AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Table of Contents

Note 1) 01 1 station Note 2) The number of max. stations differs from kit to kit. (Refer to the table below.)

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Booster Regulator/Air Tank

SRH VBA20A-03 VBA20A-F03 VBA10A-02 VBA10A-F02 VBA11A-02 VBA11A-F02 G27-20-01 AN20-02 ANA1-02 KT-VBA10A-18 VBA40A-04 VBA40A-F04 VBA22A-03 VBA22A-F03 VBA42A-04 VBA42A-F04 VBA43A-04 VBA43A-F04 Model Description Pressure gauge Silencer High-noise reduction silencer Elbow for silencer SRP G N S L G36-10-01 AN30-03 ANA1-03 KT-VBA22A-7 AN30-03 ANA1-03 G36-10-01 AN40-04 ANA1-04 G27-20-01 AN40-

Direct Solenoid

SP O2('5 (1'{' NPIF PORTg |l{ct-uDEs 1 Block XI 01 t2 3 Soc Hd Sc.ws NXT010.19A (1G24X1%1 1 Gaskol NXT010.14 2 Fltlsh Plugs r/4"NPT ORDERII{G PART NO. SP O30' (3,l .

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

Series ASV, speed exhaust controller provides an effective area that is two times larger than that of a speed controller. A silencer, one-touch fitting and flame resistant resin body is supplied as standard on the ASV. All brass parts are electroless nickel-plated., EXHAUST SPEED CONTROLLER, AIRLINE EQUIPMENT, ASV FLOW CONTROL QUICK EXHAUST, CB, ASV 1/8 INCH STANDARD (PT), .07753

Series ASV, speed exhaust controller provides an effective area that is two times larger than that of a speed controller. A silencer, one-touch fitting and flame resistant resin body is supplied as standard on the ASV. All brass parts are electroless nickel-plated., EXHAUST SPEED CONTROLLER, AIRLINE EQUIPMENT, ASV FLOW CONTROL QUICK EXHAUST, CB, ASV 1/8 INCH STANDARD (PT), .06823

Series ASV, speed exhaust controller provides an effective area that is two times larger than that of a speed controller. A silencer, one-touch fitting and flame resistant resin body is supplied as standard on the ASV. All brass parts are electroless nickel-plated., QUICK EXHAUST FLOW CONTROL, AIRLINE EQUIPMENT, ASV FLOW CONTROL QUICK EXHAUST, CB, ASV 1/8 INCH STANDARD (PT), .06014

Series ASV, speed exhaust controller provides an effective area that is two times larger than that of a speed controller. A silencer, one-touch fitting and flame resistant resin body is supplied as standard on the ASV. All brass parts are electroless nickel-plated., SPD EXHAUST CONTROLLER, FLOW CONTROL W/QUICK EXHAUST

Series ASV, speed exhaust controller provides an effective area that is two times larger than that of a speed controller. A silencer, one-touch fitting and flame resistant resin body is supplied as standard on the ASV. All brass parts are electroless nickel-plated., EXHAUST SPEED CONTROLLER, AIRLINE EQUIPMENT, ASV FLOW CONTROL QUICK EXHAUST, CB, ASV 1/8 INCH STANDARD (PT), .04850

Series ASV, speed exhaust controller provides an effective area that is two times larger than that of a speed controller. A silencer, one-touch fitting and flame resistant resin body is supplied as standard on the ASV. All brass parts are electroless nickel-plated., EXHAUST SPEED CONTROLLER, AIRLINE EQUIPMENT, ASV FLOW CONTROL QUICK EXHAUST, CB, ASV 1/8 INCH STANDARD (PT), .04850

Series ASV, speed exhaust controller provides an effective area that is two times larger than that of a speed controller. A silencer, one-touch fitting and flame resistant resin body is supplied as standard on the ASV. All brass parts are electroless nickel-plated., QUICK EXHAUST FLOW CONTROL, AIRLINE EQUIPMENT, ASV FLOW CONTROL QUICK EXHAUST, CB, ASV 1/8 INCH STANDARD (PT), .05588

Series ASV, speed exhaust controller provides an effective area that is two times larger than that of a speed controller. A silencer, one-touch fitting and flame resistant resin body is supplied as standard on the ASV. All brass parts are electroless nickel-plated., QUICK EXHAUST FLOW CONTROL, AIRLINE EQUIPMENT, ASV FLOW CONTROL QUICK EXHAUST, CB, ASV 1/8 INCH STANDARD (PT), .05511

Lightweight, compact, and precision control make these speed controls the right choice for many heavy-duty applications. These speed controls are offered with in-line and elbow construction to give the widest choice to your unique application. Locking nuts are included as standard as well as simplified mounting. Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric

C95Series

lOre mentioned above 8'8 1 00 same as standard port locatIon C95 Standard part number l-xC3 j B f@] Location 01 pons and cushion val\les On rod cover and head CO\lfH.

90

NPN 1 output ISE30A-01-N-ML Digital pressure PNP 1 output ISE30A-01-P-ML NPN 1 output/ Voltage output ISE30A-01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.

PFxx-OMJ0005CN

/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01/02--X694

IZN10_C

IZN10 IZN10 IZN10 IZN10 01 01 01 01 P P P P 06 06 06 06 Z Z Z Z B1 B1 B1 B1 IZN10 AC 01 02 11 Rc1/8 NPN P PNP 06 6 07 6.351/4) 16 6 ( 17 6.351/4() (3m) Z (10m) N IZN10-NT L DIN IZN10A002 IZN10B1 L B2 B3 DIN 01 06 ES 2 01 ES 17mm 2 2 02 3 3 11 Rc1/8 4 4 /IZS30 /IZS30 /IZS30 /IZS30-M2 M2 M2 M2 06 6: 07 6.351/4: 16 6 :( 17 6.35(1/4):() IZN10-CP(3m) IZN10-CPZ(10m) IZN10A003 NPN