2/3 Port Valve

R P A Energized closed (N.O.) R P A Common (C.O.)

MLGC

160 176 125 165 M 8 160 115 4 12 11 142 95 19 18 67 190 210 135 96 200 M10 42 194 35 J K L U I O T GR N S W P GL GQ M Q R V Bore size (mm) 20 25 32 40 93 60 5.5 80 35 16 4 25 26 50 M5 x 0.8 4 50 14 53 105 M6 x 1 112 103 70 9 95 40 20 7 32 31 60 M5 x 0.8 7 60 14 63 125 M8 x 1.25 132 104 70 9 95 40 20 7 32 38 60 Rc 1/8 Rc 1/8 7 60 13 63 125 M8 x 1.25 132 115 82.5 11 115 45 25 8 38 47 70 8

MLGC

160 176 125 165 M 8 160 115 4 11 12 142 95 18 19 96 42 35 67 190 210 135 200 M10 194 P GL GQ GR I J K L M N O Q R S T U V W Bore size (mm) 20 25 32 40 93 60 5.5 80 M5 x 0.8 4 4 35 50 25 14 26 16 53 50 105 M6 x 1 112 103 70 9 95 M5 x 0.8 7 7 40 60 32 14 31 20 63 60 125 M8 x 1.25 132 104 70 9 95 Rc 1/8 Rc 1/8 7 7 40 60 32 13 38 20 63 60 125 M8 x 1.25 132 115 82.5 11 115 8 8 45 75 38 14 47

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

P Q Supply valve and release valve Supply valve Except nozzle diameter 05 type Note) Switch mounted style is also available. P. 13-4-17 to 13-4-19 13-4-4 4 Series ZM Vacuum Ejector: With Valve and Switch Construction: LZM1-KL-E Precautions Be sure to read before handling.

Stability of suction position,

P ZP3 P Vacuum Ejector or Pump and Number of Vacuum Pads ZP3E ZP3E Ejector and number of pads Vacuum pump and number of pads Vacuum line ZP2 ZP2V Tank ZP ZPT ZPR XT661 P P P P P P P P P Ideally, one pad should be used for each line. When more than one pad is attached to a single vacuum line, take the countermeasures listed below.

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: J, K, T Q1 = M L2 + (3 x P) L2 + (3 x P) L2 = L1 + (3 x P) L1 = Q2 = M Q2 = M L2 = [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Symbol: A35 Symbol: A36 Symbol: A37

MHY2/MHW2

Refer to p.2.11-1 for details of auto switch specifications.

Fluoropolymer Piping Equipment

2 3 4 5 6 LQHB Panel mounting nut LQNP TL TIL TLM TILM P.908 Nut insert bush LQ1-U B N TD TID TH TIH P.909 Blanking plug LQ-P P.909 Tubing plug LQ1-CP P.909 Note) Basic size With reducer 869 LQ3 Series LQ3 Series P.912 Port size Tubing O.D.

ITV

IR 0.5 0.5 0.6 Set pressure (MPa) Set pressure (MPa) 0.4 Set point VEX 0.5 0.3 0.4 0.0 AMR 0.3 0.2 0.2 0.5 ITV 0.1 0.1 1.0 0.0 0.0 IC 0 50 100 200 150 0 50 100 150 200 250 0.8 0.2 0.4 0.6 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Supply pressure (MPa) VBA VE Series ITV203 VY1 G Repeatability Linearity Hysteresis 1.0 0.6 1.0 PPA 0.5 Output deviation factor (%F.S.)

Electric Actuator with Integrated Guide Series LTF

Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal 10 10 P.42 Non-standard motor 6 6 P.50 Vertical 10 10 P.58 Options P.66 Construction P.67 Mounting P.68 Non-standard Motor Mounting P.69 Deflection Data P.71 Part Number Designations P 1 E F G LTF 6 100 R 2 X10 Motor specification Lead screw lead Series Series 6 Nil

Cylinder (Tube) Inner Diameter(φ): 100, Stroke(mm): 160, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: With fall prevention function / With Brake / With Intermediate Stop Function, Environment, Applications: Standard, Cushion: With cushions on both sides, Operating Pressure(MPa): 0.08 to 1.0, Specification

Magnet: D (Built-in), Mounting: C (Single Clevis), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 300mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: D (Spring/Air Pressure Lock)

Magnet: D (Built-in), Mounting: C (Single Clevis), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 250mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: D (Spring/Air Pressure Lock)

Magnet: D (Built-in), Mounting: C (Single Clevis), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 350mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: D (Spring/Air Pressure Lock)

Magnet: D (Built-in), Mounting: C (Single Clevis), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 500mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: D (Spring/Air Pressure Lock)

Magnet: D (Built-in), Mounting: C (Single Clevis), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 600mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: D (Built-in), Mounting: C (Single Clevis), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 75mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: D (Spring/Air Pressure Lock)

Magnet: D (Built-in), Mounting: C (Single Clevis), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 50mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: D (Built-in), Mounting: C (Single Clevis), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 700mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: D (Spring/Air Pressure Lock)

Magnet: D (Built-in), Mounting: C (Single Clevis), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 800mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]