Manifold Specifications

VQ7 C4 C6 VZ3000-50A-1Manifold block assembly q (a) Bolt (Both sides) EVS For D side, With D-sub connector and P/R port with One-touch fitting for 8 SUP/EXH block assembly VZ3000-51A-1D w D side For U side, With D-sub connector and P/R port with One-touch fitting for 8 For D side, set with w VFN SUP/EXH block assembly VZ3000-51A-1U e DIN rail End block assembly VZ3000-52A-2D r VZ3000-52A-

VZ100/300/500

R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(mm) Bore size D-A9, D-A9V D-M9, D-M9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum Stroke for Auto Switch Mounting (2 pcs.)

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(mm) Bore size D-A9, D-A9V D-M9, D-M9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum Stroke for Auto Switch Mounting (2 pcs.)

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(same side) D-Z73, Z76, Z80 Reed switch 1 pc., 2 pcs. (different sides) 20 2 pcs. (same side) 60 D-Y59A(B), Y69A(B) Y7P(V) 1 pc., 2 pcs. (different sides) 20 2 pcs. (same side) 70 D-Y7NW(V), Y7PW(V) Y7BW(V) Solid state switch 1 pc., 2 pcs. (different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Size: 10 to 200 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed switch Solid state switch D-M9 D-M9V, D-F9W, D-F9WV, D-F9BAL D-A9, D-A9V Rotation Size Operating angle m Operating angle m Operating angle m Hysteresis angle A Hysteresis angle Hysteresis angle A B B B A 10 10 10 10 10 10 10 90 80 65 50 45

A-HEC-OM-J004

/humidity Ambient air quality Liquid Tank W 200 H 332 D 207mm(excluding protrusion) Dimensions Controller W 250 H 180 D 340mm(excluding protrusion) Liquid Tank Approx. 8.5kg (Empty) Weight Controller Approx. 6.5kg Connection cable DC cable, Signal cable: 3m each Accessory cable Power supply cable: 2m 7.2 Specifications 7-2 A_HEC-OM-J004-4 Chapter 7 Appendix Note 1) Differs depending on

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Basic Type ZX ZR (a) Full system (b) 3 port valve selection ZM ZH ZU ZL ZY ZQ (c) Switching on the vacuum side (d) Centralized exhaust type ZF Exhaust pipe with enough capability ZP ZCU AMJ Misc. EXH Diagrams (a) to (d) show the combination with peripherals. 13-5-9 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

Intrinsically Safe Valve

Electrical entry TT is approved for Class I, II, III, Division 1, Groups A, B, C, D, E, F, G. Electrical entry L and LL is approved for Class I, Division 1, Groups A, B, C, D. 4.

Magnet: D (Built-in), Style: Air Pressure Style, Mounting: FZ (Boss-cut Flange), Bore Size: 40mm, Stroke: 100mm, Rod Boot: None, Lock Style: P (Pneumatic Lock (Pressure Lock)

Magnet: D (Built-in), Style: Air Pressure Style, Mounting: FZ (Boss-cut Flange), Bore Size: 40mm, Stroke: 100mm, Rod Boot: None, Lock Style: E (Spring Lock (Exhaust Lock))

Magnet: D (Built-in), Style: Air Pressure Style, Mounting: FZ (Boss-cut Flange), Bore Size: 40mm, Stroke: 350mm, Rod Boot: None, Lock Style: E (Spring Lock (Exhaust Lock))

Magnet: D (Built-in), Style: Air Pressure Style, Mounting: FZ (Boss-cut Flange), Bore Size: 40mm, Stroke: 150mm, Rod Boot: None, Lock Style: E (Spring Lock (Exhaust Lock))

Magnet: D (Built-in), Style: Air Pressure Style, Mounting: FZ (Boss-cut Flange), Bore Size: 40mm, Stroke: 275mm, Rod Boot: None, Lock Style: P (Pneumatic Lock (Pressure Lock)

Magnet: D (Built-in), Style: Air Pressure Style, Mounting: FZ (Boss-cut Flange), Bore Size: 40mm, Stroke: 125mm, Rod Boot: None, Lock Style: E (Spring Lock (Exhaust Lock))

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: [Included] Presence, Valves: No

Cylinder (Tube) Inner Diameter(φ): 40, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: [Included] Presence, Valves: No

Magnet: Built-in, Style: Air Pressure Style, Mounting: Boss-cut Flange, Bore Size: 40mm, Stroke: 100mm, Rod Boot: None, Lock Style: Pneumatic Lock (Pressure Lock, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -

Magnet: Built-in, Style: Air Pressure Style, Mounting: Boss-cut Flange, Bore Size: 40mm, Stroke: 350mm, Rod Boot: None, Lock Style: Spring Lock (Exhaust Lock), Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -, Auto Switch Mounting Bracket: -