Digital Flow Switch

0 L/min C*2 D Voltage output (0 to 10 V)*1*3 0 V 0.1 V 10 V Model Minimum value of rated flow range*4 Maximum value of rated flow range PF3A703H 30 L/min 3000 L/min PF3A706H 60 L/min 6000 L/min PF3A712H 120 L/min 12000 L/min A C 0 0 *1 Analog output accuracy is within 3% F.S. *2 A and C will change according to the setting of the zero cut function. *3 The analog output current from the

Sine Rodless Cylinder Series REA

ZZ + Stroke Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 100 38 66 72.2 26 122 69 0 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 Mounting nuts/2pcs. packaged with each cylinder d C H d B C Part No.

air-filter-e

Symbol Element length Element length L500 (L250 x 2) L750 (L250 x 3) L1000 (L250 x 4) Symbol Element seal material Note 1) B C D Element seal material Non-asbestos Fluororesin NBR FKM A Note 2) T N V Symbol Port size Note 1) Not used with fiber elements.

Air Preparation Equipment

Symbol Element length Element length L500 (L250 x 2) L750 (L250 x 3) L1000 (L250 x 4) Symbol Element seal material Note 1) B C D Element seal material Non-asbestos Fluororesin NBR FKM A Note 2) T N V Symbol Port size Note 1) Not used with fiber elements.

MGZ Series

500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 3 Direct Operated 2 Port for Air Series VCA Dimensions Grommet: G Conduit: C Approx. 300 Approx. 280 Q F D Q F D G1/2 C R C R L IN E E Manual override A B B A 2-P Port size 2-P Port size Manual override 2 L K 2-M Thread depth 6 2-M Thread depth 6 K DIN connector: D Conduit terminal: T F F (Q) Q S 34

Soft Start-up Valve

VAC]*1 V V V V 4 220 VAC [230 VAC]*1 V V V V AC (50/60 Hz) t d Rated coil voltage DC 5 24 VDC V V V V 6 12 VDC V V V V + G Grommet (Lead wire length: 300 mm) V V V V D Type D (DIN terminal/With connector) V V V V Y Type Y (DIN terminal/With connector)*2 V V V V DO Type D (DIN terminal/Without connector) V V V V YO Type Y (DIN terminal/Without connector) V V V V + y e Electrical entry u f

AC Servo Motor Driver (CC-Link Type)

(One station of programmable driver remote device station) (c) Max. number of connected units: 42 Note that the following conditions must be satisfied. {(1 a) (2 b) (3 c) (4 d)} 64 a: Number of 1-station occupying units b: Number of 2-station occupying units c: Number of 3-station occupying units (not available for LECSC-) d: Number of 4-station occupying units (not available for LECSC-)

Possible to transfer a workpiece at low-speed.

A33 A34 A43 A34 A37 C 7 C 7 C12 C11 C12 -X 6 -X 6 Chart 3, 4, 5 Chart 3, 4 Chart 4, 5 Combination is available only when all the conditions are fulfilled among the nation chart above.

VM

Output 1 Output 2 A B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9

Flow Control Equipment

When it reaches B, the head pressure (PH) rises quickly as indicated by the line from C to D. Therefore, there is no time loss associated with the pressure transmission lag indicated by the line from C to E, as in the case of meter-in control that is effected through the use of a speed controller.

Magnet: Built-in Magnet, Mounting: Rod Flange, Tube Material: Aluminum Tube, Bore Size: 100mm, Thread: NPT, Stroke: 300mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: M9PV--Solid State, Gen. Purpose, 3 Wire PNP, Vertical, Lead Wire or Prewired Connector: 0.5m Cord Length, M12-4 Pin Connector, Number: -, Made to Order: -

Magnet: D (Built-in Magnet), Mounting: F (Rod Flange), Tube Material: Aluminum Tube, Bore Size: 100mm, Thread: TN (NPT), Stroke: 300mm, Bellows/Cushion: Cushion Both Sides, Auto Switch: M9PV--Solid State, Gen. Purpose, 3 Wire PNP, Vertical, Lead Wire or Prewired Connector: SDPC (0.5m Cord Length, M12-4 Pin Connector)

VCA

VCA20-12-1A 41 52 30 40 4.5 6 VCA30-12-1A 48 56 36 44 5.5 7 VCA40-12-1A 50 62 38 50 5.5 7 2 mounting screws (for mounting brackets) are included in bracket part no. 17-2-12 7 Series VCA Direct Operated 2 Port Solenoid Valve For Air Dimensions Grommet: G Conduit: C Q F D Q F 300 280 D VC G1/2 C R C R L VDW IN E E VQ Manual override A B B A 2-P Port size 2-P Port size VX2 VX Manual override

PF-OMM0004_C

[F 2] OUT2 c()F( oF)() -40No.PF-OMM0004-D -41No.PF-OMM0004-D [F 3] [F 3] [RES] [F3] 7 s -42No.PF-OMM0004-D [F10] OUT1 OUT2 OUT1 OUT2 OFF [F10] [SUb] [F10] -43No.PF-OMM0004-D -44No.PF-OMM0004-D 9L 3 1.5s6 3s 9L [9] [F30] 1S =0 =0 [F20]45 9L 3 1.5s6 3s 9L 6 0 [0] [F30] 1S = = [F20]45 -45No.PF-OMM0004-D == 1 / ,/ ([F20](47 )) (53 )[F82] c () -46No.PF-OMM0004-D [F20

MHL2

B C D E F G H 148 206 246 Model MHL2-40D MHL2-40D1 MHL2-40D2 80 138 178 188 246 286 288 406 486 116 174 214 348 466 546 72 130 170 12-4-13

Support Guide/11-LEFG Series

side LER w LEFG32 (L = 30 mm) Displacement [mm] 0.06 LEFG25 (L = 25 mm) D side LEH LEFG16 (L = 20 mm) 0.04 LEY -X5 Model Traveling parallelism [mm] (Every 300 mm) LEFG40 (L = 37 mm) q C side traveling parallelism to A side w D side traveling parallelism to B side 11LEFS 0.02 LEFG16 0.05 0.03 LEFG25 0.05 0.03 11LEJS LEFG32 0.05 0.03 0 0 100 200 300 400 500 25ALEFG40 0.05 0.03 Load W [N] Note

Series VCL

Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

ends a w t o u i Resin materials eliminated Laser marking is employed for the model designation. d t o o g e a n L c 2 s u s d Particulate generation has been reduced at the stroke ends by reducing impact using a sine cushion and by stopping the stroke using an internal stopper. i e Reduction of outgassing due to surface treatment n Impact acceleration [m/s2] o u d t R g g e a c 1 s u s

MTS

-X 20Hv Data Proper Auto Switch Mounting Position Solid state switch Bore size (mm) 2-color indication solid state switch Reed switch D-A9 D-A9V D-M9 D-M9V D-F8 D-F9W A B Hv D-F9WV A B C A B Hv A B C A B Hv A B Hv A B C 36 25 16 36 25 15 32 21 20 32 21 17.5 18 7 25 32 21 20 32 21 17.5 8 Auto Switch Mounting Stroke for 8 Stroke (mm) Note Applicable auto switch Mounting condition Piping direction