06 10 1/4 3/8 1/2 3/4 1 Applicable model AMR3l00-02 to 03 AMR4l00-02 to 04 AMR5l00-04 to 06 AMR6l00-10 R 3 4 5 6 Body size 3 4 5 6 Adapter ass'y port size (2 pcs.)
Filter Regulator AW30, 40 Related Equipment How to Order Integration of a filter and regulator allows simple wiring. 03 BE 30 1N AW F Optional specifications Filter regulator Applicable models AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 Symbol 1 2 6 8 J N R W Z Contents 0.02 to 0.2MPa setting Metal bowl Nylon bowl Metal bowl with level gauge Drain guide
When reusing the tubing, cut off the previously installed portion of the tubing to avoid possible leakage and/or disconnection of the tubing. 3.2, 4 Port size 3 5 32 04 M3 x 0.5 M5 x 0.8 3.2 4 2 Barb fitting: M-3AU-2, M-5AU-2 Series M Applicable tubing O.D. x I.D.
When reusing the tubing, cut off the previously installed portion of the tubing to avoid possible leakage and/or disconnection of the tubing. 3.2, 4 Port size 3 5 32 04 M3 x 0.5 M5 x 0.8 3.2 4 2 Barb fitting: M-3AU-2, M-5AU-2 Series M Applicable tubing O.D. x I.D.
Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Rotation: J (Rotating), Stroke: 6mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A8 (M8X1, Available for UT, CT for Diameter size 10, 13, 16 Only)
Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: GN (Conductive NBR), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A8 (M8X1)
Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 6mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A8 (M8X1)
Valve: None; Stop Valve: None, Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)
Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)
Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: ET (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V ⇔ Analog 1 to 5 V; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)
Stations: 04 (4 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: P (w/o Flow Adj.
Valve; w/Stop Valve), Return Port Size: 04 (1/2), Flow Switch Output Specifications: E (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V; Temp.: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)
Valve; w/Stop Valve), Return Port Size: 04 (1/2), Flow Switch Output Specifications: E (Out 1: PNP; Out 2: Flow Rate: Analog 1 to 5 V; Temp.: None; Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)
Stations: 04 (4 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Flow Switch Type: 7 (Integrated Display), Rated Flow Range: 04 (0.5 to 4 L/min), Return Unit Components: S (w/Flow Adj.
Valve: None; Stop Valve: None, Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: FT (Out 1: PNP; Out 2: Flow Rate: Analog 4 to 20 mA ⇔ Analog 4 to 20 mA; Temperature Sensor: Yes), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)
Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: GS (Inductive Silicon Rubber), Rotation: J (Rotating), Stroke: 6mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A8 (M8X1, Available for UT, CT for Diameter size 10, 13, 16 Only)
Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: N (NBR), Rotation: J (Rotating), Stroke: 6mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A8 (M8X1, Available for UT, CT for Diameter size 10, 13, 16 Only)
Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Rotation: J (Rotating), Stroke: 15mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A8 (M8X1, Available for UT, CT for Diameter size 10, 13, 16 Only)
Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: U (Urethane Rubber), Rotation: J (Rotating), Stroke: 6mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A8 (M8X1, Available for UT, CT for Diameter size 10, 13, 16 Only)