VCC

Fluid temperature 5 to 50 (C) Ambient temperature 5 to 50 Lubrication Not possible (Initial lubricant: White vaseline is used.)

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D-859W D-B53, D-A53 0-A64. D-864 surgeabsolber D.A54, D-854, D-A44(C), D-A34(C) D-467 Feed switch D-A33(C) Solid State Type Internal Circuit D-F59, D-G59, D-G39(C) D-FsPW D-GsPW o Lalch typ d agnos s oinput Biue o D-FsP, D-GsP D.FsBAL, D.GsBAL, D-K59W, D-J59W D-F5NTL, D-GsNTL @ D-J59, D-K59, D-K39(C) ffit*' iffil.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Y Motorless LAT LZ LC3F2 129 LEJ Series AC Servo Motor Clean Room Specification Table Accuracy (Reference Value) A side B side Model Traveling parallelism [mm] (Every 300 mm) q C side traveling parallelism to A side w D side traveling parallelism to B side D side w q LEJl40 0.05 0.03 C side LEJl63 0.05 0.03 Note) Traveling parallelism does not include the mounting surface accuracy.

Air Cylinder CLA Series Fine Lock Model

D-859W D-B53, D-A53 0-A64. D-864 surgeabsolber D.A54, D-854, D-A44(C), D-A34(C) D-467 Feed switch D-A33(C) Solid State Type Internal Circuit D-F59, D-G59, D-G39(C) D-FsPW D-GsPW o Lalch typ d agnos s oinput Biue o D-FsP, D-GsP D.FsBAL, D.GsBAL, D-K59W, D-J59W D-F5NTL, D-GsNTL @ D-J59, D-K59, D-K39(C) ffit*' iffil.

SQ1000/2000

Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves A B C A B C A B C A B C A B C SQ 1 1 4 1 C6 5 L A B C D E F G H I Series SQ1000 Switching type Electrical entry A E 1 2 3 4 5 A B C L type plug connector with lead wire L 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure

ZPT/ZPX

N S NBR Silicon rubber 40 50 40 50 57 86 160 224 Pad type 63 63 80 80 U Urethane rubber H Heavy duty F Fluoro rubber 100 100 E EPR Add NBR weight to the table on the right for other materials. 125 125 Dimensions ZP H 40 50 ZP H 63 80 ZP H 100 125 (mm) (mm) (mm) Model A 63 ZP63H B 65 80 ZP80H 82 C 14.5 16.5 D 50 61 Y 3.5 4.5 B 42 50 ZP50H 52 Model A 40 ZP40H C 32 42 Model A 100 ZP100H B 103

MXW

D-A9V 10 6 6 8.5 10 D-M9 D-F9W D-M9V D-F9WV 5.5 (4) 3 (2) 3 (3) 4 (3) 6 (4) Interference Note) Figures in parentheses are the case for D-M9, D-M9V switch types.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B, C common view) Misc.

Industrial Filters

Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4). 108 108 AIR VENT M6 x P1 G1/2 AIR VENT M6 x P1 2 x RcD 2 x RcD C B A B OUT IN OUT IN C A DRAIN G1/4 DRAIN G1/4 (mm) (mm) A B D C A B D C Model Element length Model Element length A (L250) A (L250) 314 70 374 314 70 407 FGDC FGDE FGDC FGDE B (L500) B (L500)

VNB

VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other 1 2 3 4 5 6 7 9 Coil rated voltage 1 2 3 4 5 6 7 9 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Electrical entry G C TNote) D DL Option Electrical entry/With indicator light/ surge voltage suppressor Grommet Conduit Conduit terminal DIN terminal DIN terminal with

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Mounting same side MGC D-C7 D-C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C 50+45(n2) 50 15 10 15+45( n2 ) (n=2, 4, 6) MGF 2 60+45(n2) 60 15 10 CY1 15+50( n2 ) (n=2, 4, 6) MY1 2 65 15 10 65+50(n2) 20+50( n2 ) (n=2, 4, 6) 2 65 20 D-H7LF 10 15+50( n2 ) (n=2, 4, 6) 2 D-B5/B6 D-G5NTL 10 75 15 75+55(n2) 20+50( n2 ) (n=2, 4, 6) 2 15 75 20 D-B59W D-A3A D-G39A D-K39A D-A44A 10 100+100(n2) 35+30

Single Axis Electric Actuator Serriies LJ1S Slider Guide

A B C D Switch Internal Circuit Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

LG1H

A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4sec.)

