VCC

122.2 <124.2> 100 22.6 100 120 80 25 75 50 n 1 0 8 6 4 2 50 67.5 <69.5> L1 8 67.5 <69.5> 64.9 L2 4 x 9 (for M8 mounting) 3 port valve 2 port valve 64.9 50 8 10.5 Leakage detection port Pilot port C4: 4 One-touch fitting C6: 6 One-touch fitting G1/4 (RETURN port) G1/4 (IN port) 30 31 0.5 to 2 0.5 to 2 10 10 0.5 to 2 0.5 to 2 n-1 5 3 1 1 2 VNA 122.2 <124.2> 142.2 <144.2> VNB 22.6 100 120 80

Soft Start-up Valve AV2000/3000/4000/5000 1

How to Find the Flow Rate (At air temperature of 20C) Choke flow: (P2 + 0.1)/(P1 + 0.1) ) 0.5 293 273 + t Q = 120 x S x (P1 + 0.1) x Subsonic flow: when (P2 + 0.1)/(P1 + 0.1) > 0.5 Q = 240 x S x (P1 P2)(P2 + 0.1) x 293 273 + t Q: Air flow rate [ /min (ANR)] S: Effective area (mm2) P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] t: Air temperature [C] Note 1) Formulas above are

PF2A/PF2W

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com OUT2 2 + Load ZSP 3 Blue 12 to 24 VDC 73 42 ISA2 PF2W7--67(-M) IS 4 Connector pin numbers ZSM 4 3 2-3.4 43 PF2 Flow direction IF L dimension 100 106 Model PF2W704 PF2W720 2 1 Data Pin description DC (+) OUT2 DC () OUT1 Pin no. 1 2 3 4 PF2W740 120 60

V

136 152 168 L3 16 32 48 64 80 96 112 128 144 L4 8 24 40 56 72 88 104 120 136 Courtesy of Steven Engineering, Inc. !

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Left Right VAC. port Common EXH port 2-Rc 1/2, 3/4 (mm) L1 1 Stations L 28 1.5 40 1.5 56 1.5 4 76 1.5 88 1.5 104 1.5 5 92 1.5 104 1.5 120 1.5 6 108 2.0 120 2.0 136 2.0 7 124 2.0 136 2.0 152 2.0 8 140 2.0 152 2.0 168 2.0 9 156 2.0 168 2.0 184 2.0 10 2 44 1.5 56 1.5 72 1.5 3 60 1.5 72 1.5 88 1.5 172 2.0 184 2.0 200 2.0 L2 L3 13-4-15 15 Series ZM Manifold

ZMA

VAC. port Silencer dedicated for manifold (mm) L1 1 Stations L 28 1.5 40 1.5 72 1.5 10 3 60 1.5 72 1.5 104 1.5 4 76 1.5 88 1.5 120 1.5 5 92 1.5 104 1.5 136 1.5 6 108 2.0 120 2.0 152 2.0 7 124 2.0 136 2.0 168 2.0 8 140 2.0 152 2.0 184 2.0 9 156 2.0 168 2.0 200 2.0 2 44 1.5 56 1.5 88 1.5 172 2.0 184 2.0 216 2.0 L2 L3 13-4-31

ZPT/ZPX

(Reference value) ZF Model Dia. of cylindrical workpiece which can be absorbed: A (1) ZP 40HB 80 or more ZP 50HB 100 or more ZCU 63HB 120 or more 80HB 160 or more AMJ 100HB 180 or more 125HB 230 or more Misc. Please consult with SMC when requiring a diameter smaller than shown in table.

%silltr

v=l t P"p1 + 147 Where V = capacity of rceiver Q = compressor outpul (clm) Pa = atmosphric plsssurc P1 = compressor outsul pressure V = (600'14.7y(10O+14.7) =77lf as a minimum number, a prudent suggestion might begin with 120 ft".

51

NA P ZZ Z RR S TE TF TH TT TV TW TX TY TZ CA2 20 25 32 40 50 63 112 120 129 141 176 186 91 99 105 113 144 149 Up to 200 CD-G02 CD-G25 CD-G03 CD-G04 CD-G05 CD-G06 24 29 35.5 44 55 69 M5 x 0.8 M5 x 0.8 Rc1/8 Rc1/8 Rc1/4 Rc1/4 11 13 15 18 20 22 57 60 62 62 84 84 10 10 10 10 20 20 5.5 5.5 6.6 6.6 9 11 25 30 35 40 50 60 3.2 3.2 4.5 4.5 6 8 (35.8) (39.8) (49.4) (58.4) (72.4) (90.4) 42 42 48 56

