IDG

P P1 or Step 2 Step 3 Model selection based on corrected outlet flow rate HA Review operating conditions or increase size. YES In the case of IDG30 and IDG30M (with the element in the initial state), P P1, therefore proceed to Step 7 .

3 Port Solenoid Valve/

M12 connector pin number 1(P) 1(P) Safety limit switch Made by Rockwell Automation Symbol Pin Numbers (Built-in switch 3N.C.)

LX

Refer to page 100 for part numbers. 289 Made to Order Series LXP AC Servomotor Specification Guide Rod Type With Motor Brake/Without Motor Brake How to Order X12 LX P B A B D 100 F9N 1 S B AC servomotor specification Guide rod type P Actuator configuration Refer to the applicable motor list on the next page. Number of auto switches Ball bushing B Guide type 1 2 1 pc. 2 pcs.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

(a) LECSSAlways remove the wiring from across P-D and fit the regenerative option across P-C. The G3 and G4 terminals act as a thermal sensor. G3-G4 is disconnected when the regenerative option overheats abnormally. Always remove the lead from across P-D. Driver Servo amplifier Regenerative option P P C C G3 D (Note 2) G4 5m max. (Note 1) Cooling fan Note1.

3 Port Solenoid Valve/

M12 connector pin number 1(P) 1(P) Safety limit switch Made by Rockwell Automation Symbol Pin Numbers (Built-in switch 3N.C.)

13

Best Pneumatics 13 Vacuum Equipment Vacuum Module: ZX P. 13-2-4 ZX Vacuum Module: ZR P. 13-3-4 ZR Vacuum Ejector: ZM P. 13-4-2 ZM Vacuum Ejector with Solid State Timer: ZMA P. 13-4-23 ZH Vacuum Ejector: ZH P. 13-5-2 ZU In-line Vacuum Ejector: ZU P. 13-6-3 ZL Vacuum Ejector: ZL P. 13-7-4 ZY Ejector Valve Unit: ZYY/ZYX P. 13-8-4 ZQ Compact Vacuum Ejector: ZQ P. 13-9-2 ZF Air Suction

E-P HYREG ® Series VY1

AL P port pressure (MPa) P port pressure (MPa) VY190 0 1 VY170 0 1 A port pressure (MPa) A port pressure (MPa) Set point Set point Set point Set point Set point Set point P port pressure (MPa) P port pressure (MPa) 14-10-5 Series VY1 Characteristics Flow Characteristics VY1A00 1/1B00 1 VY1D00 A port pressure (MPa) P port pressure 0.88 MPa A port pressure (MPa) P port pressure 0.88 MPa Flow

Digital Flow Switches

Real-time switch output Unit switching Hysteresis mode ON For Air YES OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l Real-time flow rate "P" Window comparator mode H : Hysteresis CFM x 10-2 x CFM x 10-1 ft3 x 10-1 H H CFM = ft3/min ON High Flow Rate Type (For Air) NO OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 Real-time flow rate OUT1

LX

Guide rod type P Actuator configuration Refer to the applicable motor list on the next page.

Electric Actuator/Rod Type LEY16, 25, 32 Series LEY Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

Applicable stroke table Manufacturable stroke range [mm] Stroke [mm] 400 450 500 350 300 250 200 150 100 50 Model 30 P P P P P P P P P P P P P P P P P P P P P LEY16 LEY25 LEY32 P P P P P P 10 to 300 15 to 400 20 to 500 Consult with SMC for the manufacture of intermediate strokes other than those specified on the above. w For the servo motor (24 VDC) specification, EMC compliance was

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p to r8 soenoids poss ble --!p to 24 soenords poss ble A, B port size (inch) A, B port size (metric) o3/8 Onelouch iitl ng o5l16' One touch fit n o3l8 Onerouch litl ng NPTF ] Manifold D-sub Connector Series Mounti OIN railmounl P . Tie-rod base | sssv fr roro E-EE .

