Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to
mounting 90 461 Series MHF2 Dimensions MHF2-16D 4H9 +0.030 0 depth 3 38 4H9 +0.030 0 depth 3 2 x M5 x 0.8 thread depth 12 6 57.5 5 (Mounting thread) M5 x 0.8 Finger closing port 50 72 2 x M5 x 0.8 thread depth 5.5 (Mounting thread) 26 52 10.6 E 20 20 24 33 E 0 0.1 2 x 4.3 through (Mounting hole) 27 25 25 M5 x 0.8 2 x 7.5 1.2 1.2 Finger opening port E-E Close: 0 +0.1 0 Open: 161 4 x M5 x
, Non-rotating rod type (except single acting type)) (mm) Auto switch model D-H7l D-H7C D-H7lW D-H7BA D-H7NF D-G39A D-K39A D-A3lA D-A44A CJ1 D-M9l(V) D-M9lW(V) D-M9lA(V) D-A9l(V) D-G5NT D-C7/C8 D-C73C D-C80C D-B5l D-B64 D-B59W CJP CJ2 A B A B A B A B A B A B A B A B 20 11 9.5 7 5.5 1 0 6.5 5 3 1.5 7.5 6 1.5 0 4 3 25 10 10 6 6 0 0 5.5 5.5 2 2 6.5 6.5 0.5 0.5 3.5 3.5 32 11.5 10.5 7.5 6.5 1.5
Auto switches / Proper mounting position at stroke end detection D-C73 D-H7A1 / H7B Auto switch Auto switch 16 16 6Hs A 29 B 6Hs A 26 B (mm) Bore size D-C73 D-H7A1/H7B A B Hs A B Hs 6 10 16 3 3 20.5 2 2 20.5 2 2 15 1 1 15 2.5 2.5 17 1.5 1.5 17 Note) The above-mentioned value is a guide for auto switch mounting position for stroke enddetection.
Note 2) Since CRA130 has a stopper installed, there is no backlash produced under pressure.
Note 2) Since CRA130 has a stopper installed, there is no backlash produced under pressure.
(A contact) N.O. (A contact) Number of auto switches N.O. (A contact) N.O. (A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.
SRP SRF VCHR ITV ITV No load voltage (V peak) 0 to 20 [V] Max. current rating 5.0 100 Peak voltage IC ITVX Over 20 and 30 or less [V] (2) A circuit (class 2 circuit) with maximum 30 Vrms (42.4 V peak) or less, and a power supply consisting of a class 2 power supply unit confirming to UL1310, or a class 2 transformer confirming to UL1585. 2.
How to Order 2 2 0 0 01 M AS Option Body size None With seal Nil S 1 2 2 Meter-out Meter-in M5 standard 1/8, 1/4 standard Type Direct cylinder elbow type Control type M5 and U10/32 are not available with seal.
Symbol JIS symbol 1 Series AS-FM How to Order AS 2 2 1 1 F M 01 06 Body size Option 1 2 M5 standard 1/8, 1/4 standard Nil S None With sealant M5 and U10/32 are not available with sealant.
8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 2 M5 M5 AMR 1 4 2 1 (5) (5) Weight (kg) 0.15 0.18 0.2 0.3 0.5 1.4 2 4 ITV Note 1) No condensation.
pressure of 0.5MPa and a temperature of 20C. 10 Stainless Steel Series ASD-FG How to Order ASD 3 30FG 01 06 S Body size 2 3 4 5 6 M5 standard 1/8 standard 1/4 standard 3 /8 standard 1/2 standard With sealant M5 and U10/32 are not available with sealant.
tubing O.D.: 6 24 13.3 16.2 34 B 2 B 2 B 2 B 2 PE R 3 B 2 A 4 A 4 A 4 A 4 X P 1 A 4 One-touch fitting [4(A), 2(B) port] 13.3 (Pitch) P = 10.5 Applicable tubing O.D.: 4 6 24 16.2 34 17 36.7 B 2 B 2 B 2 B 2 B 2 R 3 A A 4 A 4 A 4 A 4 A 4 P 1 One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8 M5 x 0.8 [4(A), 2(B) port] (L4) L3 SI unit (3.2) 101.2 8 3.1 18 28.8 36.3 58.2 3.5 5.5 35
(800) 526-7661 M5 x 0.8 Series Fibre Gasket Supplied 1/4 Hex Typ 35/64 35/64 29/64 29/64 .085 29/64 83 M5-B2 1/2 M5-B1 M5-B2 M5-B3 M5-B4 15/32 1/2 11 32 11 32 11 32 9/32 13/64 9/32 13/64 13/64 3 5/16 Hex Typ 84 M5-LB4 M5-LB1 M5-LB2 M5-LB3 M5-LB2 1/2 1 15/16 11/16 11/16 11/16 3 3 1/4 Hex Typ 5/16 Hex Typ 85 M5-T1 M5-T2 M5-T3 M5-T4 M5-T2 1/2 See complete selection of adapters on pages
single: VZA4141-01 02 Pilot port (A side) M5 x 0.8 body side 2 x 4.5 Mounting hole Pilot port (A side) (R1, R2 port) (P , A, B port) 2 x Rc 18 3 x Rc , 18 14 2 x M5 x 0.8 sub-plate side 2 position double: VZA4241-01 02 Pilot port (B side) Body side Pilot port (A side) 2 x M5 x 0.8 body side 2 x 4.5 Mounting hole 2 x Rc 18 18 14 3 x Rc , 2 x M5 x 0.8 sub-plate side Pilot port (A side) (R1
Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 2 0 M5 06 AS 1F S G Body size 1 S Body size 2/3/4 AS 2 2 0 1F S G 01 06 With indicator Body size Made to Order Refer to page 698 for details. 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) 0 Meter-out 1 Meter-in Note) Face seal type is used for the G thread
ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.
Base Mounted Plug-in Unit VQ5000 Series Bottom ported drawing With connector on U side (FU) SV 106 61 SYJ 83.5 9 9 55.5 M5 x 0.8 Ground screw SZ 1/2" 4(A), 2(B) port 34.5 VF n U side X 12 VP4 B 2 A 4 6 VQ 1/2 B A B 2 A 4 VQ 4/5 VQ 4/5 5 SMC SMC SMC SMC SMC B A VQC 1/2 B 2 A 4 4 VQC 4/5 B A P = 41 L1 L2 B 2 A 4 VQZ 3 B A SQ B 2 A 4 2 B A VFS B 2 A 4 VFR 1 B A VQ7 58.5 34.5 46 68.5 X 12 Stations
D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04