V 136 152 168 184 L3 50 72 88 104 120 136 168 168 184 200 EXHAUST ADAPTOR LOCATION B .Both Ends Courtesy of Steven Engineering, Inc. !
.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2 Bellows 60 30 0 60 30 0 Time (minutes) Time (minutes) Valve F=(1.8xC
0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load (N) Load (N) Load (N) 3.11-8 Air Slide Table Series MXS Table defection by pitch moment Table deflection by yaw moment Table deflection by roll moment Table pitch deflection due to static pitch moment applied at arrow for fully extended stroke of slide table Table yaw deflection due to static yaw moment applied at arrow for fully extended
40 3 position 28-1co (2-7kgl / cm,) Ambient and fluid temperature Max.120"F(50"C) Lubrication Not required 1 0 2 0 3 0 4 0 5 0 6 0 7 0 Mounting position Free Supply 0ressure [PSl] 15G/3C. (8s^,roooll, 1rp""YMl""tb" *"i"t.
Max.120'F(50'C) 2position : 20 ms or less 3position : 50 ms or less (70 PSI) Operating pressute range Ambient and fluid temPerature Flesponse time Max.
40 3 position 28-1co (2-7kgl / cm,) Ambient and fluid temperature Max.120"F(50"C) Lubrication Not required 1 0 2 0 3 0 4 0 5 0 6 0 7 0 Mounting position Free Supply 0ressure [PSl] 15G/3C. (8s^,roooll, 1rp""YMl""tb" *"i"t.
tube extension 615 PAF Series Dimensions: Air Operated Type (PAF5000 Series) With nut (with LQ1 fittings): PAF5413S-1S19 1S25 10 204 255 120 4 x 9 AIR SUP (P1) Rc, NPT, G 1/4" FLUID OUT With nut 249 A 8 8 195 157 118 91 51 18 FLUID IN With nut AIR SUP (P2) Rc, NPT, G 1/4" Tube Size Applicable for Nut Size (Tube size can be altered, using a reducer even within the same nut size.)
140 180 200 13 + 0.2 S 40 35 10 23 10 10 30 23 140 170 210 250 315 385 26 + 0.2 S 745 100 70 23 30 23 25 47 35 335 340 380 450 490 655 43 + 0.2 S 1250 1400 160 105 40 53 40 45 75 60 605 610 670 735 835 1000 55 + 0.2 S 2350 2650 2900 310 130 65 120 65 80 170 115 1100 1100 1100 1200 1400 1750 166 + 0.5 S 3450 4300 4700 560 200 110 140 110 130 220 180 1750 1750 1750 1950 2400 2750 240 +
115 110 85 60 25 70 1 15 2 (On different faces or same face) 15 120 115 110 85 60 25 70 D-F5/J5 1 10 2 (On different faces or same face) 15 130 125 120 95 70 25 75 D-F5NTL 1 10 D-F5W D-J59W D-F5BAL D-F5F D-F5LF 2 (On different faces or same face) 15 130 125 120 90 70 25 75 10 1 1.12-14
Dimensions Formula L1 = 16n + 29, L2 = 16n + 40 n: Station (Maximum 16 stations) n L 1 2 77 88 150 160.5 3 93 104 175 185.5 4 109 120 187.5 198 5 125 136 200 210.5 6 141 152 225 235.5 7 157 168 237.5 248 8 173 184 250 260.5 9 189 200 262.5 273 10 205 216 287.5 298 11 221 232 300 310.5 12 237 248 312.5 323 13 253 264 337.5 348 14 269 280 350 360.5 15 285 296 362.5 373 16 L1 L2 L3 L4 45 56
K (Terminal with indicator light: DL) Pilot port 12(P1), 10(P2) L (Conduit terminal: T) Manual override (Non-locking push type) J (DIN terminal: D) I (Conduit: C) H (Grommet: G) G (Air operated) Main port (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Note) K L M Model VNA5-32A VNA6-40A VNA7-50A 1 8 1 4 1 4 1 4 1 105 120
Mounting Bolt for C55 Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt M8 x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 105 l x 110 l x 120 l x 140 l x 160 l M4 x 45 l x 50 l x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l M5 x 55 l x 60 l x 65 l x 70 l x 75 l x 80 l x 85 l x 90 l x 95 l x 100 l x 110 l x 130 l x 150 l 70 75 80 85 90 95 100 105 110 120
Impact acceleration [m/s2] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration 120 in vacuum environments (1.3 x 104 Pa) low leakage, and low outgassing.
0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load (N) Load (N) Load (N) 56 Air Slide Table Series MXS The graphs below show the table displacement when the static moment load is applied to the table.
The spacing of the side support must be no more than the values shown in the graphs at right. 200 200 190 190 (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) (2400) 130 130 l (1800) (1800) (1800) 120 120 Weight m (kg) Weight m (kg) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) 90 90 (1500) (1500) (1500) MY1CW63 MY1CW63 m 80 80
40 3 position 28-1co (2-7kgl / cm,) Ambient and fluid temperature Max.120"F(50"C) Lubrication Not required 1 0 2 0 3 0 4 0 5 0 6 0 7 0 Mounting position Free Supply 0ressure [PSl] 15G/3C. (8s^,roooll, 1rp""YMl""tb" *"i"t.
Max.120'F(50'C) 2position : 20 ms or less 3position : 50 ms or less (70 PSI) Operating pressute range Ambient and fluid temPerature Flesponse time Max.
.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2 Bellows 60 30 0 60 30 0 Time (minutes) Time (minutes) Valve F=(1.8xC
Page 120 Options With Caster Adjuster-foot . Page 111 With Earth Leakage Breaker . Page 111 With Earth Leakage Breaker with Handle . Page 111 With Fluid Fill Port .
When the source pressure is 1700 psig (11.7 MPa), achievable delivery pressure is around 125 psig (0.86 MPa ) (HF and FC option 120 psig (0.83 MPa)). 2) 250 psig outlet pressure preset at 800 psig (5.5MPa) inlet pressure. Custom inlet/outlet pressure settings available. Please contact SMC. 3) 14 to 194F (10 to 90C) for Vespel seat.