2/3 Port Valve FPM/EPR e Stainless steel, FPM Stainless steel, Brass NBR Note 1) Dew point: 10C or less. Note 2) 50cSt or less. Note 3) "D", "E", "N", "P" etc. in the parenthesis are option symbols.
Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.
T T 600 .75 PSIG (5 Kgf/cm2) A B c D E F G A B c D E F G 2.8 (63) 1.50 (38) 0.94 (241 0.63 {16) 0.16 (4) 0.57 14.5) 0.24 (6) 2.66 (67.5) 1.67 42.5) 0.94 (241 0.63 (16) 0.20 (5) 0.57 14.5) 0.24 (6) Millimeters in Parentheses Millimeters in Parentheses MECHANICAL VALVES DIMENSIONS Series NVM Nvtrll20-N01-32 130-N01-32 NVM120-N01-30 130-N01-30 4 63 lbs (2 1 ks.) r U T 4 6 3 l b s ( 2 1 k 9 )
BMA3-050S (A set of a, b, c, e) BMA3-063S (A set of a, b, c, e) Auto switch Switch bracket (Resin) Transparent (Nylon)Note 1) d e White (PBT) c Switch holder b Auto switch mounting screw a * Band (a) is mounted so that the projected part is on the internal side (contact side with the tube).
PB32 (e)([Pr. PB33][Pr. PB36][Pr. PB56][Pr. PB59])[Pr.
9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.
9 e r t q !3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.
Fig. (4) Fig. (5) 388 Rotary Clamp Cylinder: Standard 12, 16, 20, 25, 32, 40, 50, 63 MK Series How to Order MK 10 R 20 B N Z M9BW Rotary clamp cylinder Made to Order (Refer to page 390 for details.) Mounting bracket Auto switch type Mounting Symbol Nil S Through-hole/Both ends tapped common (Basic) 2 pcs. B 1 pc.
G NN ( I ) D X NA R Mounting nut N W K N F S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5
(Station 5) Type of actuation Light/Surge voltage suppressor 1 2 3 4 5 6 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 3 position double check Nil E Yes Without light, with surge voltage suppressor Prefix the asterisk to the part nos. of the solenoid valve, etc.
E Key lock function This function prevents incorrect operations such as accidentally changing the set value.
Inch size ARJ310F-N01 5/32" 1/4" 03 07 14-4-11 9 Series ARJ310 Flow Characteristics Inlet pressure: 0.7 MPa ARJ310-01 ARJ310F-01-04 ARJ310F-01-06 0.7 0.7 0.7 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow
o trtvzgzto "' J 9 4l|_\lb, 4l/_t_\lF FrpFr-*--lF, Base mounted type I Nvz33m N\a23340 FF ^.1T2-hn* ""rrr-h--w @ l / n r r n r \ 1 s @ 1 / t , , , 1 , \ t E E -FjFF--"lFt\Nzy2l Nvz3440 ".rnun n "^rriiTrnv t r E { / , l l , l t . \ t E \ r E l h t 1 , l , \ 1 r u . . . i F n : _ * w wz352o r.rvzgslT qTniin-Th^ qrzrti\-nv ?
Manilold Sa$e as NVJ3OO Series manitold base Type 20,41, S41,42,S42.
IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.
0 0.05 BZ D E BC I H1 4-TC TB TA AL A F K 0.1 C 0.1 C 8-J BN BC NA S + Stroke H ZZ + Stroke F e f 8 l ZZ + l + Stroke h + l With rod boot Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke Bore size (mm) A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 18 15.5 13 38 93 1/8 44.5 14 8 12 2 85 10 (12) 18 5.5 6 4 8 5 26 Up to 200
Dimensions (mm) MGPWL, MGPWA 32 to 63/A, E Dimensions (mm) Bore size (mm) A E Bore size (mm) A E 25 st or less Over 25 st 100 st or less Over 100 st 25 st or less 50 st or less Over 25 st 100 st or less Over 50 st 100 st or less Over 100 st Over 100 st 50 st or less Over 50 st 100 st or less Over 100 st D20 25 32 40 50 63 57.5 53.5 62.5 55.5 37.5 33.5 42.5 35.5 20.5 16.5 21.5 14.5 109.5 109.5
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o
Right Left Rear Front w q Parts List e Part no. Applicable model Weight [kg] No.
9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.