SMC Pneumatic Clean Series

LD 4 4 4 4 LC 3 3 3 3 LT 30 25 22 20 LH 51 53 53 53 LS Z 135 125.5 123.5 118 ZZ 16.5 16 15 15 X 8.5 8 7 7 Y 4 3.5 3.5 3 M B 54 44 36 32 LX 10 10 10 10 W 71 58 49 44 LZ Bore size 63.5 53 52 47 54.5 45 38.5 34 40 32 25 20 50 63 80 100 4.5 4.5 4.5 6 17.5 17.5 20 20 75.5 75.5 95 95 157.5 157.5 188.5 192 55 55 60 60 10 12 11 14 5 5 6 6 40 45 55 65 22 22 28.5 30 11 13 14 16 5 5 5 7 66 82 100 120

Micro Mechanical Valve Series VM1000

Application Weight (g) Actuator Model Polyacetal roller 120 160 170 170 180 200 200 200 190 Basic VZM450-01-00 Mechanical operation Manual operation VM-08C VM-06CS VM-06C VM-05C VM-02CS VM-02C VM-01CS VM-01C Roller lever VZM450-01-01 VZM450-01-01S Hard steel roller VZM450-01-02 VZM450-01-02S Polyacetal roller Hard steel roller One way roller lever Straight plunger VZM450-01-05 Polyacetal

REA/REB

5.6 10 10 50 90 86 10 M10 x 1.0 Rc 1/8 M6 x 1.0 31 10 M6 x 1.0 11 100 130 10 60 10 86 7 Rc 1/8 M8 x 1.25 M6 x 1.0 M14 x 1.5 10 39 160 9.2 12 11.5 70 120 100 15 M20 x 1.5 Rc 1/8 M8 x 1.25 47.5 17 M10 x 1.5 10.5 140 190 12 90 15 136 9.2 Rc 1/4 M10 x 1.5 M8 x 1.25 M20 x 1.5 14 56 PA dimensions are for split from center.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N 11-9-9 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 11-9-10 11 Rotary Table: Basic Type/High Precision Type Rack & Pinion Style Series MSQ Size: 1, 2

REA/REB

10 50 10 86 5.6 Rc 1/8 M6 x 1.0 M6 x 1.0 M10 x 1.0 10 31 130 7 10 11 60 100 86 10 M14 x 1.5 Rc 1/8 M6 x 1.0 39 10 M8 x 1.25 11.5 120 160 12 70 15 100 9.2 Rc 1/8 M10 x 1.5 M8 x 1.25 M20 x 1.5 17 47.5 190 9.2 12 10.5 90 140 136 15 M20 x 1.5 Rc 1/4 M8 x 1.25 56 14 M10 x 1.5 PA dimensions are for split from center.

CXWM/CXWL

258-9200-www.stevenengineering.com CX 2-Rc 1/8 Cylinder port D-X 20Data 2-M6 x 1.0 thread depth 7 2 x 2-M8 x 1.25 thread depth 15 4-6.9 through 4-11 counterbore depth 7 2 x 2-8H7 depth 12 +0.015 0 2-RB1411-X552 shock absorber (mm) L P Q S SS Z ZZ Model CXWM32-75 CXWM32-100 CXWM32-125 CXWM32-150 CXWM32-175 CXWM32-200 263 223 146 77 243 70 90 313 273 171 102 293 95 115 363 323 196 127 343 120

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 RB1412 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

MLGP

Bore size (mm) c e b d a 40 50 63 5.5 7.5 10 11 13.5 18.5 10.5 13.5 17.8 4 4.5 7 6.5 8.5 11 b a c d e Common Dimensions: MVGPM/MVGPL Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA ID IE IH J K L IB 52 64 77 40 46 58 M6 27 32 39 34 35 38 11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64

MXF

.) 220 188 157 126 94 63 OUT 314 20 10 165 142 118 94 71 47 IN 236 Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Symbol Specifications -X42 Anti-corrosive specifications for guide unit Standard Stroke Standard stroke (mm) Model MXF8 10, 20, 30 MXF12 20, 30, 50 MXF16 30, 50, 75 MXF20 30, 50, 75, 100 Weight (g) Standard stroke (mm) Model 100 75 50 30 20 10 MXF8 170 130 120

Ionizer Nozzle type IZN10 Series IZS

(load current at 40 mA) Error signal Output signal Maintenance detection signal Effective static neutralization distance 20 mm to 500 mm 0 to 55C Ambient and fluid temperature Ambient humidity 35 to 65%Rh Housing: ABS, Stainless steel Nozzle: Stainless steel Emitter: Tungsten Material Vibration resistance Durability: 50 Hz, Amplitude: 1 mm, XYZ each 2 hours Impact resistance 10 G Weight 120

Dedicated Controller

For ordering information, refer to the option part numbers on page 82. 74 3 Controller Series LC1 Performance/Specifications General specifications Model LC1-1H1 LC1-1H2 Item 100/110V AC 10%, 50/60Hz (100V AC, 50/60Hz for LC1-1HV1) 200/220V AC 10%, 50/60Hz (200V AC 10% for LC1-1H32) (200V AC, 50/60Hz for LC1-1HV2) Power supply Leakage current 5mA or less Dimensions 80 x 120 x 244mm Weight