VM

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

VQ4000

pilot port) 44 62 9 9 91 44 62 Station number 50.5 59 2-Rc 1/8 (External pilot port) R4.5 R4.5 50.5 9 9 U side entry (LU) U side D side D side U side n 15 X X n X 12 12 12 12 8 B 2 A 4 B 2 A 4 8 Manual override 7 B 2 A 4 SMC SMC SMC SMC SMC SMC SMC B 2 A 4 7 A B A B A B A B A B A A A B A B A B A B A B A A SMC SMC SMC SMC SMC SMC SMC B B B A A A A A A A B A B 2 A 4 6 B 2 A 4 6 B B A A A A

CG5-S

7 TH 4-TC C0.5 +0.2 0 TU D D 0.1 0.3 TN C0.5 12 N W L TX TV TK Round type/CJ-CR MM TDH10 A TY TT C0.5 TW RR L N Material: SUS304 W Part no.

5

Type A mounting bracket part no. YA-03 Joint YU-03 Type B Mounting Bracket RS Joint and Mounting Bracket (Type A, Type B) Part No. Bore size (mm) Joint part no.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

4(A) port side: Orange 2(B) port side: Green L2 5 (Rail mounting hole pitch: 12.5) L1 With option (Station n) (Station 1) Light/surge voltage suppressor 4 A 4 A 4 A 4 A 41 E 3/5 E 3/5 2 B 2 B 2 B 2 B 1 P 1 P 78 68.2 63 E 3 P 1 E 3 P 1 Individual EXH spacer 48 7.5 Individual SUP spacer 19.7 Block separation lever L Dimension n: Stations L n 2 135.5 125 106.5 14.5 3 148 137.5 117 15.5 4 160.5

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(mm) 1in 25.4mm Bottom port diagram 2-G3/4 Conduit port 2n-1/2 (ports A, B) 144.5 143 112.5 83.5 55.5 M5 ground screw 106 59.2 46.8 9 9 34.5 34 n U side 12 X B 2 A 4 6 B A B 2 A 4 5 B A B 2 A 4 SMC SMC SMC SMC 4 B A L2 L1 58.5 P=41 B 2 A 4 3 B A B 2 A 4 2 B A 34.5 48 68.5 P=41 B A 4 1 B A 2 X 12 Stations D side 42 16 107.8 179 15.5 22 51 69 117 2-1/8 (external pilot port) L n Dimensions

Smooth Cylinder/Low Speed Cylinder

Type A mounting bracket part no. YA-03 Joint YU-03 RS T2 V M W REA Joint REB Joint and Mounting Bracket (Type A, Type B) Part No. T1 Applicable mounting bracket Bore size (mm) E 2 x O counterbore 2 x D through REC Joint part no.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

A A A A 1 (Station n) (Station 1) L1 L2 4.5 (Pitch) P = 10.5 (Light/surge voltage suppressor) 15.5 15.5 (Station n) (Station 1) + + (Light/surge voltage suppressor) A A 20 15 5 48.5[55.5] B B + + 1.5 One-touch fitting (A, B port) Applicable tubing O.D.: 4 and 5/32" (Pitch) P = 10.5 16 33.1 A A 20 15 B B 5 1 (Pitch) P = 10.5 16.5 M5 x 0.8 (A, B port) L plug connector (L) M plug connector (

SV

n) (Station 1) V 5 84.3 86.5 Light/Surge voltage suppressor P 1 1 P V 1 P 3 E Individual SUP spacer 59.6 63.5 MAX.21 145.6 Individual EXH spacer Interface regulator SV2000-M1Interface regulator SV2000-0052.5 12 (For DIN rail mounting) (7.5) B B B B 127.6 A A A A B A B A B A B A L Dimension n: Stations L n 2 148 137.5 118 15 80 3 160.5 150 134 13.5 96 4 185.5 175 150 18 112 5 198 187.5 166

Fluoropolymer Piping Equipment

M N LVQ 25 1 1/4 LVP Class 6 (E) Port size Class 2 to 5 R (NPT) LVW Metric sizes Inch sizes LQ1 LQ1 Connection threads R/NPT A E H L M N Min. port size W Connection threads R/NPT A E H L M N Min. port size W Model Applicable tubing O.D. Model Applicable tubing O.D.

NCQ8

Use a 3-wire switch if this specification cannot be satisfied. Moreover, leakage current flow to the load will be n times larger when n auto switches are connected in parallel. 7. Do not use a load that generates surge voltage. If driving a load such as a relay which generates a surge voltage, use a contact protection box.

VQZ1000/2000/3000

8 B B B 2 2 2 A A A 4 4 4 B 25 2 A Dimensions Formula L1 = 22n + 24 n: Station 17.5 37.5 (1.5) 7.5 4 L n 13 1 2 14 16 3 4 5 6 7 8 9 11 15 10 12 46 68 310 332 376 90 112 134 156 178 200 222 266 L1 L2 L3 354 244 288 75 87.5 337.5 362.5 400 137.5 162.5 175 200 225 250 287.5 112.5 375 262.5 312.5 85.5 98 348 373 410.5 123 148 173 185.5 210.5 235.5 260.5 298 385.5 273 323 How to Order Double check

VS 8-2/VS 8-4

Regarding a vacuum switch valve and a vacuum release valve If a non-vacuum valve is installed in the middle of piping system having a vacuum, the vacuum condition will not be maintained. Use a valve designed for use under vacuum condition. 10.

Prevents Micro-Bubbles

A R P PFA PPS PTFE C LVQ Thread type 4 Symbol Nil N Thread type Rc NPT LQ N.C.

Air Fittings & Tubing

(mm) A Part No.

Intrinsically Safe Valve

A A A 83.9 6 x 1/4" 20 (A, B port) {P(1), EA(5), EB(3) port} (Pitch) P = 19 1/4" {A(4), B(2) port} 18 Stations n 2 1 67 41.7 38.3 26.5 L-type plug connector with cover (LL) 53-SS5Y7-20Terminal type (TT) 53-SS5Y7-20Stations Stations 204.2 191.2 170.6 157.6 95.6 71.7 Max. 10 L (Lead wire length) L (Lead wire length) 39 41.7 67 67 Stations n 2 stations 3 stations 4 stations 5 stations 6 stations

Table of Contents

High Suction Vacuum Work 1 Work 2 Work n Max.A ON point OFF point Min.B Not adsorption Work 1 Work 2 Work n Atmosphere A B 4 A B 4 = A ON point Max.A: Maximum pressure value when workpiece is vacuumed. Min.B: Maximum pressure value when workpiece is not vacuumed.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50

LEC-OM02704CN

n+2)0 RY(n+2)0 RX(n+2)1 RY(n+2)1 RX(n+2)2 1 RY(n+2)2 RX(n+2)3 2 RY(n+2)3 6 RX(n+2)4 3 RY(n+2)4 7 RX(n+2)5 4 RY(n+2)5 8 RX(n+2)6 5 RY(n+2)6 RX(n+2)7 6 RY(n+2)7 RX(n+2)8 7 RY(n+2)8 RX(n+2)9 8 RY(n+2)9 RX(n+2)A RY(n+2)A RY(n+2)B RX(n+3)9 RY(n2)C 1 RX(n+3)A RY(n2)D 2 RX(n+3)B Ready RY(n2)E 3 RX(n+3)C RY(n+2)F RX(n+3)F RY(n+3)9 RY(n+3)A RY(n+3)B RY(n+3)F . n 15 5 15 (RWwn) (RWrn)

VQ7-6/7-8

C10 02 03 C12 Enter only when using for a 2 position single or double.