4 C-9 MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 MYM63-15AK0503 GMY63 MC-20 P53 C-4 C-14 MYM16-15AK0500 GMY16 MYB16-15-A7163 P12 4 x 1.8 x 1.1 7 x 4 x 1.5 MYM25-15AA5903 GMY25 RCS-8 TMY-25 7.15 x 3.75 x 1.7 C-6 MYM32-15AA5904 GMY32 RCS-10 TMY-32 8.3 x 4.5 x 1.9 C-7 MYM20-15AK0501 GMY20 MYB20-15-A7164 P16 5.1 x 3 x 1.05 7 x 4 x 1.5 Note) Two types of dust seal band are available.
Rod seal NBR 1 DYR-4 DYR-4 DYR8K DYR8K DYR8K i Piston seal NBR 1 DYP-12 DYP-12 DYP-20 DYP-20 DYP-20 o O-ring NBR 1 C-9 C-9 C-18 C-18 C-18 !2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !
500, 600, 700, 800 Oversized rod cylinder XB5 125 1500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (150C) XB6 Intermediate strokes are available.
A 5 (R1) 1 (P) 3 (R2) A C B Note) Except VQZ1000 and metal seal type.
A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5
A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5
Cylinder Speed Chart Bore size Series CS1/CS2 Pressure 0.5 MPa, Load factor 50% Cylinder stroke 300 mm Average velocity (mm/s) System 125 140 160 180 200 250 300 1000 Vertically upward movement Horizontal movement 900 800 700 600 500 400 300 200 100 0 A 800 900 1000 700 600 500 400 300 200 100 0 B 900 1000 800 700 600 500 400 300 200 100 0 C 800 900 1000 700 600 500 400 300 200 100 0 D 800
Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Seat material S Material PCTFE (Standard) PTFE 3) Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 No code TF SHP 3) PTFE recommended for applications such as within a process tool.
3 Port Solenoid Valve Rubber Seal Series SYJ300/500/700 SY SYJ Low power consumption: 0.5W (Without light) (Current draw: 21mA at 24V DC) VK VZ Completely interchangeable with the previous series VJ300/500/700 and VZ300/500. VT Pilot exhaust VT VP Mounts on the same subplates and manifolds as the VJ300/500/700 and the VZ300/500.
6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 3000 3000 CLQ 2000 2000 MLGP 160 140 RLQ 1000 1000 Load weight: m (kg) Load weight: m (kg) 700 800 900 700 800 900 125 MLU 600 600 160 500 500 ML1C 400 400 140 320 125 300 300 D200 200 -X 280 20100 100 100 500 400 300 200 100 500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa
20 10 0 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 0.2 0.3 0.4 0.5 0.6 800 800 Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure 700 700 Suction flow rate (Branch/Port exhaust) Suction flow rate (Branch/Port exhaust) Vacuum pressure [kPa] Vacuum pressure [kPa] 600 600 Suction flow
, 800 900, 1000, 1200 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 30 55 45 85 Vertical 5 10 10 20 Up to 500 1200 600 1200 600 501 to 600 1050 520 1200 600 601 to 700 780 390 1200 600 701 to 800 600 300 930 460 801 to 900 480 240 740 370 901 to 1000 390 190 600 300 1001 to 1100 320 160 500 250 1101 to 1200 270 130 420 210 1201 to 1300 360 180 1301
Number of auto switches C Single clevis type Cylinder 2 pcs. Nil D Double clevis type J Nylon tarpaulin S 1 pc. T Center trunnion type Rod boot K Heat resistant tarpaulin n "n" pcs.
AC servo motor Motor typeV*) Model LEKFS25V6 LEKFS32V7 LEKFS40V8 Stroke [mm] 100 to 500 100 to 500 200 to 600 Horizontal 10 20 20 30 40 45 30 50 60 Work load [kg] Note1) Vertical 4 8 15 5 10 20 7 15 30 Up to 400 1500 900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 1000 500 1500 1000 500 601 to 700 700 420 210 930 620 310
0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 125 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Gragh 7 Gragh 4 0.5MPaP 0.5MPaP 3000 3000 2000 2000 160 140 125 1000 1000 700 800 900 700 800 900 Load weight:
(6) Graph (3) 0.4 MPa ) P < 0.5 MPa 0.4 MPa ) P < 0.5 MPa CLS 4000 4000 250 CLQ 3000 3000 200 MLGP 2000 2000 180 160 RLQ 250 Load weight: m (kg) Load weight: m (kg) 140 1000 1000 700 800 900 700 800 900 125 200 MLU 180 600 600 160 400 500 500 ML1C 140 400 125 D300 300 200 200 -X 20[Example] 100 100 100 500 400 300 200 100 500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/
, 1000 200, 250, 300 63 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 MGGL Ball bushing 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.
C J G5-S CV Fig. (6) Piping MVGQ Before connecting the pipes, remove any foreign matter.
B B DIN terminal Conduit terminal F Q Cable 0.24 to 0.47 D S G1/2 1.34 Qp0.08 F (1.73) 1.24 0.99 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp0.08 B B1 B Conduit Faston type Q F D Q F 0.44 z11 G1/2 0.90 R C C R E E 2 x P Port size A 2 x P Port size B1 A B1 B B Terminal part Faston connector (inch) 250 Series Electrical entry Size Port size Grommet (with surge P A B B1 C D E