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

LQ3R P.333 Female 1 2 3 4 5 6 7 P.334 Union elbow LQ3E 1 2 3 4 5 6 P.334 Union tee LQ3T 319 Series LQ3 Port size Tubing O.D.

48

Plug Part Number Bore size Part number Port thread type Quantity1 12 (10 x 2) 16 (12 x 2) P-M3 M3 8 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) P-M5 M5 8 P-R1 Rc1/8 8 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) P-N1 NPT1/8 8 P-G1 G1/8 8 P-R2 Rc1/4 8 80 (56 x 2) 100 (71 x 2) P-N2 NPT1/4 8 P-G2 G1/4 8 *1 1 set includes 8 pieces.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Cushion needle Q + Stroke PG MY1B P P (MY1HG) MY1H MY1H (Hexagon socket head taper plug) 1 (Hexagon socket head taper plug) QQ SS RR YH MY1B PP QQ RR SS A B H NE NH NF MY1M P P (MY1HG) P (Port) P (Port) PP (Hexagon socket head taper plug) (Hexagon socket head taper plug) G G MY1C TTT UU UU TT A N Z + Stroke MY1H P MY1 HT P (Port) (Hexagon socket head taper plug) MY1 W MY2C P P (Port) (Hexagon

KG

P. 10 KGH KGL KGT P. 14 Use to branch line from female thread in both 90 directions. P. 11 Female connector Union elbow Union tee P. 11 KGF KGL KGT P. 14 Use to pipe from male thread such as pressure gauge. Use to connect tubes in both 90 directions. Use to connect tubes at right angles.

Air Catch Sensor Series ISA

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 3 0 3 0 3 0 Regulator 3 0 3 0 3 0 Supply port P P P T T T U U U E E E L L L Supply port S S S L L L P P P T T T U U U E E E L L L S S S L L L 6 9 6 9 6

Hygienic Design Cylinder Series HY

4 x UC depth UD F UA (4.7) PB + Stroke (Supply port of head end) P C E N B + Stroke A + Stroke (Supply port of rod end) P (Plug: Width across flats 8) (Supply port of head end) P (Plug: Width across flats 8) (Breathing port on guide) M5 x 0.8 (Plug: Width across flats 8) Note 2) PD CJ5 CG5 QA PA HY PB + Stroke C M (mm) A B Bore size C D E F G H J K L MB MA N P PA Standard stroke 30 st or

VM

. 5-6-8 Series VM100 P . 5-6-12 Series VM200 P . 5-6-20 Series VM400 P . 5-6-26 Series VZM500 P . 5-6-41 Series VZM400 P . 5-6-35 Series VFM300 P . 5-6-48 Series VFM200 P . 5-6-54 Series VFM800 P . 5-6-32 Transmitters Page Relay Valve P . 5-7-1 Shuttle Valve P . 5-7-3 Shuttle Valve with One-touch Fitting P . 5-7-5 AND Valve with One-touch Fitting P . 5-7-7 Time Delay Valve P . 5-7

4 Port Solenoid Valve Series VQD1000

"#$ %&' % & ' ( ) * + % & ' ( ) * + Series VQD1000 Dimensions/Base Mounted Plug lead manifold unit (VV4QD15-) Lead wire length 300 mm (P,R port) For latching Indicator light B C A B C A B C A B C A B C A 2 x 4.5 (Mounting hole) (59.7/latching type) 57.5 52.5 3(R) 51 3(R) 16 9 32 1(P) 17 1(P) 10 10 P = 11 4 36.5 L1 L2 4 41.5 45 C4: 4 One-touch fitting M plug connector (M) Stations D side

Vacuum System Peripherals:

PSE200 PSE201 Model NPN open collector PNP open collector Output specifications 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With power supply polariry protection) Power supply voltage 55 mA or less (Current consumption for sensor is not included.) Current consumption [Power supply voltage] 1.5 V 40 mA maximum (100 mA maximum for the total power supply current when 4 sensors are input.)