20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)400 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)72?2?1275Non-magnetizing lock1107.924 VDC 0 10%

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

Compact and Low Profile Mechanical Joint Rodless Cylinder Compact and Low Profile Mechanical Joint Rodless Cylinder 4058mm 25/37mm 16/28mm 4058mm 25/37mm 16/28mm Reduction in height by 30% over other P/A rodless cylinders Parallel arrangement of the guide and the actuating unit results in compact design.

Precision Regulator

output PNP open collector 1 output NPN open collector 1 output + Analog voltage output NPN open collector 1 output + Analog current output Symbol A B C D ARM ARP Accessory (Pressure gauge) Pressure Switch Specifications Nil None IR1000 series: G33--01 IR2000 series: G43--01 IR-A Set pressure range (MPa) 0.1 to 1 G Resolution of setting and display (MPa) 0.001 IR IR 12 to 24 VDC10%, Ripple (p-p

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

(mm) 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Weight(kg) 3.15 3.35 3.55 3.75 3.95 4.15 4.35 4.55 4.75 4.95 5.15 5.35 5.55 5.75 5.95 6.15 6.35 6.55 6.75 6.95 0.53 Additional weight for lock(kg) 4 Model LEFS40 Stroke(mm) 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 1100 1200 Weight(kg) 5.37 5.65 5.93 6.21 6.49 6.77 7.15 7.33

HRX-OM-I051

display panel Main breaker Ventilating fan (exhaust side) Ventilating hole (intake side) Power cable access Emergency off [EMO] switch Refrigerant pressure gauge Circulating fluid fill port Facility water outlet Circulating fluid supply Facility water inlet Circulating fluid return Main tank drain port Circulating fluid level gauge Drain pan port Sub tank drain port S u b a n k d r a i n p

Silencer Series AN

P 1 Silencer VEX Solenoid Tightening Torques for Silencers Applicable tightening torque (N.m) 12 to 14 Connection thread AN 1 4 22 to 24 3 8 28 to 30 1 2 28 to 30 3 4 36 to 38 40 to 42 1 4 1 2 48 to 50 48 to 50 R R R R R 1 R 1 R 1 R 2 Inlet pressure for silencer AMC 4.

5 Port Solenoid Valve

P EtherCAT P P P EtherNet/IP P P P P P Open network Applicable valve series PROFIBUS DP P P P P P DeviceNet P P P P P P CC-Link P P P P P P P AS-Interface P CANopen P CompoNet SY (Plug-in connector connecting base) 3000 P P P P P P 5000 P P P P P P S0700 (Stacking base) 0700 P P P P P 1000 P P P P P P 2000 P P P P P P SV 3000 P P P P P P 4000 P 1000 P P P P P P VQC 2000 P P P P P P 4000 P

%silltr

The pressure supply is above the disc. tffi P F ISO Symbol A B t-vt A B rT--r] P E X P E X ffi P E X A E T t--l I T T I P E X Fig 7.12 Section through a Rotary Disc Valveand a disc for a 4/3 tunction with closed center P N E U U A T t c T E c H N o L o c Y I UALVE OPERATION M E C H A N I C A L O P E R A T I O N :E : Square Roller e Roller Lever A l:Ez : Plunger t-l n n tldt A !

SMC Basic Pneumatics

The pressure supply is above the disc. tffi P F ISO Symbol A B t-vt A B rT--r] P E X P E X ffi P E X A E T t--l I T T I P E X Fig 7.12 Section through a Rotary Disc Valveand a disc for a 4/3 tunction with closed center P N E U U A T t c T E c H N o L o c Y I UALVE OPERATION :E : Square Roller e Roller Lever M E C H A N I C A L O P E R A T I O N A l:Ez : Plunger t-l n n tldt A !

Table of Contents

Port size Rc1/4, NPT1/4, G1/4(ISO1179) U P DOWN U P DOWN U P DOWN SET SET SET Model with initial display settings of PSI is also available as standard.

VQ4000

5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQD Manual override 2 position double 3 position exhaust center (A) 4 (B) 2 (A) 4 (B) 2 Metal Rubber Nil: Non-locking push type (Tool required) B: Slotted locking type (Tool required) 4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 2 position double 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 5 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position double

Compact Hydraulic Cylinder

Bore size (mm) NN P S X ZZ Y 20 M22 x 1.5 1/8 81 20 9 151 25 M24 x 1.5 1/8 81 20 9 156 32 M30 x 1.5 1/8 87 23 9 172 40 M33 x 2 1/4 108 25 11 198 238 Round Type Hydraulic Cylinder: 3.5 MPa Series CHmM Rod flange style: CHMF Width across flats B2 Width across flats B1 N GA GB Rc P N Rc P 4 x FD H1 H2 2 x NN I IA D FY B MM Effective thread K F NB Width across flats NA NC FT A FX H S + Stroke

OMR0032

Controller Set Up (P.42) and 14. Card Motor Controller Configuration software (P. 70) for instructions on how to setup. (7) Test operation Refer to section 10. Monitor and Test Mode of the Controller (P.50) and 14.5 Monitor/Test window (P. 80) for instructions on operating instruction of test operation 14 - 3.

High Vacuum Angle Valve, XL Series

P.4 to P.7 XLAV (With solenoid valve) Particulate free completely cleaned Bellows Seal 105 to 10-6 10-10 10-11 2 XLC Double acting P.8 to P.11 XLCV (With solenoid valve) Manual Electromagnetic Air operated XLF Single acting (N.C.)

Air Cylinder

Grease pack part number: GR-S-010 (10 g) CS2 Basic (B) P Bore size Stroke 20 25 20 CM2B P P (Head side pressure port) (Head side pressure port) P P (Rod side pressure port) (Rod side pressure port) Effective thread length FL Width across flats B2 Width across flats B1 H1 H2 32 to 40 P Width across flats KA E (Head side pressure port) I G G NA D Q MM NN AL N N F K H A P QY NA ZZ + Stroke S

Air Cylinder NCA1 Series

T I O N S ( I F A P P L I C A B L E ) XB5 _ For information on Bore Size, Rod and Rod Thread , please see How To Order Series NCA1 Replacement Parts.

OMR0031

Controller Set Up (P.34) and 14. Card Motor Controller Configuration software (P. 57) for instructions on how to setup. (6) Test operation Refer to section 10. Monitor and Test Mode of the Controller (P.41) and 14.5 Monitor/Test window (P. 68) for instructions on operating instruction of test operation 14 - 3.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

(Blocking disks) P R (Blocking disk) P P U side D side Series SY3000 Series SY3000 U side D side Port size Port size Assembly No.