IDX-OM-W011

2A ( 20V / 5m A) 143 O N 3 ( ) 5 /1 ( ) I D F Seri es 141 14 1 I D XO M W 011 14 T 144 PE 1 2 3 LN PE PE: L N: LN PE M 3 6. 5m m 1. 25m m 2 ( ) ( ) I D F Seri es 144 14 2 I D XO M W 011 14 T 145 I D F4E8E10T I D F4E8E20T I D F11E20T AC100/100,110V (50/60Hz) PE N L 1 2 AC200/200,220V (50/60Hz) PE N L 1 2 TB 3 TB 3 TDR MC TDR MC TDR ILS TDR ILS MC MC OLR OLR MC MC CM MC

CXWM/CXWL

(mm) Auto switch model Hw 23 Ht 15 Hv 10.5 D-A7, D-A80 D-F7, D-J79, D-J79W, D-F7W, D-F79F, D-F7BAL, D-F7NTL D-A7H, D-A80H D-A73C, D-A80C D-F7V, D-F7WV, D-F7BAV D-J79C 23 15 10 22 23 23 24 15 17.5 15 17.5 9 17.5 14 16 Note 2) 2 magnets for auto switches are installed in the housing. 8-26-16 15 Series CXWM Slide Unit: Build-in Shock Absorber Slide Bearing Type 16 Basic Type: CXWM16Stroke/50

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

Lead wire length indication Note 1) Applicable auto switch with 5 m lead wire (Z) Reed switch: D-B53/B54, DC73(C)/C80C, D-A73(C)(H)/ A80C, D-A53/A54, D-Z73, D90/97/90A/93A Solid state switch: Manufactured upon receipt of order as standard.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

Lead wire length indication Note 1) Applicable auto switch with 5 m lead wire (Z) Reed switch: D-B53/B54, DC73(C)/C80C, D-A73(C)(H)/ A80C, D-A53/A54, D-Z73, D90/97/90A/93A Solid state switch: Manufactured upon receipt of order as standard.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com I HR CX D D-X 2 x 4-J 20E MB Data MA KA MC C NB N K B S + Stroke H ZZ + Stroke (mm) Stroke range Bore size (mm) H HR I J K KA LL LM B D C DL E GA GB 40 50 63 Up to 1000 Up to 1000 Up to 1000 40 45 50 57.5 63.5 69 78 92 110 M6

MTS

0 (15) 25 D-M9, D-M9V 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-F9W, D-F9WV 15 (17) 0 0 40 50 (57) 32 47 (49) 10 (17) D-A9, D-A9V 0 (15) 0 0 50 50 (61) 38 38 (53) 0 (11) 32 D-M9, D-M9V 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-F9W, D-F9WV 10 (17) 0 0 50 55 (63) 38 48 (55) 5 (13) D-A9, D-A9V 0 (15) 0 0 54 54 (64) 48 48 (63) 0 (10) 40 D-M9, D-M9V 10 (17) 0 0 54 59 (66) 48 58 (65) 5 (12)

Soft Start-up Valve

B Pressure gauge (Option) 2(A) 1(P) 37.5 Bracket (Option) T M N P X Built-in silencer (Option) 3(R) Q S L K R AV5000-A Flow adjustment needle at low speed air supply D D [mm] 4 x W 2 x W Body size Coil type B Y 20 AC 85 V Y DC 83 30 AC 85 DC 83 U H 40 AC 95 DC 93 50 AC 98 H DC 96 U Dimensions [mm] Standard specifications Port size A C D E G H J 1(P) 2(A) 3(R) AV2000-m02-1 to 4G(Z)m-A 1/4