3

to 63 32 to 63 A B U B A U D-P3DWA 32 to 63 U B A Auto Switch Proper Mounting Position D-F7/J79 D-F7V D-J79C/F7W D-F7WV D-F7BA D-F7BAV D-F79F/J79W D-A7H/A80H D-A73C/A80C D-A72 D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V D-A79W D-A73 D-A80 D-F7NT D-P3DWA Bore size (mm) A 25.0 24.0 26.0 19.5 23.5 24.0 A 28.0 27.0 29.0 22.5 26.5 27.0 A 30.5 29.5 31.5 25.0 29.0 29.5 B 10.0 12.0 13.0 13.0

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

A B A A A A A A 2.PUSH 2.PUSH B B B B 1.TURN 1.TURN VQZ 28 5.5 35 74.5 VQD 13 2-M4 clamp screw Triangle mark indicator position EXH outlet 9 Release for switching connector direction D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port C8: 1(P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 58 43.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch

SJ3A6

U D B M U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) Special specifications SUP/EXH block fitting spec.

Cylinder with lock

2 For 40 to 100 12 BUSHING 1 32 TIE ROD 4 13 HEXAGON SOCKET CAP BOLT 4 33 TIE ROD NUT 8 14 HEXAGON SOCKET CAP BOLT 2 34 WEAR RING B 1 15 WEAR RING A 2 35 ROD END NUT 1 16 PISTON SEAL A 1 36 MAGNET (1) For MDWB 17 ROD SEAL A 1 37 ROD SEAL B 1 18 GASKET 1 38 PISTON SEAL B 1 19 ELEMENT 1 39 CUSHION SEAL 2 20 RELEASE BOLT 1 40 CUSHION VALVE SEAL 2 41 CYLINDER TUBE GASKET 2 43 - Revision history

Cylinder with lock

1 34 FLAT WASHER (8) In case of 80,100 13 HEXAGON SOCKET CAP BOLT 4 35 BUMPER A 1 14 HEXAGON SOCKET CAP BOLT 2 36 BUMPER B 1 15 WEAR RING A 2 37 WEAR RING B 1 16 PISTON SEAL A 1 38 ROD END NUT 1 17 ROD SEAL A 1 39 MAGNET (1) In case of CP96ND* 18 GASKET 1 40 ROD SEAL B 1 19 ELEMENT 1 41 PISTON SEAL B 1 20 RELEASE BOLT 1 42 CUSHION SEAL A 1 21 SEAL WASHER 1 43 CUSHION SEAL B 1 22 HEXAGON

Cylinder with lock

1 34 FLAT WASHER (8) In case of 80,100 13 HEXAGON SOCKET CAP BOLT 4 35 BUMPER A 1 14 HEXAGON SOCKET CAP BOLT 2 36 BUMPER B 1 15 WEAR RING A 2 37 WEAR RING B 1 16 PISTON SEAL A 1 38 ROD END NUT 1 17 ROD SEAL A 1 39 MAGNET (1) In case of C96ND* 18 GASKET 1 40 ROD SEAL B 1 19 ELEMENT 1 41 PISTON SEAL B 1 20 RELEASE BOLT 1 42 CUSHION SEAL A 1 21 SEAL WASHER 1 43 CUSHION SEAL B 1 22 HEXAGON SOCKET

7ND9071en

ENCLOSURE All models are IP66 / NEMA 4X enclosure U applicable for 5. sigh F or P: Class I, Division 2, Groups A, B, C, and D; T4/T5/T6 Ex ic IIC T4/T5/T6 Gc Class I, Zone 2 AEx ic IIC T4/T5/T6 Gc Temperature range: T4: -40 to +80 C; T5: < +65 C; T6: < +50 C. No Zener Barrier needed. 1/2 NPT conduit entry.

CHKD/CHKG

CHKGL--XC64 A C C B 293

Fluoropolymer Piping Equipment

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 Fluoropolymer Bore

Electric Grippers

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.

LG1H

4 Section A-A u Parts list Material Note No. Description No.

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

Free Mount Cylinder

Material NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) N S U F GN GS Material N S U F GN NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) Pad type Flat Flat with ribs Deep Bellows (Except -X11) U C D B Table (1) Pad Dia./Pad Type Dia.

VCC

3 A-y A-u A-i A-y B-q B-w B-e B-r B-w B-t B-y B-t Orifice body PTFE seal O-ring Sleeve O-ring O-ring O-ring Name plate O-ring O-ring Orifice body Name plate O-ring O-ring O-ring O-ring Orifice O-ring O-ring Name plate O-ring O-ring O-ring O-ring PEEK resin Special PTFE Special FKM POM Special FKM Special FKM Special FKM Special FKM Special FKM PEEK resin Special FKM Special FKM HNBR Special

ITV

9 u 12 NBR O-ring 13 NBR Seal q Resin 14 Bowl assembly @2 Silicone rubber y 15 Resin Sub-plate OUT SUP 16 NBR Seal !

Stroke Reading Cylinder and Counter

-X 663 CE1 Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height D-A9V D-M9V D-M9WV D-M9AV D-A9 D-M9 D-M9W D-M9A 12 to 20 25 U B A 32 to 63 D-A9 D-M9 D-M9W D-M9A D-A9V D-M9V D-M9WV D-M9AV U D-A7 D-A80 D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F79F D-F7NT D-F7BA D-A73C D-A80C D-J79C D-A79W D-F7WV D-J7V D-F7BAV 12 to 20 U B A 32 to 63

CL

D C B H d Tube I.D.

Combination Cylinder

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Type Regulators Series AR

Clearance For Maintenance W E G A AC-B AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.