 20 30 40 50 0.5 Load mass (kg) Load mass (kg) 63 Horizontal collision: P = 0.5 MPa Shock absorber 2.

MY2

Load weight kg MY2HT25 Horizontal impact: P = 0.5MPa 2000 1500 H unit Impact speed mm/s 1000 L unit 500 400 300 Air cushion 200 100 1 2 3 4 5 10 20 50 40 30 m1 max. m1, m2, m3 max. Load weight kg MY2HT40 Horizontal impact: P = 0.5MPa 2000 1500 H unit Impact speed mm/s L unit 1000 500 400 300 Air cushion 200 1003 5 10 20 30 50 100 200 m1, m2, m3 max.

Large Size Vacuum Module: Series ZR

ZS-10-5A-50 . 1 pc.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY3A MY3B MY3M MY1 Series Variations Bore size (mm) Series Page 16 20 25 32 40 50 63 80 100 10 P.1188 MY1B P.1233 MY1B P.1257 MY1M P.1277 MY1C MY1H P.1201 MY1H End lock MY1H P.1297 MY1H End lock DP.1319 MY1HT -X P.1339 MY1W Technical Data 1203 MY1H Series Prior to Use Maximum Allowable Moment/Maximum Load Mass Maximum allowable moment (Nm) Maximum load mass (kg) m1 Bore size (mm) Model M1

Water-cooledThermo-chiller

50 or less Chloride ion (Cl) [mg/L] 50 or less Sulfuric acid ion (SO42) p p p p p [mg/L] 50 or less Acid consumption amount (at pH4.8) [mg/L] 70 or less Total hardness 1.Thoroughly read the Operation Manual.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

/10mm stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 13 140 18.5 39 51.5 118 136.5 5 12.5 20 22 40 43 13 13 137 15.5 36 50 115 13 133.5 12.5 52.5 50 48.5 ZPT25F10-0-A14 ZPT50F10-0-A14 141 19.5 40 119 137.5 6 13.5 25 28 50 53 ZPT32F10-0-A14 135.5 16 36.5 115.5 134 13 32 35 49 Additional dimensions by stroke(mm

PF2A/PF2W

Unit switching Real-time switch output ( ) ZSE ISE For Air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON PSE YES CFM x 102, CFM x 101 ft3 x 101 OFF P-1 P-2 High flow rate Z I SE3 CFM = ft3/min P Window comparator mode H: Hysteresis High Flow Rate Type (For Air) PS H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON Z I SE1 2 NO OFF P-1 P-

Prevents Micro-Bubbles

Single type Suck back P P P VN A B A B Unit Single type Unit LVC Manifold (5 stations max.) LVA LVH A R P 3 port N.C. PA LVD N.C.

Vacuum Pad: Ball Joint Type

: 20 to 50 mm Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR Dimensions: 10 mm Strokes Dimensions: 10 mm Strokes (mm) (mm) Q: 6 Q: 8 Q: 6 Q: 8 A B C D F H I J K P A B C D F H I J K P K P Y XT661 Model Model K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 1 18 136.5 13 1 40 5 1 2.5 20 22 40 43 13 15.5 36 48.5 50 1 15 13 1 33.5 13 1 37 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 1 19 137.5 141 6