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XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

port M5 x 0.8 Operation direction A (Plug: M-5P) 49 46 38 5 22 12 19 4 40 25 Y Y 5.5 Operating port M5 ~0.8 24 84 Operation direction B (Plug: M-5P) Operation direction B A 7 6.5 13 10 10 13 A 14.8 30 7 24 A 15.8 Z Cross section AA (scale 50%) (N-1) x H G H 6 depth 4.5 5H9 +0.03 N-M4 x 0.7 thread depth 8 0 Bottom through hole 3.3 5H9 +0.03depth 4.5 0 F E Model J N H G F E Z MXW8-25 64 3

(n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) 2 pcs. (Different surfaces, Same surface), 1 pc. 15 105 110 115 D-M9 D-M9W 15 + 40 (n2) 2 105 + 40 (n4) 2 110 + 40 (n4) 2 115 + 40 (n4) 2 n pcs. (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 pcs.

2)0 RX(n+2)0 RY(n+2)1 RX(n+2)1 RY(n+2)2 RX(n+2)2 1 PT0 RY(n+2)3 6 DI5 RX(n+2)3 2 PT1 RY(n+2)4 7 DI6 RX(n+2)4 3 PT2 RY(n+2)5 8 DI7 RX(n+2)5 4 PT3 RY(n+2)6 TL1 RX(n+2)6 5 PT4 RY(n+2)7 PC RX(n+2)7 6 PT5 RY(n+2)8 CDP RX(n+2)8 7 PT6 RY(n+2)9 RX(n+2)9 8 PT7 RX(n+2)A RY(n+2)A RX(n+2)F RX(n+3)0 RY(n+2)B / RX(n+3)9 RY(n2)C RX(n+3)A ALM 15 RY(n+2)F RY(n+3)0 RX(n+3)B Ready CRD RY(n+3

PFM5-(N)01/(N)02/F01-1/2 -25No.PF-OMJ0016-J PFM5-(N)01L/(N)02L/F01L-1/2 -26No.PF-OMJ0016-J PFM5S-(N)01/(N)02/F01-1/2 -27No.PF-OMJ0016-J PFM5S-(N)01L/(N)02L/F01L-1/2 -28No.PF-OMJ0016-J PFM5-F02-1/2 -29No.PF-OMJ0016-J PFM5-F02L-1/2 -30No.PF-OMJ0016-J PFM5S-F02-1/2 -31No.PF-OMJ0016-J PFM5S-F02L-1/2 -32No.PF-OMJ0016-J PFM5-C/N-1/2 -33No.PF-OMJ0016-J PFM5-C/NL-1/2 -34No.PF-OMJ0016-J PFM5S-C/N

20mm/s LESH**K 10mm/s LESH8R LESH16R LESH25R J K J K J K 4 6 15 23.5 43 77 7 10.5 25 39 71.5 128.5 [N] 10 15 35 55 100 180 *20%F.S.

Theoretical Output (N) Made to Order Specifications (For details, refer to page 43.)

50 70 Note 1) J dimension is at fully closed.

MHL2-10D MHL2-16D MHL2-16D MHL2-10D 2 1 2 1 60 60 25 25 0.6MPa 0.6MPa Holding force (N) Holding force (N) Holding force (N) Holding force (N) 50 50 20 20 0.5MPa 0.6MPa 0.5MPa 0.6MPa 40 40 15 15 0.4MPa 0.5MPa 0.4MPa 0.5MPa 0.4MPa 0.4MPa 30 30 10 10 0.3MPa 20 20 0.3MPa 0.3MPa 0.3MPa 0.2MPa 5 5 10 10 0.2MPa 0.2MPa 0.2MPa 10 20 30 40 50 60 70 20 40 60 80 100 120 20 40 60 80 100 120 0 0 0 10 20

170 210 128 200 240 26 50 70 Note 1) J dimension is at fully closed.

Note 4) Separate spacers are required for modular unit. 7 Series ACG20A/30A/40A Dimensions ACG20A N A E G P L C B C H2 H1 OUT IN SMC 2-L J OUT B M 2-K Port size O S O S Min. clearance for maintenance Drain D D Filter regulator Lubricator ACG30A/40A N A E P G L H2 H1 OUT IN SMC OUT L M K Port size Min. clearance for maintenance Drain Filter regulator Lubricator Metal bowl with level gauge

XLAV/With solenoid valve J Port P (pressure port) N M K L P R Port R (exhaust port) (mm) M 3 3 3 3 4 4 L 8.5 8.5 8.5 8.5 12 12 K 13 14 23 25 29 39 J 16.5 16.5 17.5 17.5 29 29 N Model XLAV-16 XLAV-25 XLAV-40 XLAV-50 XLAV-63 XLAV-80 3 3 3 3 2 2 Other dimensions are the same as XLA. 7 Series XLC Normally Closed/Bellows Seal Air Operated Type How to Order XLC 16 F9N Switch quantity/Mounting

n = 2, 4, 6, 8 n 150 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) 110 + 100 (n 2) n = 2, 4, 6, 8 CNA 1 15 110 150 Different sides CNS 110 150 35 2 Same side 110 150 55 CLS D-A44 150 + 30 (n 2) n = 2, 4, 6, 8 150 + 50 (n 2) n = 2, 4, 6, 8 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) n Same side 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) CLQ 1 110 150 15 MLGP D-Z7/Z80

Thus, F= 5 x 0.05 x 9.8 = 2.5 (N) 1. Calculation of applied lateral load F F = N m g (N) = 0.2 x 10 x 0.1 x 9.8 = 2.1 (N) CC 70 Lateral load F (N) RB 60 0.4 MPa 50 J 40 2. Confirmation of allowable lateral load From the graph, the allowable lateral load at L = 50 mm and P = 0.4 MPa is 18 N. Because 2.1 N < 18 N, it is applicable. 30 20 D2.

Thus, F= 5 x 0.05 x 9.8 = 2.5 (N) 1. Calculation of applied lateral load F F = N m g (N) = 0.2 x 10 x 0.1 x 9.8 = 2.1 (N) CC 70 Lateral load F (N) RB 60 0.4 MPa 50 J 40 2. Confirmation of allowable lateral load From the graph, the allowable lateral load at L = 50 mm and P = 0.4 MPa is 18 N. Because 2.1 N < 18 N, it is applicable. 30 20 D2.

How to Order MXW 16 100 B M9N S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

4.5 Bottom through-hole 3.3 N x M4 x 0.7 thread depth 8 5H9 + 0.030 0 depth 4.5 F E (mm) J N H G F E Z Model MXW8-25 64 3 32 47 48 55 157 MXW8-50 71 4 30 46 76 53 182 Note) Stopper bolt Y shown in the section above is attached only on B type (with shock absorber). 156 Series MXW Air Slide Table MXW8/Stroke: 75, 100, 125, 150 mm Operating port 2 x M5 x 0.8 J 10 Width across hexagon socket

Bracket B Line filter Mist separator Micro mist separator Bracket A Mounting screws Specific Product Precautions Bracket mounting view 14 AFF/AM/AMD Series Dimensions AFF/AM/AMD20 AFF/AM/AMD30 AFF/AM/AMD40 M D J U J D M S U N T S N T 2 x P (Port size) 2 x P (Port size) R Q Q R V C V C B G IN OUT IN OUT B G Maintenance space A Maintenance space E A AFF/AM/AMD50 AFF/AM/AMD60 J M D N T U S 2

AF-OMX0053-B PRODUCT NAME Mist Separator MODEL / Series / Product Number AFM20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFM30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.